JPS6233076B2 - - Google Patents

Info

Publication number
JPS6233076B2
JPS6233076B2 JP20737881A JP20737881A JPS6233076B2 JP S6233076 B2 JPS6233076 B2 JP S6233076B2 JP 20737881 A JP20737881 A JP 20737881A JP 20737881 A JP20737881 A JP 20737881A JP S6233076 B2 JPS6233076 B2 JP S6233076B2
Authority
JP
Japan
Prior art keywords
diaphragm
elastic member
piezoelectric element
pressurizing chamber
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP20737881A
Other languages
Japanese (ja)
Other versions
JPS58108164A (en
Inventor
Haruhiko Koto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP20737881A priority Critical patent/JPS58108164A/en
Publication of JPS58108164A publication Critical patent/JPS58108164A/en
Publication of JPS6233076B2 publication Critical patent/JPS6233076B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Description

【発明の詳細な説明】 本発明はインクオンデマンド型インクジエツト
ヘツドに係わり、特に多数の加圧室を有するマル
チノズルヘツドに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ink-on-demand type ink jet head, and more particularly to a multi-nozzle head having a large number of pressurizing chambers.

インクオンデマンド型インクジエツトは構造が
簡単なため低価格印刷装置として期待されてい
る。しかし応答性が低いため多数のノズルを集積
してマルチノズルヘツドとすることが行なわれ
る。ノズルが多くなると対応する加圧室の集積密
度が高くなり、インク射出の安定性が低下すると
いう問題があつた。本発明者等の研究によれば、
この原因は隣接する加圧室の振動が伝わつて駆動
信号の印加されていないノズルからインクが流出
し、ノズル面のぬれの状態が変化したり、駆動信
号の印加されている加圧室間の相互干渉によつて
インク射出状態が変化するためであることがわか
つた。
Ink-on-demand type inkjet has a simple structure and is expected to be used as a low-cost printing device. However, since the response is low, a large number of nozzles are integrated into a multi-nozzle head. When the number of nozzles increases, the density of the corresponding pressurizing chambers increases, resulting in a problem that the stability of ink ejection decreases. According to the research of the present inventors,
The cause of this is that vibrations from adjacent pressure chambers are transmitted and ink flows out from nozzles to which a drive signal is not applied, changing the wet state of the nozzle surface, or between pressure chambers to which a drive signal is applied. It was found that this is because the state of ink ejection changes due to mutual interference.

したがつて本発明の目的は相互に振動の悪影響
がなくインク射出の安定なマルチノズルヘツドを
提供することにある。
Therefore, it is an object of the present invention to provide a multi-nozzle head that is free from the adverse effects of vibration and can eject ink stably.

本発明の主旨は、プラスチツクのような低弾性
率の材料で振動板を作り、加圧室と対応した部分
に金属板の如き弾性率の高い部材を積層し、そこ
に圧電素子を接続することで隣接する加圧室間の
振動の影響をおさえようとするものである。
The gist of the present invention is to make a diaphragm from a material with a low modulus of elasticity such as plastic, laminate a member with a high modulus of elasticity such as a metal plate on the part corresponding to the pressurizing chamber, and connect a piezoelectric element thereto. This is intended to suppress the influence of vibration between adjacent pressurized chambers.

以下本発明の実施例について第1図により説明
する。1はABSの射出成形で作つた基板で表面
に加圧室2、ノズル3、供給準備室4等の流路が
形成されている。5はABSの射出成形で作つた
振動板で、厚さ0.4mmであり、位置決め部51と
して深さ0.2mmの凹部が形成されている。振動板
5と基板1はABS樹脂を溶剤でとかしたドープ
セメントにより接着される。6は0.1mmのステン
レス板をプレスで打抜いた高弾性部材で、振動分
離スリツト61により各加圧室にほぼ対応した形
式の振動部62に分けられており、供給準備室4
と対応した蒸発防止部63、これらの各部を連結
して一部品としている連結部64などで構成され
ている。7はチタン酸ジルコン酸鉛系の圧電素子
で、上面と下面に電極が形成されている。なお第
1図には圧電素子7は1つしか示していないが、
各加圧室2に対応して7個必要なことは言うまで
もない。圧電素子7高弾性部材6、振動板5は
各々エポキシ樹脂により接着される。8は各圧電
素子7の上面電極に接続された配線、9は高弾性
部材6に接続された共通配線である。なおこの実
施例では基板1上に流路を形成しているが、振動
板5の下面に形成しても良いし、他の部材で流路
壁を作つても良い。
Embodiments of the present invention will be described below with reference to FIG. Reference numeral 1 denotes a substrate made by injection molding of ABS, on the surface of which flow paths including a pressurizing chamber 2, a nozzle 3, a supply preparation chamber 4, etc. are formed. Reference numeral 5 denotes a diaphragm made by injection molding of ABS, which has a thickness of 0.4 mm, and has a recessed part 0.2 mm deep as a positioning part 51. The diaphragm 5 and the substrate 1 are bonded together using dope cement made by dissolving ABS resin with a solvent. Reference numeral 6 is a highly elastic member made by punching a 0.1 mm stainless steel plate with a press, and is divided into vibrating parts 62 of a type approximately corresponding to each pressurizing chamber by a vibration isolation slit 61.
It is composed of an evaporation prevention part 63 corresponding to the evaporation prevention part 63, a connecting part 64 which connects each of these parts to form a single component, and the like. 7 is a piezoelectric element based on lead zirconate titanate, and electrodes are formed on the upper and lower surfaces. Although only one piezoelectric element 7 is shown in FIG. 1,
It goes without saying that seven units are required for each pressurizing chamber 2. The piezoelectric element 7, high elastic member 6, and diaphragm 5 are each bonded with epoxy resin. 8 is a wiring connected to the upper surface electrode of each piezoelectric element 7, and 9 is a common wiring connected to the high elastic member 6. In this embodiment, the channel is formed on the substrate 1, but it may be formed on the lower surface of the diaphragm 5, or the channel wall may be made of another member.

以上の構成において、図示されていない制御回
路からの信号が配線8、共通配線9を介して印加
され、圧電素子7、高弾性部材6の振動部62、
振動板5が協動して加圧室2の容積を変化させ、
ノズル3からインク射出を行なう。
In the above configuration, a signal from a control circuit (not shown) is applied via the wiring 8 and the common wiring 9, and the piezoelectric element 7, the vibrating part 62 of the high elastic member 6,
The diaphragm 5 cooperates to change the volume of the pressurizing chamber 2,
Ink is ejected from the nozzle 3.

この時、隣接する加圧室間の振動は厚さ0.2mm
の位置決め部51で伝わるだけであり、ABSの
弾性率が2.1×109N/m2と低いこともあつて殆ん
ど問題とならない。すなわち圧電素子7の弾性率
は、5.9×1010N/m2、高弾性部材6として用いら
れているステンレスの弾性率は2×1011N/m2
あり、ABSにくらべ1桁ないし2桁も弾性率が
高いため、各加圧室の振動は振動防止スリツト6
1によつてほぼ完全に分離された独立の振動をす
ると考えられる。
At this time, the vibration between adjacent pressurized chambers is 0.2 mm thick.
This is only transmitted through the positioning portion 51 of the ABS, and since the modulus of elasticity of ABS is as low as 2.1×10 9 N/m 2 , it is hardly a problem. That is, the elastic modulus of the piezoelectric element 7 is 5.9×10 10 N/m 2 , and the elastic modulus of stainless steel used as the highly elastic member 6 is 2×10 11 N/m 2 , which is one or two orders of magnitude higher than that of ABS. Since the girder also has a high elastic modulus, vibration in each pressurizing chamber is suppressed by vibration prevention slits 6.
It is thought that the vibrations are independent and almost completely separated by

以上の説明でわかるように、本発明によれば、
低弾性率材料で作られた振動板と、加圧室に対応
して配置された高弾性部材と、高弾性部材に接着
された圧電素子とにより加圧室の容積を変化させ
ることで、隣接する加圧室間の振動の影響の少な
いインク射出の安定なマルチノズルヘツドを提供
できる。
As can be seen from the above description, according to the present invention,
By changing the volume of the pressurizing chamber using a diaphragm made of a low elastic modulus material, a high elastic member placed corresponding to the pressurizing chamber, and a piezoelectric element bonded to the high elastic member, the adjacent It is possible to provide a multi-nozzle head with stable ink ejection that is less affected by vibration between pressure chambers.

また実施例のように、低弾性率材料としてプラ
スチツクを使うことで、成形コスト、組立コスト
の安い安価なヘツドが得られる。
Furthermore, by using plastic as the low modulus material as in the embodiment, an inexpensive head with low molding and assembly costs can be obtained.

さらに高弾性部材として金属板のような導電性
のある材料を使えば、各圧電素子の下面電極への
導通が容易に行なえ、別に下面電極への接続を考
える必要はなくなる。
Furthermore, if a conductive material such as a metal plate is used as the highly elastic member, conduction to the bottom electrode of each piezoelectric element can be easily established, and there is no need to separately consider connection to the bottom electrode.

また一般に高弾性部材料は気体透過率が低いた
め、第1図の蒸発防止部63のように、加圧室以
外の流路も同時におおうことでインクの蒸発、外
部からの空気の侵入を防止できる。
In addition, since high-elasticity materials generally have low gas permeability, the flow paths other than the pressurized chamber are also covered at the same time, as in the evaporation prevention section 63 in Figure 1, to prevent ink evaporation and air intrusion from the outside. can.

さらに高弾性部材と圧電素子を組合わせること
で圧電素子の変形を有効に加圧室の容積変化に変
換できるため駆動電圧が低下するという効果もあ
る。たとえば第2図に、本発明の高弾性部材を使
用したヘツドの駆動電圧(実線)と、高弾性部材
を使用しないプラスチツク振動板のヘツドの駆動
電圧(点線)を示す。横軸は振動板および高弾性
部材の厚さを示す。最適な厚さを選んだ時に本発
明の高弾性部材を用いたヘツドの駆動電圧の低い
ことがわかる。なお振動板として全面的に金属板
でおおつたヘツドにくらべても本発明の駆動電圧
は低い。これは振動系がほぼ周辺支持の変形をす
るため、周辺固定の場合にくらべ同一の力に対し
変形効率が良いためと考えられる。また、このよ
うにヘツドの振動板を低弾性材料とし、振動板に
積層される高弾性部材に振動分離部が設けられて
いりことにより圧電素子の振動が隣接する加圧室
に対し伝わらず、ヘツドの高密度化が可能とな
り、また製造容易となる。また、上記したよう
に、振動板に低弾性率材料のものを用いると圧電
素子が振動しても低弾性であるため隣接する加圧
室には振動が伝わらなくてすみ、かつ、加圧室に
対応した振動板の高弾性部材配置部のみよく振動
する、高弾性部材が加圧室間に対応した部分に振
動分離部が設けられているため周辺固定的でなく
周辺支持的変形がされ、小さい面積、あるいは隅
まで充分振動板がたわみ、加圧室等のヘツドの高
密度化が可能になる。
Furthermore, by combining the highly elastic member and the piezoelectric element, the deformation of the piezoelectric element can be effectively converted into a change in the volume of the pressurizing chamber, which has the effect of reducing the driving voltage. For example, FIG. 2 shows the driving voltage (solid line) for a head using the highly elastic member of the present invention and the driving voltage (dotted line) for a head using a plastic diaphragm that does not use the highly elastic member. The horizontal axis indicates the thickness of the diaphragm and the high elastic member. It can be seen that when the optimum thickness is selected, the drive voltage of the head using the highly elastic member of the present invention is low. Note that the driving voltage of the present invention is lower than that of a head whose entire surface is covered with a metal plate as a diaphragm. This is thought to be due to the fact that the vibration system is deformed almost by being supported around the periphery, so the deformation efficiency is better for the same force than in the case where the periphery is fixed. In addition, the vibration plate of the head is made of a low-elasticity material, and the high-elasticity member laminated to the vibration plate is provided with a vibration isolation section, so that the vibration of the piezoelectric element is not transmitted to the adjacent pressurizing chamber. This makes it possible to increase the density of the head and facilitate manufacturing. In addition, as mentioned above, if the diaphragm is made of a material with a low elastic modulus, even if the piezoelectric element vibrates, it will have low elasticity, so the vibration will not be transmitted to the adjacent pressurizing chamber, and the pressurizing chamber Only the part of the diaphragm where the high-elastic member is arranged vibrates well, and since the vibration isolating part is provided in the part where the high-elastic member corresponds to the space between the pressurizing chambers, the deformation is performed to support the periphery instead of fixing it around the periphery. The diaphragm can be sufficiently deflected in a small area or even to the corner, making it possible to increase the density of heads such as pressurized chambers.

以上述べたように本発明によれば隣接する加圧
室間の振動の影響の少ないヘツドが得られる。さ
らに製造コスト低下、電気接続容易、インク蒸発
防止、駆動電圧低下等の効果も得られ、プリン
タ、プロツタ、フアクシミリ、コピア等広く応用
できる。
As described above, according to the present invention, it is possible to obtain a head that is less affected by vibrations between adjacent pressurizing chambers. Furthermore, it has the following effects: lower manufacturing costs, easier electrical connection, prevention of ink evaporation, lower drive voltage, etc., and can be widely applied to printers, plotters, facsimile machines, copiers, etc.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す斜視図、第2
図は本発明のヘツドと従来のヘツドの駆動電圧を
示す図である。 1……基板、2……加圧室、3……ノズル、5
……振動板、6……高弾性部材、7……圧電素
子。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure shows the driving voltages of the head of the present invention and a conventional head. 1...Substrate, 2...Pressure chamber, 3...Nozzle, 5
... Vibration plate, 6 ... Highly elastic member, 7 ... Piezoelectric element.

Claims (1)

【特許請求の範囲】[Claims] 1 低弾性率材料で作られた振動板と、該振動板
と積層され、前記振動板との間に各々平面的に隣
接した複数の加圧室を形成する基板と、前記振動
板上に配置され、前記加圧室間に対応した部分に
振動分離部を設けた高弾性部材と、該高弾性部材
上の加圧室と対応した位置に配置された圧電素子
からなるインクジエツトヘツド。
1. A diaphragm made of a low elastic modulus material, a substrate laminated with the diaphragm and forming a plurality of pressure chambers adjacent to each other in a plane between the diaphragm, and arranged on the diaphragm. An inkjet head comprising: a highly elastic member provided with a vibration isolating portion in a portion corresponding to the pressurizing chamber; and a piezoelectric element disposed on the highly elastic member at a position corresponding to the pressurizing chamber.
JP20737881A 1981-12-22 1981-12-22 inkjet head Granted JPS58108164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20737881A JPS58108164A (en) 1981-12-22 1981-12-22 inkjet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20737881A JPS58108164A (en) 1981-12-22 1981-12-22 inkjet head

Publications (2)

Publication Number Publication Date
JPS58108164A JPS58108164A (en) 1983-06-28
JPS6233076B2 true JPS6233076B2 (en) 1987-07-18

Family

ID=16538730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20737881A Granted JPS58108164A (en) 1981-12-22 1981-12-22 inkjet head

Country Status (1)

Country Link
JP (1) JPS58108164A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993022140A1 (en) * 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729425B2 (en) * 1988-05-11 1995-04-05 富士電機株式会社 Inkjet recording head
JP3106044B2 (en) * 1992-12-04 2000-11-06 日本碍子株式会社 Actuator and inkjet printhead using the same
JP2721127B2 (en) * 1994-03-03 1998-03-04 富士通株式会社 Inkjet head
JP2006231530A (en) * 2005-02-22 2006-09-07 Brother Ind Ltd Liquid transfer device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993022140A1 (en) * 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof

Also Published As

Publication number Publication date
JPS58108164A (en) 1983-06-28

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