JPS623046U - - Google Patents
Info
- Publication number
- JPS623046U JPS623046U JP9455885U JP9455885U JPS623046U JP S623046 U JPS623046 U JP S623046U JP 9455885 U JP9455885 U JP 9455885U JP 9455885 U JP9455885 U JP 9455885U JP S623046 U JPS623046 U JP S623046U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- sputtering
- beam gun
- gun
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 238000005211 surface analysis Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Description
第１図は、本考案の一実施例を示す装置の構成
図、第２図は、同上装置の動作を示す説明図、及
び第３図は、従来のスパツタリング法を示す説明
図である。
１……真空容器、２……試料台、３……イオン
銃、４……電子銃、５……質量分析計、６……電
流制御回路。
FIG. 1 is a configuration diagram of an apparatus showing an embodiment of the present invention, FIG. 2 is an explanatory diagram showing the operation of the same apparatus, and FIG. 3 is an explanatory diagram showing a conventional sputtering method. 1... Vacuum vessel, 2... Sample stage, 3... Ion gun, 4... Electron gun, 5... Mass spectrometer, 6... Current control circuit.
Claims (1)
電子ビーム銃と、試料台と、スパツタリング時に
試料から放出される二次イオンを検出する質量分
析計と、該分析計からの出力信号に基づいて前記
電子ビーム銃の出力を制御する制御回路を備えて
なる表面分析用スパツタリング装置。 A sputtering gas ion gun in a vacuum container,
It includes an electron beam gun, a sample stage, a mass spectrometer that detects secondary ions emitted from the sample during sputtering, and a control circuit that controls the output of the electron beam gun based on the output signal from the analyzer. A sputtering device for surface analysis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9455885U JPS623046U (en) | 1985-06-22 | 1985-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9455885U JPS623046U (en) | 1985-06-22 | 1985-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS623046U true JPS623046U (en) | 1987-01-09 |
Family
ID=30653165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9455885U Pending JPS623046U (en) | 1985-06-22 | 1985-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS623046U (en) |
-
1985
- 1985-06-22 JP JP9455885U patent/JPS623046U/ja active Pending
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