JPS6231683A - Carrying method between clean room - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of transporting goods (articles) such as semiconductors, which are extremely sensitive to dust, between clean rooms.

BACKGROUND OF THE INVENTION Loads can be transported between clean rooms arranged side by side in the horizontal direction using self-propelled transport carts or the like. but,
A clean room is formed over a plurality of floors in the vertical direction, and an elevator-type transport method is adopted when cargo is transported between these clean rooms.

Problems to be Solved by the Invention In the conventional elevator-type transportation method as described above, all of the four exit paths were kept clean, but this required equipment to maintain cleanliness, and It is expensive, including operating costs.

Furthermore, the inside of the elevating body that stores and holds the load cannot be sufficiently cleaned.

Means for Solving the Problems In order to solve the above-mentioned problems, the method of transporting between clean rooms according to the present invention involves raising and lowering an elevator body having a clean unit in a hoistway formed through a plurality of floors of clean rooms. Then, the elevating body is stopped facing any one of the communicating passages formed in each clean room, and first the opening/closing door for the communicating passage provided on the hoistway side of the communicating passage is opened, and then the communicating passage of the reed body is opened. Open the opening/closing m for the elevating object provided on the side, transfer the load between the elevating object and the clean room side with both doors open, and then close the fftl m for the elevating object.
After the opening/closing m for the communicating path is moved to close.

Effects According to the configuration of the present invention described above, only the inside of the elevating body can be cleaned by operating the clean air]. In addition, after connecting the elevating bodies to the communication path facing each other,
By opening H7G, the clean air from the clean room side will flow through the communication path toward the opening/closing door for the elevating object, and when the door for the elevating object is opened in this state, there will be no air inside the elevating object. This allows clean air from the clean room to enter and prevents contaminated air from entering the hoistway. Therefore, even though the hoistway is a contaminated area,
Loads can be delivered while maintaining cleanliness within each clean room and the elevator.

Example An embodiment of the present invention will be described below based on the drawings.

, 1 is a clean room, which is configured so that clean air 3 is blown downward from the tendon side through a filter 2, and the descending air is sucked into the floor through a mesh-type floor 4. This clean room 1 is formed over multiple floors. A hoistway 6 is formed between these clean rooms 1 by vertical walls 5, and a hoistway 6 is disposed within this hoistway 6. The lifting drive device 8 includes a forward/reverse drive type motor 9 installed at the upper end of the hoistway 6, and a chain wheel or the like hung between a driving wheel body 10 and an idling wheel body 11 that are interlocked with the motor 9. One end of the cable body 12 is connected to the upper end of the elevating body 7 via a buffer 13 such as a spring, and a balance way 1-14 is attached to the other end. The elevating body 7 includes a frame body 15 to which the cable body 12 is connected, and a cover unit 16 that forms a sealed space within the frame body 15. By being supported and guided by guide devices (not shown) provided on both sides, the elevating body 7 can move up and down on a fixed path.

The interior of the cover unit 16 is roughly divided into three upper and lower chambers. That is, a pair of upper and lower horizontal partition plates 17 and 18 divide the room into an upper clean unit chamber 19, an intermediate cargo storage chamber 20, and a lower exhaust chamber 21.

Further, the clean unit chamber 19 and the exhaust chamber 21 are connected to each other via a communication member 22 provided on the negative side. The clean unit 23 provided in the clean unit chamber 19 is composed of a filter 24 and a fan 25. Here, the filter 24 is disposed near a mesh plate portion 26 formed on the partition plate 17, and the fan 25 is installed vertically in the room. It is attached to a partition plate 27 arranged in the direction of
It is open above 4. The lower partition plate 18 is made of punched stainless steel metal, and has a frame 30 provided slightly above the frame 30, and a pair of left and right receiving tables 31 arranged on the frame 30. These cargo receiving stands 31 are box-shaped with air permeability, and support a cargo 32 made of, for example, a case containing a semiconductor, through the upper surface thereof. The elevating body 7 supports and guides the elevating body opening/closing member 17ii34 at the entrance/exit 33, which is the open front surface thereof, so as to be able to rise and fall freely. (not shown). In each clean room 1, a communication path 37 is formed by a square cylindrical box body 36 in which the N1 wall body 5 is installed IA at a portion of the vertical wall body 5 that can freely face the entrance/exit 33 of the elevating body 7. A communication passage opening/closing door 38 is disposed at the end of the communication passage 37 on the hoistway 6 side and is supported and guided via a guide device (not shown) so that it can be raised and lowered.
It is carried out by Note that the lower part of the hoistway 6 and the bottom floor 4 of the lowest floor communicate with each other via an air vent 40 formed in the vertical wall body 5.

Next, the operation of the above embodiment will be explained.

In a state in which the load receiving platform 31 within the cover unit 16 supports the load 32, the elevator door 34 and each communicating path door 38 are open. At this time, the clean unit 23 is operating, and the air discharged from the exhaust port 29 of the fan 25 passes through the filter 24 and becomes the clean air 4.
1, and this clean air 41 is blown downward into the storage space 20. The downwardly blown clean air 41 mainly flows from the cargo storage chamber 20 to the exhaust chamber 21, circulates into the clean unit chamber 19 via the communication member 22, and is sucked into the fan 25.

As a result, the inside of the cargo storage chamber 20 is always kept clean. In this state, the four lowering drive devices 8 are activated to raise and lower the elevator body 7, and as shown in FIG. make it stop. In this state, first, the cylinder device 39 is retracted, and the communication path opening/closing 17j38 is raised and opened as shown in FIG. At this time, clean air 3 that has passed through filter 2 is in clean room 1.
is blown downward and sucked under the floor 4. Therefore, by the opening/closing operation of the communication passage opening/closing ffj 38, the clean air 3 flows through the communication passage 37 and collides with the front side of the elevator 7, and then the hoistway 6 It will flow inside. Thereby, the front side of the elevating object 7 including the elevating object opening/closing door 34 is covered with clean air 3 at the same level as the clean room 1. The first detection device 42 detects that the communication passage opening/closing door 38 is completely opened, and the motor 35 is driven forward based on the detection signal. As a result, the elevator door 34 is raised and opened as shown in FIG. With this opening movement, clean air 3 flows into the inlet/outlet 33.
This prevents dirty air from entering the hoistway 6 and into the hoisting body 7. Opening/closing door for elevating object 3
4 is completely opened is detected by the second detection device ff143, and an indicator lamp 44 in the clean room 1 is turned on based on the detection signal. Thereby, the load 32 can be removed by a device (not shown) or manually. After completing the work, press the end button 45 from the clean room 1 side. In the case of the device, termination is also automated. As a result, the motor 35 is first reversely driven, and the elevator door 34 is lowered and closed as shown in FIG. After this closing movement, the cylinder device 39 is extended and the communicating passage opening door 38 is lowered and closed as shown in FIG.

Thereafter, the elevating body 7 is moved up and down to face another communication path 37, and the load 32 is loaded in the same manner. Note that excess air generated by the clean air 3 flowing into the hoistway 6 is exhausted through the air vent 40.

Effects of the Invention According to the present invention having the above configuration, the inside of the elevating body can be cleaned by operating the clean unit. In addition, by opening the opening/closing door on the communication path side after connecting the elevating objects to the intended communication path, the clean air from the clean room side can flow through the communication path toward the U group for the elevating objects. Therefore, the front side of the elevating body can be covered with the clean air. Therefore, when the door for the elevator is opened in this state, clean air from the communication path will enter the elevator, thereby preventing contaminated air from entering the elevator. , the inside of this elevating body can be cleaned.

As a result, loads can be delivered to and from the elevator while maintaining the same level of cleanliness between the clean room and the interior of the elevator. Therefore, only the inside of the elevator can be cleaned, and the inside of the hoistway can be a contaminated part, so the equipment for maintaining cleanliness can be downsized and the cost including operating costs can be reduced, and the inside of the elevator can be sufficiently cleaned.

[Brief explanation of the drawing]

The drawings show one embodiment of the present invention, and FIG. 1 is a longitudinal side view;
FIG. 2 is a longitudinal sectional front view of the main part, FIGS. 3 and 4 are longitudinal sectional side views of the main part showing the operating state, and FIG. 5 is a timing chart. 1...Clean room, 3...Clean air, 5
... Vertical wall body, 6... Hoistway, 7... Lifting body, 8.
... Lifting part ega, 16... Cover integrated, 19... Clean unit chamber, 20... Load storage chamber, 21... Exhaust chamber, 22... Communication member, 23... Clean unit, 24...filter, 31...loading rack, 32...
...Load, 33...Entrance/exit, 34...Opening/closing door for elevating body, 35...Motor, 37...Communication path, 38...fffl closing m for communication path, 39...Cylinder device , 40・
・Air vent, 41 ・Clean air agent Yoshihiro Morimoto Figure 2 23 ・1J-enanynote

Claims (1)

[Claims] 1. A lifting body having a clean unit is raised and lowered in a hoistway formed through the clean rooms on multiple floors, and the lifting body is stopped facing any one of the communication passages formed in each clean room. First, open the opening/closing door for the communication passage provided on the hoistway side of the communication passage, then open the opening/closing door for the elevating body provided on the communication passage side of the elevating body, and with both doors open, the elevating body and the clean room side are connected. A transportation method between clean rooms in which cargo is transferred between clean rooms, and then the door for the elevator is closed, and then the door for the communication passage is closed.