JPS6234426U - - Google Patents
Info
- Publication number
- JPS6234426U JPS6234426U JP12536385U JP12536385U JPS6234426U JP S6234426 U JPS6234426 U JP S6234426U JP 12536385 U JP12536385 U JP 12536385U JP 12536385 U JP12536385 U JP 12536385U JP S6234426 U JPS6234426 U JP S6234426U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- conveyance path
- conveyance
- conveying device
- coater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Description
第１図は、この考案の１実施例を示すレジスト
コータの搬送装置の概略正面図、第２図は、従来
のレジストコータの搬送装置を示す概略前面図で
ある。
１１，１２：搬送ガイド、１３：搬送路、１４
：レジスト、１５：チツプ。
FIG. 1 is a schematic front view of a conveying device for a resist coater showing one embodiment of this invention, and FIG. 2 is a schematic front view showing a conventional conveying device for a resist coater. 11, 12: Conveyance guide, 13: Conveyance path, 14
:Resist, 15: Chip.
Claims (1)
トを塗布したチツプを載置して搬送するレジスト
コータの搬送装置において、 前記搬送ガイドに、それぞれ前記搬送路に向け
て下降する斜面を持つテーパを形成したことを特
徴とするレジストコータの搬送装置。[Scope of Claim for Utility Model Registration] In a resist coater conveying device in which chips coated with resist are placed and conveyed on a conveyance path provided with conveyance guides at both ends thereof, the resist coater is provided with a resist-coated chip placed on a conveyance path provided with conveyance guides at both ends thereof, and a resist-coated chip is placed on the conveyance path. A resist coater conveying device characterized by forming a taper with a descending slope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12536385U JPS6234426U (en) | 1985-08-14 | 1985-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12536385U JPS6234426U (en) | 1985-08-14 | 1985-08-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6234426U true JPS6234426U (en) | 1987-02-28 |
Family
ID=31018202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12536385U Pending JPS6234426U (en) | 1985-08-14 | 1985-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6234426U (en) |
-
1985
- 1985-08-14 JP JP12536385U patent/JPS6234426U/ja active Pending
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