JPS6232247Y2 - - Google Patents
Info
- Publication number
- JPS6232247Y2 JPS6232247Y2 JP18552281U JP18552281U JPS6232247Y2 JP S6232247 Y2 JPS6232247 Y2 JP S6232247Y2 JP 18552281 U JP18552281 U JP 18552281U JP 18552281 U JP18552281 U JP 18552281U JP S6232247 Y2 JPS6232247 Y2 JP S6232247Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- rollers
- roller
- sample stage
- circular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004621 scanning probe microscopy Methods 0.000 description 2
- 241001411320 Eriogonum inflatum Species 0.000 description 1
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- 238000005261 decarburization Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating And Analyzing Materials By Characteristic Methods (AREA)
- Microscoopes, Condenser (AREA)
Description
【考案の詳細な説明】
(産業上の利用分野)
本考案は円形の金属試料を円形に走査検鏡する
のに適した金属顕微鏡の試料台に関する。Detailed Description of the Invention (Field of Industrial Application) This invention relates to a sample stage for a metallurgical microscope suitable for circular scanning microscopy of a circular metal sample.
(従来の技術)
金属顕微鏡は一般に第1図に示す如く試料台1
のデツキプレート3の検鏡孔の上に、金属試料7
を検鏡面を下にして置き、下から対物レンズ5を
接近させて、検鏡面の状態を調べるものである。
試料の中には円形のものが多く、その外周面ある
いは、管においては内周面をも走査検鏡すること
が多い。例えば金属丸棒、丸管等の表面の脱炭、
浸炭あるいは肌焼鋼の浸炭層の厚さ測定、あるい
はこれら材料の表面傷の検査には全周の走査検鏡
が必要である。(Prior art) A metallurgical microscope generally has a sample stage 1 as shown in Figure 1.
Place the metal sample 7 above the speculum hole of the deck plate 3.
The specimen is placed with the speculum surface facing down, and the objective lens 5 is approached from below to examine the condition of the speculum surface.
Many of the samples are circular, and their outer circumferential surfaces or, in the case of tubes, their inner circumferential surfaces are often scanned and inspected. For example, decarburization of the surface of metal round bars, round pipes, etc.
Measuring the thickness of the carburized layer of carburized or case hardened steel, or inspecting these materials for surface flaws, requires a full-circle scanning microscope.
(解決すべき問題点)
しかるに一般の金属顕微鏡は試料を円形に回転
させる機能をもつていない。すなわち、一般には
試料台は2重になつていて、それぞれネジ4,
4′がついており、これを廻すことによつてそれ
ぞれ左右方向、前後方向へスライド移動できるだ
けである。従つて従来円形試料の外周あるいは内
周の検査は、試料を手で少しづつ廻しながら行な
つていた。これはかなりの熟練を要する作業であ
り、作業能率も悪く、検査の信頼性も低下する
が、特に倍率が高くなると、この傾向は著しいも
のがあつた。(Problems to be solved) However, general metallurgical microscopes do not have the ability to rotate the sample in a circular manner. In other words, the sample stage is generally double-layered, with screws 4 and 4 respectively.
4' is attached, and by turning this, it can be slid in the left-right direction and front-back direction, respectively. Therefore, conventionally, the outer or inner circumference of a circular sample has been inspected by rotating the sample little by little by hand. This is a task that requires considerable skill, has poor work efficiency, and lowers the reliability of the inspection, but this tendency is particularly pronounced when the magnification increases.
(問題点の解決手段)
本考案は上記に鑑みてなされたもので、試料台
の検鏡孔のまわりに水平方向に回転し得る3個の
ローラーを配置し、これらローラーに当接する円
形試料を、ローラーのいずれか1個を回転させる
ことで回転させ得るようにし、ローラーのいずれ
か少くとも1個は試料台に自由に着脱でき、試料
台の任意の位置に固定が可能な固定手段を有する
ことを特徴とする、円形試料を円形に走査検鏡し
得る金属顕微鏡用試料台。(Means for solving the problem) The present invention was made in view of the above, and consists of three rollers that can be rotated horizontally around the specimen hole of the sample stage, and a circular sample that comes into contact with these rollers. , can be rotated by rotating any one of the rollers, and at least one of the rollers can be freely attached to and detached from the sample stage, and has a fixing means that can be fixed at any position on the sample stage. A sample stand for a metallurgical microscope, which is capable of circularly scanning and inspecting a circular sample.
(実施例および作用)
次に本考案を実施例図面に基き、詳細に説明す
る。(Embodiments and Effects) Next, the present invention will be explained in detail based on embodiment drawings.
第2図は、本考案になる試料台の平面図、第3
図はその斜視図である。図において8,8′は固
定ローラー、8″は移設自由とした調整用ローラ
ー、9,9′,9″…はピンである。すなわち本考
案になる試料台は、従来の試料台に加えて、3個
のローラー8,8′,8″を配備したものである。
従つて、本考案の試料台は、従来の試料台をその
まま使用して作成でき、従来の試料台に何らかの
手段でピン9,9′を立て、ローラー8,8′をは
め込み、かつ何らかの手段で試料台上に着脱移設
自由としたローラー8″を配することで完成する
ことができる。あるいは別に準備した基板に、検
鏡孔をあけ、これにローラーを配して作成した本
考案になる試料台を従来の試料台に重ねて固定し
て用いることもできる。本実施例は、従来の試料
台をそのまま用いて完成させた例を示す。 Figure 2 is a plan view of the sample stage of the present invention;
The figure is a perspective view thereof. In the figure, 8, 8' are fixed rollers, 8'' is a freely movable adjusting roller, and 9, 9', 9''... are pins. That is, the sample stand according to the present invention is provided with three rollers 8, 8', and 8'' in addition to the conventional sample stand.
Therefore, the sample stand of the present invention can be created by using the conventional sample stand as is, by erecting the pins 9, 9' on the conventional sample stand by some means, fitting the rollers 8, 8', and adding some other means to the sample stand. It can be completed by placing a removable roller 8'' on the sample stage.Alternatively, the sample of the present invention can be prepared by drilling a microscopic hole in a separately prepared substrate and placing a roller in it. The table can also be used by stacking it on a conventional sample table and fixing it there.This example shows an example in which the conventional sample table is used as is.
各ローラーの試料台への取りつけは、本実施例
の場合、ローラー8および8′については第4図
に示す如く、プラスチツク製台板10にプラスチ
ツク製ピン9を接着したものを張りつけ、このピ
ンにローラーを差し込んで使用した。ローラー
8″は第5図に示すように掴み部11をつけた台
板10″の下面の適切個所に磁石を埋め込んだも
のを使用した。こうすることで手により極めて簡
単に着脱でき、試料交換の都度容易に試料に合わ
せてローラー位置の調整移動ができる。なお、試
料台が磁石につかない非磁性金属又はプラスチツ
ク製等の場合は表面に薄鉄板を張りつけて使用す
る。 To attach each roller to the sample stage, in this embodiment, for rollers 8 and 8', as shown in FIG. 4, plastic pins 9 are attached to a plastic base plate 10, and I inserted a roller and used it. As shown in FIG. 5, the roller 8'' used was one in which magnets were embedded in appropriate locations on the lower surface of a base plate 10'' to which a gripping portion 11 was attached. This makes it extremely easy to attach and detach by hand, and the roller position can be easily adjusted and moved to match the sample each time the sample is replaced. If the sample stage is made of non-magnetic metal or plastic that does not stick to magnets, use a thin iron plate attached to the surface.
本考案に使用するローラーの材料は、比較的弾
力性に富んでいることが必要である。例えばビン
の栓に使用できる程度の軟らかさと弾力性を有す
るゴム又はシリコンゴムなどが最適である。この
場合、ピン穴には第4図に示す如くプラスチツク
又は金属のスリーブ12を入れておくと、スムー
ズな回転を保証できる。 The material of the roller used in the present invention needs to be relatively elastic. For example, rubber or silicone rubber that is soft and elastic enough to be used for bottle stoppers is most suitable. In this case, if a plastic or metal sleeve 12 is inserted into the pin hole as shown in FIG. 4, smooth rotation can be ensured.
次にローラー8″を置く位置を検鏡者がローラ
ーを廼し易い方角、すなわち左、右、前、後等の
いずれかの方角に定め、次にその反対側にローラ
ー8とローラー8′を、両ローラーの中間が検鏡
位置となるように検鏡孔2との位置関係を配慮し
て配置する。この際、両ローラーを比較的接近さ
せて配置する。このように位置を設定することに
より、試料の大小により試料の外内周が検鏡孔か
ら外れたりせず、また試料の真円度不良等に起因
する走査ラインのブレも小さく、安定した走査検
鏡が行なえる。ただし極端に小径の試料の場合
は、デツキプレート3を孔の小さいものに替えね
ばならない為、検鏡孔から外れることがあるが、
この場合は、ローラー8、または8′のいずれか
または両方をより大きいローラーと差し替え交換
すればよい。あるいはローラー用ピン9,9′の
位置を固定せずに全てのローラー8″の如く、移
動可能としておいてもよい。 Next, set the roller 8'' in a direction where the speculum operator can easily rotate the roller, i.e. left, right, front, back, etc., and then place roller 8 and roller 8' on the opposite side. , the rollers are placed in consideration of the positional relationship with the speculum hole 2 so that the middle of the two rollers is the speculum position.At this time, both rollers are placed relatively close to each other.The positions are set in this way. As a result, the outer and inner peripheries of the sample do not fall out of the inspection hole depending on the size of the sample, and the scanning line does not shake due to poor roundness of the sample, etc., making it possible to perform stable scanning inspection. In the case of a small-diameter sample, the deck plate 3 must be replaced with one with a smaller hole, so it may come off the specimen hole.
In this case, either or both of the rollers 8 and 8' may be replaced with a larger roller. Alternatively, the roller pins 9, 9' may not be fixed in position but may be movable like all the rollers 8''.
以上は従来の試料台に直接ローラーを取りつけ
た実施例を示したが、前述した通りこれらローラ
ーを別に用意した鉄板、あるいはプラスチツク板
に検鏡孔をあけ、更に上述の通りにローラー3個
を配して本考案になる試料台を作成し、これを従
来の試料台上にとりつけて使用するのも推奨でき
る方法である。 The above example shows an example in which the rollers are directly attached to the conventional sample stage, but as mentioned above, these rollers are placed on a separately prepared iron plate or plastic plate with microscopic holes drilled and three rollers arranged as described above. A recommended method is to create a sample stage according to the present invention and use it by attaching it to a conventional sample stage.
次に本考案になる試料台における円形走査検鏡
作業について説明する。まずローラー8″を移動
して試料を所定位置に置き易くし、次に試料をロ
ーラー8とローラー8′に接して置き、次いでロ
ーラー8″を試料台表面から浮かせながら、軽く
試料を押しつけつつその場に下ろして磁着固定す
る。次にローラー8″を指でゆつくり廻しながら
検鏡を行なう。こうすることで、試料は同一位置
で回転し、必要とする走査ライン、例えば外周全
周を正確に走査することができる。 Next, the circular scanning microscopy work on the sample stage according to the present invention will be explained. First, move the roller 8'' to make it easier to place the sample in a predetermined position, then place the sample in contact with the rollers 8 and 8', and then lift the roller 8'' off the surface of the sample stage while gently pressing the sample. Lower it into the field and fix it magnetically. Next, the microscope is inspected while rotating the roller 8'' slowly with a finger. In this way, the sample rotates in the same position, and the required scanning line, for example, the entire outer circumference can be accurately scanned.
(効 果)
本考案の試料台を用いることにより、例えば直
径約25mmのステンレス鋼管の内外面の浸炭の有無
の検査に従来3〜4分要していたが、これを1〜
1.5分に短縮でき、作業能率が2倍以上に向上し
たほか、完全全周検査が保証できるようになり、
検査の信頼性を完全なものにすることができた。(Effects) By using the sample stage of the present invention, for example, it takes 3 to 4 minutes to inspect the presence or absence of carburization on the inner and outer surfaces of a stainless steel pipe with a diameter of approximately 25 mm, but this time can be reduced to 1 to 4 minutes.
In addition to being able to shorten the time to 1.5 minutes and more than doubling the work efficiency, we are now able to guarantee a complete all-around inspection.
We were able to perfect the reliability of the test.
以上のとおり、本考案になる金属顕微鏡用試料
台によれば、円形試料の外周又は内周等の円形軌
道を正確にかつ簡単に走査検鏡することができ、
これら試料の検鏡作業の能率向上と検査の精度、
信頼性の向上に大きく貢献するものである。 As described above, according to the sample stage for a metallurgical microscope according to the present invention, it is possible to accurately and easily scan and inspect a circular trajectory such as the outer circumference or inner circumference of a circular sample.
Improving the efficiency of microscopy work on these samples and the accuracy of inspection,
This greatly contributes to improving reliability.
第1図は、金属顕微鏡のスケツチ図、第2図は
本考案になる試料台の平面図、第3図は第2図の
斜視図、第4図は固定ピンとピン台およびローラ
ーの1例、第5図は着脱自由なピン台の1例であ
る。
8,8′:固定ローラー、8″:移設可能調整用
ローラー、9:ピン、10:ピン台。
Fig. 1 is a sketch of a metallurgical microscope, Fig. 2 is a plan view of a sample stage according to the present invention, Fig. 3 is a perspective view of Fig. 2, and Fig. 4 is an example of a fixing pin, a pin stand, and a roller. FIG. 5 shows an example of a pin stand that can be freely attached and detached. 8, 8': fixed roller, 8'': removable adjustment roller, 9: pin, 10: pin stand.
Claims (1)
得る3個のローラーを配置し、これらローラーに
当接する円形試料を、ローラーのいずれか1個を
回転させることで回転させ得るようにし、ローラ
ーのいずれか少くとも1個は試料台に自由に着脱
でき、試料台の任意の位置に固定が可能な固定手
段を有することを特徴とする、円形試料を円形に
走査検鏡し得る金属顕微鏡用試料台。 Three rollers that can be rotated horizontally are arranged around the microscope hole of the sample stage, and a circular sample that comes into contact with these rollers can be rotated by rotating any one of the rollers, A metallurgical microscope capable of circularly scanning and inspecting a circular sample, characterized in that at least one of the rollers can be freely attached to and removed from the sample stage, and has a fixing means that can be fixed at any position on the sample stage. sample stand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18552281U JPS5888619U (en) | 1981-12-11 | 1981-12-11 | metallurgical microscope sample stand |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18552281U JPS5888619U (en) | 1981-12-11 | 1981-12-11 | metallurgical microscope sample stand |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5888619U JPS5888619U (en) | 1983-06-16 |
| JPS6232247Y2 true JPS6232247Y2 (en) | 1987-08-18 |
Family
ID=29986647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18552281U Granted JPS5888619U (en) | 1981-12-11 | 1981-12-11 | metallurgical microscope sample stand |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5888619U (en) |
-
1981
- 1981-12-11 JP JP18552281U patent/JPS5888619U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5888619U (en) | 1983-06-16 |
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