JPS6230075B2 - - Google Patents
Info
- Publication number
- JPS6230075B2 JPS6230075B2 JP57036050A JP3605082A JPS6230075B2 JP S6230075 B2 JPS6230075 B2 JP S6230075B2 JP 57036050 A JP57036050 A JP 57036050A JP 3605082 A JP3605082 A JP 3605082A JP S6230075 B2 JPS6230075 B2 JP S6230075B2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- laser
- visible
- mirror
- visible light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/035—Aligning the laser beam
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Description
【発明の詳細な説明】
本発明は炭酸ガスレーザ等の非可視光レーザを
用いてレーザ加工する場合に用いられ、非可視光
レーザ（以下CO2レーザビームと称す）軸に可視
光源を重畳したレーザ加工装置に関するものであ
る。Detailed Description of the Invention The present invention is used in laser processing using a non-visible laser such as a carbon dioxide laser, and is a laser beam in which a visible light source is superimposed on the axis of the non-visible laser (hereinafter referred to as CO 2 laser beam). This relates to processing equipment.
従来CO2レーザビームは遠赤外域に属し通常肉
眼では見ることが不可能である。そのため取扱い
等が非常に不便であり、かつ正確に加工物照射位
置に導くことが困難であることから可視光レーザ
であるHe―NeレーザビームをCO2レーザビーム
と同軸上に重畳させる方法がなされる。第１図お
よび第２図に従来のこの種の装置を示す。 Conventional CO 2 laser beams belong to the far-infrared region and are usually impossible to see with the naked eye. Therefore, it is very inconvenient to handle, etc., and it is difficult to accurately guide the workpiece to the irradiation position, so a method has been developed in which a He-Ne laser beam, which is a visible light laser, is coaxially superimposed with a CO 2 laser beam. Ru. A conventional device of this type is shown in FIGS. 1 and 2.
図において、１０はCO2レーザ装置、１１は同
装置より出たレーザビームであり、３０はCO2レ
ーザビームを透過し裏面で可視レーザビーム２１
（He―Neレーザ）を反射させるGaAs基板材料か
らなる45゜傾斜窓、１３は45゜傾斜窓３０を透過
したCO2レーザビーム、１２は45゜傾斜窓３０の
入射表面で反射されたCO2レーザビーム、２０は
可視レーザ装置（He―Neレーザ装置）、２１は同
装置より出たレーザビームであり、２２は傾斜窓
３０にて反射され、CO2レーザビーム１３と同一
軸上に重畳された可視レーザビーム、４０は集光
する放物面鏡、１４はこの放物面鏡４０の焦点位
置である。 In the figure, 10 is a CO 2 laser device, 11 is a laser beam emitted from the same device, and 30 is a visible laser beam 21 that passes through the CO 2 laser beam on the back side.
13 is a CO 2 laser beam transmitted through the 45° inclined window 30, and 12 is the CO 2 reflected from the incident surface of the 45° inclined window 30 . Laser beam 20 is a visible laser device (He-Ne laser device), 21 is a laser beam emitted from the same device, 22 is reflected by an inclined window 30, and is superimposed on the same axis as the CO 2 laser beam 13. The visible laser beam 40 is a condensing parabolic mirror, and 14 is the focal position of the parabolic mirror 40.
以下この装置の動作について説明する。 The operation of this device will be explained below.
CO2レーザ発振器１０より発振された、レーザ
ビーム１１は、発振波長10.6μｍに対して透過率
の高いGaAs基板材料ないしはKCl基板材料等を
有し、ビーム軸に対して45゜傾斜した45゜傾斜窓
３０に導かれる。この45゜傾斜窓３０は表面に反
射防止膜コーテイングがなされ、ビーム軸に対し
て45゜の角度を有するため表面では約２〜３％程
度の反射CO2レーザビーム１２がスプリツトされ
る。45゜傾斜窓３０を通過した透過CO2レーザビ
ーム１３は放物面鏡４０にて焦点位置１４に集光
される。 The laser beam 11 oscillated by the CO 2 laser oscillator 10 has a GaAs substrate material or a KCl substrate material, etc., which has high transmittance for the oscillation wavelength of 10.6 μm, and is tilted at 45° with respect to the beam axis. You will be led to window 30. This 45° inclined window 30 has an anti-reflection film coating on its surface and is angled at 45° with respect to the beam axis, so that about 2 to 3% of the reflected CO 2 laser beam 12 is split at the surface. The transmitted CO 2 laser beam 13 that has passed through the 45° inclined window 30 is focused at a focal point 14 by a parabolic mirror 40 .
一方可視レーザ装置２０より照射された可視光
レーザビーム２１は、45゜傾斜窓３０の裏面に入
射角45゜で入射し、その裏面で反射された反射可
視光レーザビーム２２は透過CO2レーザビーム１
３と同一軸上に重畳される。従つて、放物面鏡４
０により重畳されたHe―Neレーザビーム２２は
焦点位置１４に焦点され透過CO2レーザビーム１
３と同軸化され同一焦点位置１４に集光される。 On the other hand, the visible laser beam 21 emitted from the visible laser device 20 enters the back surface of the 45° inclined window 30 at an incident angle of 45°, and the reflected visible laser beam 22 reflected from the back surface becomes a transmitted CO 2 laser beam. 1
It is superimposed on the same axis as 3. Therefore, parabolic mirror 4
The He--Ne laser beam 22 superimposed by 0 is focused at the focal point 14 and becomes the transmitted CO 2 laser beam 1.
3 and condensed at the same focal point 14.
第２図に他の従来例を示す。第１図と同一個所
には同一番号を付す。第２図に示す可視光重畳方
法は上記45゜傾斜窓３０を金属鏡としCO2レーザ
ビーム１１を通過させる開口を設け、次に可視レ
ーザ（He―Neレーザ）発振器２０より出た可視
レーザビーム２１は、ビームエクスパンダー２２
にて45゜傾斜窓３０の開口より大きく、あるいは
開口を通過するCO2レーザビーム１１よりも大き
く拡大される。拡大された可視レーザ２３は45゜
傾斜鏡３０にて、開口よりも大きく拡大された
He―Neレーザのみ反射され、反射されたレーザ
ビーム２４は45゜傾斜鏡３０の開口を通過した
CO2レーザビーム１１と同一軸上に重畳すること
ができる。ただし重畳されたHe―Neレーザビー
ム２４は、開口された45゜傾斜鏡３０のため拡大
されたレーザビーム２３の外周部のみが反射され
リング形状となつて重畳されることになる。一方
拡大された可視レーザビーム２３の中央部は45゜
傾斜鏡３０の開口を通過しスプリツトされ、レー
ザビーム２５となる。リング状の可視レーザビー
ム２４を重畳したCO2レーザビーム１１は第１図
の例と同様に放物面鏡４０により、同軸化され、
同一焦点位置１４に集光される。 FIG. 2 shows another conventional example. The same parts as in Figure 1 are given the same numbers. The visible light superimposition method shown in FIG. 2 uses the 45° inclined window 30 as a metal mirror and provides an opening through which the CO 2 laser beam 11 passes, and then the visible laser beam emitted from the visible laser (He--Ne laser) oscillator 20. 21 is a beam expander 22
The beam is expanded larger than the aperture of the 45° inclined window 30 or larger than the CO 2 laser beam 11 passing through the aperture. The enlarged visible laser 23 is enlarged by a 45° inclined mirror 30 to be larger than the aperture.
Only the He-Ne laser was reflected, and the reflected laser beam 24 passed through the aperture of the 45° tilted mirror 30.
It can be superimposed on the same axis as the CO 2 laser beam 11. However, in the superimposed He--Ne laser beam 24, only the outer circumferential portion of the enlarged laser beam 23 is reflected due to the open 45° tilted mirror 30, and is superimposed in a ring shape. On the other hand, the center portion of the expanded visible laser beam 23 passes through the aperture of the 45° tilted mirror 30 and is split into a laser beam 25. The CO 2 laser beam 11 on which the ring-shaped visible laser beam 24 is superimposed is made coaxial by a parabolic mirror 40 as in the example of FIG.
The light is focused at the same focal point 14.
以上に述べた従来の可視レーザビーム（He―
Neレーザ）を重畳するレーザ加工装置では、次
のような欠点がある。すなわち第１図の構成では
レーザ出力が大きくなるにつれ、45゜傾斜窓３０
の熱損傷を防止するため45゜傾斜窓３０の冷却を
しなければならず装置が複雑化し、また45゜傾斜
窓３０表面におけるCO2レーザビーム１１の反射
が生じてスプリツトされるために出力が低下する
などの欠点がある。 The conventional visible laser beam (He-
Laser processing equipment that superimposes Ne laser has the following drawbacks. That is, in the configuration shown in FIG. 1, as the laser output increases, the 45° inclined window 30
In order to prevent thermal damage to the 45° inclined window 30, the device must be cooled, which complicates the equipment.Also, the CO 2 laser beam 11 is reflected on the surface of the 45° inclined window 30 and is split, resulting in a reduced output. There are disadvantages such as a decrease in
また第２図の構成では、45゜傾斜鏡３０の熱損
傷は防止できるがCO2レーザビーム１１の径が大
きくなつた場合45゜傾斜鏡３０の開口を大きくす
る必要があり、またCO2レーザビーム１１の外周
部が切られる恐れがあり、出力の低下が予想され
る。また最大の欠点は可視レーザビーム２１をビ
ームエクスパンダー２２で45゜傾斜鏡３０の開口
よりも大きく拡大されなければならないし、拡大
された可視レーザビーム２３の中央部は45゜傾斜
鏡３０の開口にて通過され、拡大された可視ビー
ム２３の外周部（リング状となる）のみ重畳され
ることになるから、可視レーザビームとしての光
量が不足する欠点がある。以上のように従来の構
成では装置の複雑化及び装置全体が大きくなる欠
点を有する。 Furthermore, with the configuration shown in FIG. 2, thermal damage to the 45° tilted mirror 30 can be prevented, but if the diameter of the CO 2 laser beam 11 increases, the aperture of the 45° tilted mirror 30 needs to be enlarged, and the CO 2 laser There is a risk that the outer periphery of the beam 11 will be cut, and a decrease in output is expected. The biggest drawback is that the visible laser beam 21 must be expanded by the beam expander 22 to be larger than the aperture of the mirror 30 tilted at 45 degrees, and the central part of the expanded visible laser beam 23 must be expanded by the aperture of the mirror 30 tilted at 45 degrees. Since only the outer periphery (ring-shaped) of the expanded visible beam 23 that has passed through the visible laser beam 23 is superimposed, there is a drawback that the amount of light as a visible laser beam is insufficient. As described above, the conventional configuration has the drawbacks of complicating the device and increasing the size of the entire device.
本発明は上記従来例の欠点を除去できるレーザ
加工装置を提供するもので、従来のレーザ加工装
置最終端である集光用レンズの上部（入射側上
面）にオプテイカルフアイバーを用いて可視光を
伝送するように構成することによつて装置全体の
簡素化及び低価格化をはかつたものである。 The present invention provides a laser processing device that can eliminate the drawbacks of the conventional laser processing device, and uses an optical fiber at the top (incidence side upper surface) of the condensing lens, which is the final end of the conventional laser processing device, to emit visible light. By configuring the device to transmit data, the entire device can be simplified and lowered in price.
以下図面を参照して本発明の一実施例を詳細に
説明する。第３図は本発明のレーザ加工装置の実
施例を示す図である。１０はCO2レーザ発振器で
あり発振器より出たCO2レーザビーム１１は45゜
傾斜を持つた全反射鏡４１によつて90゜直角に曲
げられ、（あるいは、複数枚の全反射鏡４１を有
するマニユピレータによつて伝送され）最後に
CO2レーザビーム１２を集光するレンズ５０によ
つて焦点位置１４に集光される。従来の装置では
放物面鏡４０（本発明では全反射鏡４１）の前段
で可視光線はCO2レーザビームと同一軸上に重畳
されていたが、本実施例では、可視光源２０より
でたビームは、分配器２２によつて複数本のオプ
テイカルフアイバー２３に分配され、全反射鏡４
１やマニユピレータを通らず自由に伝送されて最
終段の集光レンズ５０の上面近傍の外周部にオプ
テイカルフアイバー用集光レンズを介して照射さ
れる（オプテイカルフアイバー用集光レンズは必
ずしも必要でない。図は使用していない場合を示
す）。オプテイカルフアイバー２３から出た可視
ビーム２４の照射状況を第４図に示す。第４図は
第３図に示す集光レンズ５０のＡ―A′における
断面図を示す。オプテイカルフアイバー２３から
出た可視ビーム２４は、CO2レーザビーム１２が
通過する領域をとり囲むように離散スポツト状に
設けられており、各可視ビーム２４は集光レンズ
５０によつて焦点位置１４に収束され、同時に集
光レンズ５０によつて可視光線２４とCO2レーザ
ビーム１２は同一軸上に重畳される。この場合可
視光源２０としてはレーザ発振器のほかLED等
の光源であつてもよい。 An embodiment of the present invention will be described in detail below with reference to the drawings. FIG. 3 is a diagram showing an embodiment of the laser processing apparatus of the present invention. 10 is a CO 2 laser oscillator, and the CO 2 laser beam 11 emitted from the oscillator is bent at a right angle of 90 degrees by a total reflection mirror 41 having an inclination of 45 degrees (or a total reflection mirror 41 having a plurality of total reflection mirrors 41). transmitted by the manipulator) and finally
The CO 2 laser beam 12 is focused at a focal point 14 by a lens 50 . In conventional devices, visible light is superimposed on the same axis as the CO 2 laser beam before the parabolic mirror 40 (total reflection mirror 41 in the present invention), but in this embodiment, the visible light rays are superimposed on the same axis as the CO 2 laser beam. The beam is distributed to a plurality of optical fibers 23 by a distributor 22, and a total reflection mirror 4
1 or the manipulator, and irradiates the outer periphery near the top surface of the final stage condenser lens 50 via the condenser lens for optical fiber (the condenser lens for optical fiber is not necessarily required). (Figure shows when not in use). FIG. 4 shows the irradiation state of the visible beam 24 emitted from the optical fiber 23. FIG. 4 shows a cross-sectional view of the condenser lens 50 shown in FIG. 3 along line AA'. The visible beams 24 emitted from the optical fiber 23 are provided in a discrete spot shape so as to surround the area through which the CO 2 laser beam 12 passes, and each visible beam 24 is focused at the focal position 14 by the condenser lens 50. At the same time, the visible light 24 and the CO 2 laser beam 12 are superimposed on the same axis by the condenser lens 50. In this case, the visible light source 20 may be a light source such as an LED in addition to a laser oscillator.
第５図はオプテイカルフアイバーから出射した
可視光線２４を集光レンズ５０を介して収束した
時の第３図Ｂ―B′断面を示す図であり、スポツト
状の可視ビーム２４をガイド光として、CO2レー
ザビーム１２の中心軸と集光レンズ５０の中心軸
を容易に合致させることができ、幾何学的収差を
できる限り最小にすることができる。 FIG. 5 is a cross-sectional view taken along the line B-B' in FIG. 3 when the visible light 24 emitted from the optical fiber is converged through the condenser lens 50, and the spot-shaped visible beam 24 is used as guide light. The central axis of the CO 2 laser beam 12 and the central axis of the condensing lens 50 can be easily matched, and geometrical aberrations can be minimized as much as possible.
第６図は第３図Ｃ―C′断面を示す図で、第７
図は焦点位置１４における断面（第３図Ｄ―
D′断面）を示す。第７図はCO2レーザビーム１２
と可視ビーム２４が一致し点状になつた場合で、
CO2レーザのような非可視光レーザの焦点位置を
容易に探しうることができる。更に本発明はオプ
テイカルフアイバーの先端部と集光用レンズ入射
面との距離を変えることにより焦点位置を容易に
探しうる副次的効果を有する。 Figure 6 is a cross-sectional view taken along line C-C' in Figure 3.
The figure shows a cross section at the focal point 14 (Fig. 3D-
D′ section) is shown. Figure 7 shows CO 2 laser beam 12
When the visible beam 24 coincides with the visible beam 24 and becomes dot-shaped,
The focal position of a non-visible laser such as a CO 2 laser can be easily found. Furthermore, the present invention has the secondary effect that the focal point position can be easily found by changing the distance between the tip of the optical fiber and the incident surface of the condensing lens.
第８図は集光用レンズ５０と可視光用オプテイ
カルフアイバー２３とを取りつける集光用レンズ
保持装置の断面図を示す。集光用レンズホルダ５
０１に可視光オプテイカルフアイバー２３を固定
した固定リング５０２がねじにより取り付けら
れ、上下に位置調整しうる構造になつている。以
上の構成から可視光オプテイカルフアイバー２３
と焦光レンズ５０との間隔を可変することによつ
てCO2レーザビーム１２の焦点位置１４と可視光
ビーム焦点位置を一致させることができる。 FIG. 8 shows a sectional view of a condensing lens holding device to which a condensing lens 50 and a visible light optical fiber 23 are attached. Focusing lens holder 5
A fixing ring 502 to which a visible light optical fiber 23 is fixed is attached to 01 with a screw, and has a structure in which the position can be adjusted up and down. From the above configuration, visible light optical fiber 23
By varying the distance between the laser beam 12 and the focusing lens 50, the focal position 14 of the CO 2 laser beam 12 and the focal position of the visible light beam can be made to coincide.
以上のように本発明はCO2レーザ等の非可視光
レーザビームに可視光線を重畳させるに際し、可
視光線をオプテイカルフアイバーを用いて非可視
光レーザビームの外周部に位置させたもので、装
置全体の簡素化、低価格化がはかれると同時に、
焦点位置の探査が容易、幾何学的収差を最小に出
来る等の利点を有する。 As described above, the present invention uses an optical fiber to position the visible light on the outer periphery of the invisible laser beam when superimposing visible light on an invisible laser beam such as a CO 2 laser. At the same time as overall simplification and cost reduction,
It has advantages such as easy detection of the focal point position and the ability to minimize geometrical aberrations.
第１図および第２図は従来のレーザ加工装置の
ビーム経路を示す図、第３図は本発明の一実施例
によるレーザ加工装置のレーザビームの経路を示
す図、第４図は同レーザ加工装置の最終段集光レ
ンズにおける断面図、第５図、第６図、第７図は
集光レンズの焦点位置までのレーザビームの断面
形状を示す図、第８図は本発明のレーザ加工装置
に使用される集光用レンズ保持装置の断面図であ
る。
１０……非可視レーザ発振器、１１，１２……
非可視レーザビーム、１４……焦点位置、２０…
…可視光源、２２……分配器、２３……オプテイ
カルフアイバー、２４……可視ビーム、４１……
全反射鏡、５０……集光レンズ。
1 and 2 are diagrams showing a beam path of a conventional laser processing device, FIG. 3 is a diagram showing a laser beam path of a laser processing device according to an embodiment of the present invention, and FIG. 4 is a diagram showing a laser beam path of a laser processing device according to an embodiment of the present invention. A cross-sectional view of the final stage condensing lens of the device; FIGS. 5, 6, and 7 are diagrams showing the cross-sectional shape of the laser beam up to the focal position of the condensing lens; FIG. 8 is a diagram showing the cross-sectional shape of the laser beam used in the laser processing device of the present invention. FIG. 3 is a sectional view of a condensing lens holding device. 10... Invisible laser oscillator, 11, 12...
Invisible laser beam, 14... Focus position, 20...
...Visible light source, 22...Distributor, 23...Optical fiber, 24...Visible beam, 41...
Total reflection mirror, 50...Condensing lens.
Claims (1)
集光レンズを介して被加工物上に照射する手段
と、集光レンズの被加工物側の面とは反対側の表
面に可視光線を導くための複数本のオプテイカル
フアイバとを有し、前記複数本のオプテイカルフ
アイバが非可視光レーザビーム領域の周辺に非可
視光レーザビーム領域を取り囲むよう設置され、
かつ集光レンズに対し光軸方向に相対的に移動可
能であることを特徴とするレーザ加工装置。1. A means for irradiating a non-visible laser beam onto a workpiece through a mirror optical system and a condenser lens, and a means for guiding visible light to the surface of the condenser lens on the opposite side of the workpiece side. a plurality of optical fibers, the plurality of optical fibers are installed around the invisible light laser beam region so as to surround the invisible light laser beam region,
A laser processing device characterized in that the laser processing device is movable relative to the condenser lens in the optical axis direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57036050A JPS58154480A (en) | 1982-03-08 | 1982-03-08 | Laser machining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57036050A JPS58154480A (en) | 1982-03-08 | 1982-03-08 | Laser machining device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58154480A JPS58154480A (en) | 1983-09-13 |
| JPS6230075B2 true JPS6230075B2 (en) | 1987-06-30 |
Family
ID=12458881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57036050A Granted JPS58154480A (en) | 1982-03-08 | 1982-03-08 | Laser machining device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58154480A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2589703B2 (en) * | 1987-09-14 | 1997-03-12 | 松下電器産業株式会社 | Connection device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57195450A (en) * | 1981-05-26 | 1982-12-01 | Kogyo Gijutsuin | Image focusing point direct viewing type laser knife or laser processing machine |
-
1982
- 1982-03-08 JP JP57036050A patent/JPS58154480A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58154480A (en) | 1983-09-13 |
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