JPS62285057A - 電気めつき浴中の有機添加物の定量法 - Google Patents

電気めつき浴中の有機添加物の定量法

Info

Publication number: JPS62285057A
Authority: JP; Japan
Prior art keywords: electrode; bath; polarographic; mercury; additive
Prior art date: 1986-05-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP62122355A

Other languages

English (en)

Japanese (ja)

Inventor

リユデイー、ドウドンカー

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Siemens Corp

Original Assignee

Siemens Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1986-05-21

Filing date

1987-05-19

Publication date

1987-12-10

1987-05-19 Application filed by Siemens Corp filed Critical Siemens Corp

1987-12-10 Publication of JPS62285057A publication Critical patent/JPS62285057A/ja

Status Pending legal-status Critical Current

Links

238000000034 method Methods 0.000 title claims description 11
238000009713 electroplating Methods 0.000 title claims description 5
239000006259 organic additive Substances 0.000 title claims description 4
239000000654 additive Substances 0.000 claims description 44
239000000080 wetting agent Substances 0.000 claims description 27
239000010949 copper Substances 0.000 claims description 23
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 22
230000000996 additive effect Effects 0.000 claims description 22
229910052802 copper Inorganic materials 0.000 claims description 22
229910052753 mercury Inorganic materials 0.000 claims description 19
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 18
238000005259 measurement Methods 0.000 claims description 14
239000007788 liquid Substances 0.000 claims description 12
238000007747 plating Methods 0.000 claims description 11
239000000243 solution Substances 0.000 claims description 7
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 6
238000004445 quantitative analysis Methods 0.000 claims description 6
239000000872 buffer Substances 0.000 claims description 4
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 claims description 2
229910021607 Silver chloride Inorganic materials 0.000 claims description 2
229910052697 platinum Inorganic materials 0.000 claims description 2
229910052709 silver Inorganic materials 0.000 claims description 2
239000004332 silver Substances 0.000 claims description 2
HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 claims description 2
235000011121 sodium hydroxide Nutrition 0.000 claims description 2
238000003556 assay Methods 0.000 claims 1
239000007853 buffer solution Substances 0.000 claims 1
238000004451 qualitative analysis Methods 0.000 claims 1
238000005282 brightening Methods 0.000 description 11
230000008021 deposition Effects 0.000 description 5
238000012544 monitoring process Methods 0.000 description 4
150000003839 salts Chemical class 0.000 description 4
238000011088 calibration curve Methods 0.000 description 3
230000000694 effects Effects 0.000 description 3
150000002500 ions Chemical class 0.000 description 3
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
230000009467 reduction Effects 0.000 description 3
JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
230000009471 action Effects 0.000 description 2
230000008901 benefit Effects 0.000 description 2
229910001431 copper ion Inorganic materials 0.000 description 2
238000001736 differential pulse polarography Methods 0.000 description 2
239000011521 glass Substances 0.000 description 2
239000000203 mixture Substances 0.000 description 2
230000008569 process Effects 0.000 description 2
230000035945 sensitivity Effects 0.000 description 2
230000003068 static effect Effects 0.000 description 2
239000000126 substance Substances 0.000 description 2
VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
239000002253 acid Substances 0.000 description 1
230000003213 activating effect Effects 0.000 description 1
238000007792 addition Methods 0.000 description 1
238000000086 alternating current polarography Methods 0.000 description 1
238000013459 approach Methods 0.000 description 1
239000007864 aqueous solution Substances 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
230000008859 change Effects 0.000 description 1
238000009614 chemical analysis method Methods 0.000 description 1
239000013065 commercial product Substances 0.000 description 1
229910000365 copper sulfate Inorganic materials 0.000 description 1
ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
238000010494 dissociation reaction Methods 0.000 description 1
230000005593 dissociations Effects 0.000 description 1
238000011156 evaluation Methods 0.000 description 1
150000002730 mercury Chemical class 0.000 description 1
229910021645 metal ion Inorganic materials 0.000 description 1
239000011259 mixed solution Substances 0.000 description 1
239000011148 porous material Substances 0.000 description 1
238000011160 research Methods 0.000 description 1
239000011780 sodium chloride Substances 0.000 description 1
239000007787 solid Substances 0.000 description 1
238000001179 sorption measurement Methods 0.000 description 1
239000011593 sulfur Substances 0.000 description 1
229910052717 sulfur Inorganic materials 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
- C25D21/14—Controlled addition of electrolyte components

Landscapes

Engineering & Computer Science (AREA)
Chemical & Material Sciences (AREA)
Automation & Control Theory (AREA)
Chemical Kinetics & Catalysis (AREA)
Electrochemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Electrolytic Production Of Metals (AREA)
Electroplating And Plating Baths Therefor (AREA)
Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

JP62122355A 1986-05-21 1987-05-19 電気めつき浴中の有機添加物の定量法 Pending JPS62285057A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE3617046.1		1986-05-21
DE3617046		1986-05-21

Publications (1)

Publication Number	Publication Date
JPS62285057A true JPS62285057A (ja)	1987-12-10

Family

ID=6301279

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP62122355A Pending JPS62285057A (ja)	1986-05-21	1987-05-19	電気めつき浴中の有機添加物の定量法

Country Status (4)

Country	Link
EP (1)	EP0246494B1 (de)
JP (1)	JPS62285057A (de)
AT (1)	ATE49613T1 (de)
DE (1)	DE3761442D1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2012177628A (ja) *	2011-02-28	2012-09-13	Meltex Inc	無電解ニッケルめっき液の硫黄化合物定量分析方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP1932953B1 (de)	2006-12-11	2012-11-14	Atotech Deutschland GmbH	Galvanisches Verfahren mit Analyse des Elektrolytbads durch Festphasenextraktion
CN103014823B (zh) *	2013-01-05	2015-05-13	华进半导体封装先导技术研发中心有限公司	改进铜电沉积的添加剂效果快速判定方法

1987
- 1987-05-07 AT AT87106582T patent/ATE49613T1/de not_active IP Right Cessation
- 1987-05-07 DE DE8787106582T patent/DE3761442D1/de not_active Expired - Lifetime
- 1987-05-07 EP EP87106582A patent/EP0246494B1/de not_active Expired - Lifetime
- 1987-05-19 JP JP62122355A patent/JPS62285057A/ja active Pending

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2012177628A (ja) *	2011-02-28	2012-09-13	Meltex Inc	無電解ニッケルめっき液の硫黄化合物定量分析方法

Also Published As

Publication number	Publication date
DE3761442D1 (de)	1990-02-22
ATE49613T1 (de)	1990-02-15
EP0246494A1 (de)	1987-11-25
EP0246494B1 (de)	1990-01-17

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