JPS6232531U - - Google Patents

Info

Publication number
JPS6232531U
JPS6232531U JP12431285U JP12431285U JPS6232531U JP S6232531 U JPS6232531 U JP S6232531U JP 12431285 U JP12431285 U JP 12431285U JP 12431285 U JP12431285 U JP 12431285U JP S6232531 U JPS6232531 U JP S6232531U
Authority
JP
Japan
Prior art keywords
liquid
treatment
tank
processing
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12431285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12431285U priority Critical patent/JPS6232531U/ja
Publication of JPS6232531U publication Critical patent/JPS6232531U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP12431285U 1985-08-13 1985-08-13 Pending JPS6232531U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12431285U JPS6232531U (fr) 1985-08-13 1985-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12431285U JPS6232531U (fr) 1985-08-13 1985-08-13

Publications (1)

Publication Number Publication Date
JPS6232531U true JPS6232531U (fr) 1987-02-26

Family

ID=31016209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12431285U Pending JPS6232531U (fr) 1985-08-13 1985-08-13

Country Status (1)

Country Link
JP (1) JPS6232531U (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09181034A (ja) * 1995-12-18 1997-07-11 Lg Semicon Co Ltd 半導体ウェーハ洗浄装置及び方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744685U (fr) * 1980-08-15 1982-03-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744685U (fr) * 1980-08-15 1982-03-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09181034A (ja) * 1995-12-18 1997-07-11 Lg Semicon Co Ltd 半導体ウェーハ洗浄装置及び方法

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