JPS6229365B2 - - Google Patents

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Publication number
JPS6229365B2
JPS6229365B2 JP54021411A JP2141179A JPS6229365B2 JP S6229365 B2 JPS6229365 B2 JP S6229365B2 JP 54021411 A JP54021411 A JP 54021411A JP 2141179 A JP2141179 A JP 2141179A JP S6229365 B2 JPS6229365 B2 JP S6229365B2
Authority
JP
Japan
Prior art keywords
powder
sial
sio
compound
composition ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54021411A
Other languages
Japanese (ja)
Other versions
JPS55116603A (en
Inventor
Hiroshi Inoe
Akihiko Tsuge
Hiroyasu Oota
Katsutoshi Yoneya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2141179A priority Critical patent/JPS55116603A/en
Publication of JPS55116603A publication Critical patent/JPS55116603A/en
Publication of JPS6229365B2 publication Critical patent/JPS6229365B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 本発明はSi―Al―O―N系化合物からなるセラ
ミツク粉末の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing ceramic powder made of a Si--Al--O--N compound.

超高温で強い腐食性環境下で使用される構造材
料として窒化けい素(Si3N4)系セラミツク焼結材
料が注目されている。ところでこの種セラミツク
ス焼結材料において純粋なSi3N4系焼結体の場合
は焼結性が劣り高密度のものを得難いと云う不都
合さがある。この改善策としてアルミニウム
(Al)や酸(O)を固溶させた所謂るサイアロン
(SiAlON)化合物化したものが関心を寄せられて
いる。即ちこのサイアロン(SiAlON)化合物は
耐食性がすぐれており、且つ高密度焼結体化も容
易であるため、そのまま或いは希土類酸化物を加
えて成る焼結体は耐食性および機械的特性を要求
される構造材料としての適用が試みられている。
しかして上記SiAlON系焼結体は窒化硅素
(Si3N4)と窒化アルミニウム(AlN)とアルミナ
(Al2O3)もしくはシリカ(SiO2)との混合物を焼
結することによつて得られるが、高価なSi3N4
直接の原料とするためコスト面から用途が限定さ
れる。またシリカ(SiO2)、アルミニウム(Al)
および硅素(Si)の混合物を原料とし、SiO2
Alで還元した後、還元生成したSiを窒化させてか
ら焼結する方法もある。しかしこの場合には反応
工程の制御が難しく所望の焼結体を得るには高度
の熟練を要するなどし量産性に欠ける不都合さが
みられる。
Silicon nitride (Si 3 N 4 )-based ceramic sintered materials are attracting attention as structural materials used in extremely high-temperature and highly corrosive environments. However, in the case of a pure Si 3 N 4 based sintered body of this type of ceramic sintered material, the sinterability is poor and it is difficult to obtain a high density material. As a solution to this problem, there is interest in a so-called sialon (SiAlON) compound in which aluminum (Al) and acid (O) are dissolved in solid solution. In other words, this SiAlON compound has excellent corrosion resistance and can be easily made into a high-density sintered body, so the sintered body made as it is or with rare earth oxide added can be used for structures that require corrosion resistance and mechanical properties. Attempts are being made to use it as a material.
However, the above-mentioned SiAlON-based sintered body can be obtained by sintering a mixture of silicon nitride (Si 3 N 4 ), aluminum nitride (AlN), and alumina (Al 2 O 3 ) or silica (SiO 2 ). However, because it uses expensive Si 3 N 4 as a direct raw material, its applications are limited due to cost considerations. Also silica (SiO 2 ), aluminum (Al)
and silicon (Si) as raw materials, and SiO 2
There is also a method in which after reduction with Al, the Si produced by the reduction is nitrided and then sintered. However, in this case, it is difficult to control the reaction process, and a high level of skill is required to obtain the desired sintered body, resulting in a lack of mass productivity.

本発明者らは上記点に対処して検討を進めた結
果、SiO2のカーボン(C)による還元および還元さ
れたSiの窒化に際し、AlNやAl2O3を共在させた
場合、容易に所望の硅素アルミニウムオキシ窒化
物系の化合物粉末が合成されることを見出した。
The inventors of the present invention proceeded with their studies in response to the above points, and found that when AlN and Al 2 O 3 are co-present during the reduction of SiO 2 with carbon (C) and the nitridation of the reduced Si, It has been found that a desired silicon-aluminum oxynitride-based compound powder can be synthesized.

即ち本発明は、次式に示す。 That is, the present invention is expressed by the following formula.

3SiO2+6C+2N2→Si3N4+6CO シリカ(SiO2)とカーボン(C)を出発原料とした
酸化物還元法による窒化硅素(Si3N4)粉末の合成
に際し、所望のサイアロン(Si―Al―O―N)化
合物もしくは希土類酸化物―サイアロン
(R2O3・Si―Al―O―N)系化合物となるよう
に、SiO2とカーボンとAlNもしくはAl2O3さらに
要すればR2O3を所定の組成比にそれぞれ選んで
なる混合物を出発原料とすることを骨子とする。
しかして本発明によれば上記出発原料混合粉末中
のカーボンによるSiO2の還元、還元されたSiの窒
化反応に併せて前記所要のサイアロン系化合物粉
末を合成しうるものであり、この還元、窒化反応
は一般に1300〜1550℃、2〜10時間程度で充分で
ある。
3SiO 2 +6C+2N 2 →Si 3 N 4 +6CO When synthesizing silicon nitride (Si 3 N 4 ) powder by the oxide reduction method using silica (SiO 2 ) and carbon (C) as starting materials, the desired sialon (Si-Al -O-N) compound or rare earth oxide-Sialon (R 2 O 3.Si -Al-O-N) compound, SiO 2 , carbon, AlN or Al 2 O 3 , and R 2 if necessary. The main idea is to use a mixture of O 3 in a predetermined composition ratio as a starting material.
However, according to the present invention, the required sialon compound powder can be synthesized in conjunction with the reduction of SiO 2 by the carbon in the starting raw material mixed powder and the nitriding reaction of the reduced Si, and this reduction, nitriding Generally, a reaction time of about 2 to 10 hours at 1300 to 1550°C is sufficient.

本発明においてサイアロン系化合物とは、一般
式、Si6ZAlZN8ZZ,SiAl4N4O2
SiAl5N5O,SiAl6N6O2,もしくはSiAl6N3O2また
はR2O3・Si6ZAlZ―N8ZZ,R2O3
SiAl4N4O2,R2O3・SiAl5N5O・R2O3
SiAl6N6O2,もしくはR2O3・SiAl6N3O2(但しZ
は0<Z≦4の数、RはY,Ce,La,Scのうち
の1種以上)で示される。従つて出発原料として
のSiO2とカーボンとAlNもしくはAl2O3とR2O3
の組成比は上記目的とするサイアロン系化合物の
種類によつて(相応して)選択することになる。
勿論ここで最終的に得られるサイアロン系化合物
粉末中にSiO2を適宜残存させるため還元に寄与
するカーボン量を適宜減量させるなどすることも
できる。
In the present invention, sialon compounds have the general formula: Si 6 - Z Al Z N 8 - Z O Z , SiAl 4 N 4 O 2 ,
SiAl 5 N 5 O, SiAl 6 N 6 O 2 , or SiAl 6 N 3 O 2 or R 2 O 3・Si 6Z Al Z ― N 8Z O Z , R 2 O 3
SiAl 4 N 4 O 2 , R 2 O 3・SiAl 5 N 5 O・R 2 O 3
SiAl 6 N 6 O 2 or R 2 O 3・SiAl 6 N 3 O 2 (However, Z
is a number satisfying 0<Z≦4, and R is one or more of Y, Ce, La, and Sc). Therefore, the composition ratio of SiO 2 and carbon and AlN or Al 2 O 3 and R 2 O 3 as starting materials is selected depending on (corresponding to) the type of the target sialon compound.
Of course, the amount of carbon contributing to the reduction can also be reduced as appropriate so that SiO 2 remains as appropriate in the finally obtained sialon compound powder.

上記の如くSiO2,カーボン,AlN,Al2O3
R2O3の各粉末を所要の組成比に選択混合したも
のを出発原料とする本発明によれば先ずSiO2
還元窒化反応において、その反応系にはAlNや
Al2O3など他の原料粉末が共存するためこれら
AlN粉末などが反応の核となつて上記還元、窒化
反応が容易に促進される。一方前記SiO2の還
元、窒化反応の進行に伴ない残余のAlNやAl2O3
などとの間の反応も容易に起生し、微細な所望の
サイアロン系化合物粉末が得られる。このように
得られるサイアロン系化合物粉末の粒径が細かい
ことは成形後の焼結性にも大きく影響し、最終的
に緻密な焼結体を容易に得られると云う利点をも
たらす。かくして本発明方法は、煩雑な操作を要
せず簡易に所望のサイアロン系化合物粉末が得ら
れること、しかも得られたサイアロン系化合物粉
末が緻密で高温高強度で且つ耐食性のすぐたセラ
ミツク焼結体の製造に達することなどから実用上
大きく評価されるものと云える。
As mentioned above, SiO 2 , carbon, AlN, Al 2 O 3 ,
According to the present invention, which uses a selective mixture of R 2 O 3 powders in a desired composition ratio as a starting material, first, in the reductive nitriding reaction of SiO 2 , AlN and other substances are added to the reaction system.
Because other raw material powders such as Al 2 O 3 coexist, these
The AlN powder and the like serve as reaction nuclei, and the above reduction and nitridation reactions are easily promoted. On the other hand, as the SiO 2 reduction and nitriding reaction progresses, residual AlN and Al 2 O 3
Reactions between silica and the like easily occur, and the desired fine powder of the sialon compound can be obtained. The fine particle size of the sialon-based compound powder thus obtained greatly affects the sinterability after molding, and has the advantage that a dense sintered body can be easily obtained in the end. Thus, the method of the present invention allows the desired sialon compound powder to be easily obtained without requiring complicated operations, and furthermore, the obtained sialon compound powder is a ceramic sintered body that is dense, has high strength at high temperatures, and has excellent corrosion resistance. It can be said that it is highly evaluated in practical terms because it has reached the point where it can be manufactured.

次に本発明の実施例を記載する。 Next, examples of the present invention will be described.

実施例 1 平均粒径0.013μのSiO2粉末240g(4モル)、平
均粒径0.029μのカーボン粉末72g(6モル)、平
均粒径0.95μのAlN粉末82g(2モル)をボール
ミルリングして原料粉末を先ず調製した。次いで
この原料粉末を1450℃、N2雰囲気下で5時間還
元、窒化反応させてから、700℃空気雰囲気中3
時間加熱処理して残存カーボンを除去した。
Example 1 240 g (4 mol) of SiO 2 powder with an average particle size of 0.013 μ, 72 g (6 mol) of carbon powder with an average particle size of 0.029 μ, and 82 g (2 mol) of AlN powder with an average particle size of 0.95 μ were ball milled. A raw material powder was first prepared. Next, this raw material powder was reduced and nitrided at 1450°C in an N2 atmosphere for 5 hours, and then heated at 700°C in an air atmosphere for 3 hours.
The remaining carbon was removed by heat treatment for a period of time.

上記により生成物の収率は約98%で平均粒径1
μmの灰色粉末が得られ、この粉末についてX線
回折したところ次式、 Si4Al2N6O2で示されるサイアロン化合物であつ
た。純度は約99%で、主要不純物は残留カーボン
で約0.7%であつた。
As a result of the above, the yield of the product is approximately 98% and the average particle size is 1.
A gray powder of μm size was obtained, and X-ray diffraction of this powder revealed that it was a sialon compound represented by the following formula, Si 4 Al 2 N 6 O 2 . The purity was about 99%, and the main impurity was residual carbon, which was about 0.7%.

実施例 2 実施例1の場合における組成の原料粉末に、平
均粒子0.72μの酸化イツトリウム(Y2O3)粉末
24.5g(0.11モル)加えた混合粉末について、実
施例1の場合と同じ条件の還元、窒化反応および
カーボン処理を行ない、平均粒子1.1μの灰色粉
末を得た。収率、純度は実施例―1と同様であつ
た。かくして得た灰色粉末についてX線回折して
検べたところ次式、 8wt%Y2O3―92wt%Si4Al2N6O2 で示されるサイアロン系化合物であつた。
Example 2 Yttrium oxide (Y 2 O 3 ) powder with an average particle size of 0.72μ was added to the raw material powder having the composition in Example 1.
The mixed powder to which 24.5 g (0.11 mol) was added was subjected to reduction, nitriding reaction, and carbon treatment under the same conditions as in Example 1 to obtain a gray powder with an average particle size of 1.1 μm. The yield and purity were the same as in Example-1. When the thus obtained gray powder was examined by X-ray diffraction, it was found to be a sialon compound represented by the following formula: 8wt%Y 2 O 3 -92wt%Si 4 Al 2 N 6 O 2 .

Claims (1)

【特許請求の範囲】 1 Si6-ZAlZN8-ZOZ(0<Z≦4)、
SiAl4N4O2,SiAl5N5O2,SiAl6N6O2及び
SiAl6N3O2で表わされる硅素アルミニウムオキシ
窒化物(Si―Al―O―N系化合物)の一般式で示
された構成元素を供給する組成比で混合された
SiO2と、AlNもしくはAl2O3と、窒化還元反応の
際に前記一般式の組成比となるのに必要な量の還
元剤としてのCとの混合粉末を出発原料とし、窒
素含有雰囲気中で焼成することにより、Si―Al―
O―N系化合物粉末を合成することを特徴とする
セラミツク粉末の製造方法。 2 R2O3・Si6-ZAlZN8-ZOZ(0<Z≦4),
R2O3・SiAl4N4O2,R2O3・SiAl5N5O2,R2O3
SiAl6N6O2及びR2O3・SiAl6N3O2(ただしRは
Y、Ce,La,Scのうちの少なくとも一種の元
素)で表わされる希土類酸化物・硅素アルミニウ
ムオキシ窒化物(R2O3・Si―Al―O―N系化合
物)の一般式で示された構成元素を供給する組成
比で混合されたSiO2と、R2O3と、AlNもしくは
Al2O3と、窒化還元反応の際に前記一般式の組成
比となるのに必要な量の還元剤としてのCとの混
合粉末を出発原料とし、窒素含有雰囲気中で焼成
することにより、R2O3・Si―Al―O―N系化合
物粉末を合成することを特徴とするセラミツク粉
末の製造方法。
[Claims] 1 Si 6-Z Al Z N 8-Z O Z (0<Z≦4),
SiAl 4 N 4 O 2 , SiAl 5 N 5 O 2 , SiAl 6 N 6 O 2 and
SiAl 6 N 3 O 2 silicon aluminum oxynitride (Si-Al-O-N compound) is mixed at a composition ratio that provides the constituent elements shown in the general formula.
A mixed powder of SiO 2 , AlN or Al 2 O 3 , and C as a reducing agent in an amount necessary to achieve the composition ratio of the above general formula during the nitridation reduction reaction is used as a starting material, and the mixture is heated in a nitrogen-containing atmosphere. By firing with
A method for producing ceramic powder, which comprises synthesizing an O--N compound powder. 2 R 2 O 3・Si 6-Z Al Z N 8-Z O Z (0<Z≦4),
R 2 O 3・SiAl 4 N 4 O 2 , R 2 O 3・SiAl 5 N 5 O 2 , R 2 O 3
Rare earth oxides and silicon - aluminum oxynitrides ( SiO 2 mixed in a composition ratio that provides the constituent elements shown in the general formula of
By using a mixed powder of Al 2 O 3 and C as a reducing agent in an amount necessary to achieve the composition ratio of the above general formula during the nitridation reduction reaction as a starting material, and firing it in a nitrogen-containing atmosphere, A method for producing ceramic powder, which comprises synthesizing R 2 O 3 .Si-Al-O-N compound powder.
JP2141179A 1979-02-27 1979-02-27 Manufacture of ceramic powder Granted JPS55116603A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2141179A JPS55116603A (en) 1979-02-27 1979-02-27 Manufacture of ceramic powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2141179A JPS55116603A (en) 1979-02-27 1979-02-27 Manufacture of ceramic powder

Publications (2)

Publication Number Publication Date
JPS55116603A JPS55116603A (en) 1980-09-08
JPS6229365B2 true JPS6229365B2 (en) 1987-06-25

Family

ID=12054274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2141179A Granted JPS55116603A (en) 1979-02-27 1979-02-27 Manufacture of ceramic powder

Country Status (1)

Country Link
JP (1) JPS55116603A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108178634B (en) * 2018-02-08 2021-02-12 陕西科谷新材料科技有限公司 Preparation method of sialon combined silicon carbide ceramic

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104616A (en) * 1977-02-24 1978-09-12 Kinji Shimada Method of making nitrides from volcanic glass

Also Published As

Publication number Publication date
JPS55116603A (en) 1980-09-08

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