JPS623687B2 - - Google Patents
Info
- Publication number
- JPS623687B2 JPS623687B2 JP23911584A JP23911584A JPS623687B2 JP S623687 B2 JPS623687 B2 JP S623687B2 JP 23911584 A JP23911584 A JP 23911584A JP 23911584 A JP23911584 A JP 23911584A JP S623687 B2 JPS623687 B2 JP S623687B2
- Authority
- JP
- Japan
- Prior art keywords
- steel plate
- roller
- forming
- straightening
- rollers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 65
- 239000010959 steel Substances 0.000 claims description 65
- 238000001514 detection method Methods 0.000 claims description 22
- 238000005065 mining Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D13/00—Corrugating sheet metal, rods or profiles; Bending sheet metal, rods or profiles into wave form
- B21D13/04—Corrugating sheet metal, rods or profiles; Bending sheet metal, rods or profiles into wave form by rolling
- B21D13/045—Corrugating sheet metal, rods or profiles; Bending sheet metal, rods or profiles into wave form by rolling the corrugations being parallel to the feeding movement
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bending Of Plates, Rods, And Pipes (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は鋼板を波形に折曲する場合に使用する
フオーミングローラ装置の製幅矯正機に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a width straightening machine for a forming roller device used to bend a steel plate into a corrugated shape.
従来の技術
フオーミングローラ装置は第５，６図に示した
ように上，下ローラ１，２からなるフオーミング
ローラ３を鋼板１１の送り方向に複数段配設し、
これらフオーミングローラ３…３で鋼板を波形に
折曲するようになつている。４が複数のフオーミ
ングローラ３…３からなるフオーミングローラ装
置である。BACKGROUND TECHNOLOGY As shown in FIGS. 5 and 6, a forming roller device has forming rollers 3 consisting of upper and lower rollers 1 and 2 arranged in multiple stages in the feeding direction of a steel plate 11.
These forming rollers 3...3 are designed to bend the steel plate into a wave shape. 4 is a forming roller device consisting of a plurality of forming rollers 3...3.
ところで、この種のフオーミングローラ装置４
で製品即ち波形の鋼板を形成した場合にはその性
質上、第７図に示したように製品の前，後端部１
１ａ，１１ｂの幅W1が中央部１１ｃの幅W2より
も若干拡がる傾向があり、特に高さＨが大きくな
るにつれて、この傾向は増大し、前，後端部１１
ａ，１１ｂの幅W1と中央部１１ｃの幅W2の差が
所定値以上になると製品成形後に切断等の方法に
より幅調整を行わなければならなかつた。 By the way, this type of forming roller device 4
When a product, that is, a corrugated steel plate, is formed, due to its nature, the front and rear ends 1 of the product are formed as shown in Figure 7.
There is a tendency for the width W 1 of 1a and 11b to be slightly wider than the width W 2 of the central portion 11c, and this tendency increases especially as the height H increases.
If the difference between the width W 1 of a and 11b and the width W 2 of the central portion 11c exceeds a predetermined value, the width must be adjusted by cutting or other methods after the product is formed.
上記製品の幅は上，下ローラ１，２間のクリア
ランスＣに関連し、クリアランスＣを小さくすれ
ば幅は縮小し、クリアランスＣを大きくすれば幅
は増大する。 The width of the above-mentioned product is related to the clearance C between the upper and lower rollers 1 and 2; if the clearance C is made smaller, the width will be reduced, and if the clearance C is made larger, the width will be increased.
従つて、前，後端部１１ａ，１１ｂで上，下ロ
ーラ１，２間のクリアランスＣを小さくし、中央
部１１ｃでクリアランスＣを大きくすれば、略均
一な幅の製品ができる筈である。 Therefore, by reducing the clearance C between the upper and lower rollers 1 and 2 at the front and rear end portions 11a and 11b, and increasing the clearance C at the center portion 11c, a product with substantially uniform width should be produced.
そこで上，下ローラ１，２間のクリアランスＣ
を変化させることにより製品の幅を略均一に保つ
ようにしたフオーミングローラ装置の幅矯正機も
開発されるに至つたが、これは上，下ローラ１，
２間のクリアランスＣを高頻度で変化させなけれ
ばならないので構造が複雑になり、コストも高く
なるという問題点があつた。 Therefore, the clearance C between the upper and lower rollers 1 and 2
A forming roller width straightening machine was also developed that kept the width of the product approximately uniform by changing the width of the product.
Since the clearance C between the two must be changed frequently, the structure becomes complicated and the cost becomes high.
発明が解決しようとする問題点
上，下ローラ１，２間のクリアランスＣを高頻
度に変化させて製品の幅を略均一に保つようにす
る従来の幅矯正機においては、構造の簡素化乃至
コストダウンも自づと限界がある。Problems to be Solved by the Invention In the conventional width straightening machine that frequently changes the clearance C between the upper and lower rollers 1 and 2 to keep the width of the product approximately uniform, it is necessary to simplify the structure or There are limits to cost reduction.
本発明は上，下ローラ１，２間のクリアランス
Ｃを変化させることなく、従来の幅矯正機よりも
簡単な構造で、しかも上，下ローラ１，２間のク
リアランスＣを変化させたのと同等の効果を有す
るフオーミングローラ装置の幅矯正機を提供する
ことを目的として考されたものである。 The present invention has a simpler structure than conventional width straightening machines without changing the clearance C between the upper and lower rollers 1 and 2. The purpose of this invention is to provide a width straightening machine for a forming roller device that has similar effects.
問題点を解決するための手段
上，下ローラ１，２からなるフオーミングロー
ラ３…３を鋼板１１の送り方向に複数段配設し、
これらフオーミングローラ３…３で鋼板１１を波
形に折曲するフオーミングローラ装置４におい
て、幅矯正機を、前記フオーミングローラに送り
込まれた鋼板の前，後端部および中央部を検出し
て検出信号を後記する矯正ローラ駆動機構に送る
鋼板位置検出機構と、前記フオーミングローラ間
に配設されていて、前段のフオーミングローラ３
によつて折曲された鋼板の一側面に当接する矯正
ローラと、前記鋼板位置検出機構からの信号を受
けて、鋼板の前，後端部において前記矯正ローラ
を駆動して、該ローラを介して鋼板の一側面を加
圧する矯正ローラ駆動機構とで構成した。Means for solving the problem A plurality of forming rollers 3...3 consisting of upper and lower rollers 1 and 2 are arranged in the feeding direction of the steel plate 11,
In the forming roller device 4 which bends the steel plate 11 into a wave shape with these forming rollers 3...3, a width straightening machine is used to detect the front, rear end and center of the steel plate fed into the forming rollers. A steel plate position detection mechanism that sends a detection signal to a straightening roller drive mechanism (to be described later) is disposed between the forming roller and the former forming roller 3.
A straightening roller is brought into contact with one side of the steel plate bent by the steel plate, and the straightening roller is driven at the front and rear ends of the steel plate in response to signals from the steel plate position detection mechanism, and the straightening roller is driven through the roller. The straightening roller drive mechanism presses one side of the steel plate.
作 用
鋼板の前，後端部において矯正ローラで鋼板の
前，後端部において矯正ローラで鋼板の一側面を
加圧するので、該鋼板は上，下ローラの一方に密
着し、結果的に上，下ローラ間のクリアランスを
小さくした場合と同様の効果を生じ、前，後端部
における幅の拡がりを防止して、前，後端部およ
び中央部において略均一な幅の製品を得ることが
可能になる。Function Since the straightening rollers at the front and rear ends of the steel plate press one side of the steel plate with the straightening rollers at the front and rear ends of the steel plate, the steel plate comes into close contact with one of the upper and lower rollers, and as a result, the upper , it produces the same effect as when the clearance between the lower rollers is made small, prevents the width from expanding at the front and rear edges, and makes it possible to obtain a product with a substantially uniform width at the front and rear edges and at the center. It becomes possible.
実施例
次に本発明の実施例を第１〜４図を参照して説
明する。１，２は上，下ローラ、３は前記上，下
ローラ１，２からなるフオーミングローラ、４は
前記フオーミングローラ３を鋼板１１の送り方向
に複数段（実施例の場合は３段）配設することに
より形成されたフオーミングローラ装置であり、
前記上，下ローラ１，２はそれぞれ３個のローラ
構成体１ａ，１ｂ，１ｃと、２個のローラ構成体
２ａ，２ｂからなつていて、これらローラ間に平
板状の鋼板１１を送り込むことにより、該鋼板を
波形に折曲するようになつている。Embodiments Next, embodiments of the present invention will be described with reference to FIGS. 1 to 4. 1 and 2 are upper and lower rollers, 3 is a forming roller consisting of the upper and lower rollers 1 and 2, and 4 is a forming roller 3 in multiple stages in the feeding direction of the steel plate 11 (three stages in the case of the embodiment). A forming roller device formed by arranging
The upper and lower rollers 1, 2 each consist of three roller structures 1a, 1b, 1c and two roller structures 2a, 2b, and by feeding a flat steel plate 11 between these rollers. , the steel plate is bent into a wave shape.
５は本発明の幅矯正機を構成する鋼板位置検出
機構であり、該位置検出機構５はフオーミングロ
ーラ装置４の上部に、該装置４と略平行に設けら
れた検出器ホルダレール５ａと、該レール５ａに
水平方向にスライド可能に支持されている２個の
光電センサ５ｂ，５ｃと、これら光電センサ５
ｂ，５ｃを接続しているAND回路（図示省略）
を備えていて、これら２個の光電センサ５ｂ，５
ｃでフオーミングローラ装置４に送り込まれてき
た鋼板１１の前，後端部１１ａ，１１ｂと中央部
１１ｃをそれぞれ検出して、前，後端部検出信号
と中央部検出信号を後記する矯正ローラ駆動機構
に送るようになつている。 Reference numeral 5 denotes a steel plate position detection mechanism constituting the width straightening machine of the present invention, and the position detection mechanism 5 includes a detector holder rail 5a provided above the forming roller device 4 and approximately parallel to the device 4; Two photoelectric sensors 5b and 5c are horizontally slidably supported on the rail 5a, and these photoelectric sensors 5
AND circuit connecting b and 5c (not shown)
These two photoelectric sensors 5b, 5
A correction roller that detects the front and rear end portions 11a, 11b and the center portion 11c of the steel plate 11 fed into the forming roller device 4 at c, respectively, and generates front and rear end detection signals and a center portion detection signal, which will be described later. It is designed to be sent to a drive mechanism.
６は第２段と第３段のフオーミングローラ３，
３間に配置されていて、前段即ち第１段，第２段
のフオーミングローラ３，３によつて折曲された
鋼板１１の一側面に当接する矯正ローラであり、
図面に示す実施例において該矯正ローラ６は波形
に鋼板１１の波形部１１ｄ内の上面に当接するよ
うになつている。 6 is the forming roller 3 of the second stage and the third stage,
This is a straightening roller that is disposed between the forming rollers 3 and 3 of the previous stage, that is, the first stage and the second stage, and comes into contact with one side of the steel plate 11 that has been bent by the forming rollers 3, 3.
In the embodiment shown in the drawings, the straightening roller 6 is corrugated and comes into contact with the upper surface of the corrugated portion 11d of the steel plate 11.
７は前記鋼板位置検出機構５からの信号を受け
て、鋼板１１の前，後端部１１ａ，１１ｂにおい
て、前記矯正ローラ６を駆動し、該ローラ６を介
して鋼板１１の一側面即ち波形部１１ｄ内の上面
を加圧する矯正ローラ駆動機構であり、該駆動機
構７は前記矯正ローラ６をその頂部に回転可能に
支持している左右一対の逆Ｖ字状のブラケツト７
ａ，７ｂと、これらブラケツト７ａ，７ｂの一端
側を回動可能に枢支しているシヤフト７ｃと、前
記ブラケツト７ａ，７ｂの他端側のカム受面７
a′，７b′に当接するカム７ｄ，７ｅと、これらカ
ム７ｄ，７ｅを取付けているカムシヤフト７ｆ
と、該カムシヤフト７ｆを回転させるエアシリン
ダ７ｇと、図外のシリンダコントローラを備えて
いて、前記鋼板位置検出機構５から前，後端部検
出信号が送られてくると、前記シリンダコントロ
ーラでシリンダ７ｇのピストンロツド７ｈを伸ば
してカム７ｅ，７ｄでブラケツト７ａ，７ｂを時
計方向に回動させ、矯正ローラ６を鋼板１１の波
形部１１ｄ内の上面に当接させて鋼板１１を押し
上げ、また鋼板位置検出機構５から中央部検出信
号が送られてくるとシリンダコントローラでシリ
ンダ７ｇのピストンロツド７ｈを縮めてブラケツ
ト７ａ，７ｂを反時計方向に回動させて矯正ロー
ラ６による鋼板１１の押し上げを解くようになつ
ている。 7 receives a signal from the steel plate position detection mechanism 5 and drives the correction roller 6 at the front and rear ends 11a and 11b of the steel plate 11, and through the roller 6, corrects one side of the steel plate 11, that is, the corrugated part. This is a correction roller drive mechanism that presses the upper surface within 11d, and the drive mechanism 7 includes a pair of left and right inverted V-shaped brackets 7 that rotatably support the correction roller 6 at the top thereof.
a, 7b, a shaft 7c rotatably supporting one end of these brackets 7a, 7b, and a cam receiving surface 7 on the other end of the brackets 7a, 7b.
cams 7d and 7e that come into contact with a' and 7b', and a camshaft 7f that attaches these cams 7d and 7e
, an air cylinder 7g that rotates the camshaft 7f, and a cylinder controller (not shown), and when front and rear end detection signals are sent from the steel plate position detection mechanism 5, the cylinder controller controls the cylinder 7g. The piston rod 7h is extended, the brackets 7a and 7b are rotated clockwise by the cams 7e and 7d, the straightening roller 6 is brought into contact with the upper surface of the corrugated portion 11d of the steel plate 11, and the steel plate 11 is pushed up, and the steel plate position is detected. When the center detection signal is sent from the mechanism 5, the cylinder controller retracts the piston rod 7h of the cylinder 7g, rotates the brackets 7a and 7b counterclockwise, and releases the pushing up of the steel plate 11 by the straightening roller 6. ing.
実施例の幅矯正機は上記のような構成であつ
て、フオーミングローラ装置４に鋼板１１を送り
込み、該鋼板１１の先端が一方の光電センサ５ｂ
の下部を通過すると、鋼板位置検出機構５から銅
板の前端部検出信号が発信されて、シリンダ７ｇ
でブラケツト７ａ，７ｂを時計方向に回動し、矯
正ローラ６で鋼板１１を押し上げる。次に鋼板１
１の先端が他方の光電センサ５ｃの下部を通過す
ると今度は、鋼板位置検出機構５から鋼板の中央
部検出信号が発信されて、シリンダ７ｇでブラケ
ツト７ａ，７ｂを反時計方向に回動し、矯正ロー
ラ６による鋼板１１の押し上げを解く。更に鋼板
１１が移動して鋼板１１の後端が一方の光電セン
サ５ｂの下部を通過すると今度は鋼板位置検出機
構５から鋼板の後端部検出信号が発信されて、再
度、シリンダ７ｇでブラケツト７ａ，７ｂを時計
方向に回動し、矯正ローラ６で鋼板１１を押し上
げる。従つて鋼板１１はその前，後端部において
矯正ローラ６で押し上げられ、フオーミングロー
ラ３…３を構成する上ロール１に押し付けられた
状態で、これらフオーミングローラ３…３によつ
て波形に折曲されることになるのである。 The width straightening machine of the embodiment has the above-mentioned configuration, and the steel plate 11 is fed into the forming roller device 4, and the tip of the steel plate 11 is connected to one of the photoelectric sensors 5b.
When the copper plate passes through the lower part of the cylinder 7g, a front end detection signal of the copper plate is transmitted from the steel plate position detection mechanism 5, and the cylinder 7g
The brackets 7a and 7b are rotated clockwise, and the steel plate 11 is pushed up by the straightening roller 6. Next, steel plate 1
When the tip of the photoelectric sensor 1 passes under the other photoelectric sensor 5c, the steel plate position detection mechanism 5 sends a steel plate center detection signal, and the cylinder 7g rotates the brackets 7a and 7b counterclockwise. The pushing up of the steel plate 11 by the correction roller 6 is released. When the steel plate 11 moves further and the rear end of the steel plate 11 passes the lower part of one of the photoelectric sensors 5b, the steel plate position detection mechanism 5 sends out a steel plate rear end detection signal, and the cylinder 7g moves the bracket 7a again. , 7b clockwise to push up the steel plate 11 with the correction roller 6. Therefore, the steel plate 11 is pushed up by the straightening rollers 6 at its front and rear ends, and is corrugated by the forming rollers 3...3 while being pressed against the upper rolls 1 constituting the forming rollers 3...3. It will be bent.
なお光電センサ５ｂ，５ｃの間隔ｄは鋼板（製
品）１１の長さ等に合わせて調整する。 Note that the distance d between the photoelectric sensors 5b and 5c is adjusted according to the length of the steel plate (product) 11, etc.
図面に示す実施例では鋼板１１の波形部１１ｄ
内の上面を矯正ローラ６で押圧して、鋼板１１を
フオーミングローラ３の上ロール１に圧着させる
構成としたが下ロール１に圧着させてもよく、矯
正ローラ６を当接させる位置も鋼板１１の波形部
１１ｄ内の上面に限定されない。 In the embodiment shown in the drawings, the corrugated portion 11d of the steel plate 11
Although the steel plate 11 is pressed against the upper roll 1 of the forming roller 3 by pressing the inner upper surface with the straightening roller 6, the steel plate 11 may be pressed against the lower roll 1, and the position where the straightening roller 6 comes into contact is also the same as the steel plate. It is not limited to the upper surface within the corrugated portion 11d of No. 11.
また鋼板位置検出機構５、および矯正ローラ駆
動機構７も実施例のものに限定されない。 Furthermore, the steel plate position detection mechanism 5 and the correction roller drive mechanism 7 are not limited to those of the embodiment.
発明の効果
鋼板の前，後端部において、矯正ローラで鋼板
の一側面を加圧して、鋼板を上，下ローラの一方
押し付けて密着させたので、結果的に上，下ロー
ラ間のクリアランスを小さくした場合と同じ効果
が生じ、前，後端部における幅の拡がりを防止し
て、前，後端部および中央部の幅が全て略均一な
製品を得ることができる。Effects of the Invention At the front and rear ends of the steel plate, one side of the steel plate is pressed by a straightening roller, and the steel plate is pressed against one of the upper and lower rollers to make them stick together.As a result, the clearance between the upper and lower rollers is reduced. The same effect as when the size is made small is produced, and it is possible to prevent the width from expanding at the front and rear ends, and to obtain a product whose widths at the front and rear ends and at the center are all substantially uniform.
第１図は本発明の幅矯正機を使用したフオーミ
ングローラ装置の略示的側面図、第２図は同正面
図、第３図は矯正ローラ駆動機構の斜視図、第４
図はブラケツトの側面図、第５図は従来のフオー
ミングローラ装置の略示的側面図、第６図は同正
面図、第７図は従来のフオーミングローラ装置で
作つた波形鋼板の斜視図、第８図は同正面図であ
る。
１，２…上，下ローラ、３…フオーミングロー
ラ、４…フオーミングローラ装置、５…鋼板位置
検出機構、６…矯正ローラ、７…矯正ローラ駆動
装置。
FIG. 1 is a schematic side view of a forming roller device using the width straightening machine of the present invention, FIG. 2 is a front view of the same, FIG. 3 is a perspective view of a straightening roller drive mechanism, and FIG.
5 is a schematic side view of a conventional forming roller device, FIG. 6 is a front view of the same, and FIG. 7 is a perspective view of a corrugated steel plate made with a conventional forming roller device. , FIG. 8 is a front view of the same. DESCRIPTION OF SYMBOLS 1, 2... Upper and lower rollers, 3... Forming roller, 4... Forming roller device, 5... Steel plate position detection mechanism, 6... Correction roller, 7... Correction roller drive device.
Claims (1)
ーラ３を鋼板の送り方向に複数段配設し、これら
フオーミングローラ３…３で鋼板を波形に折曲す
るフオーミングローラ装置４において、前記フオ
ーミングローラ３…３に送り込まれた鋼板の前，
後端部および中央部を検出して検出信号を後記す
る矯正ローラ駆動機構に送る鋼板位置検出機構５
と、前記フオーミングローラ３，３間に配設され
ていて、前段のフオーミングローラ３によつて折
曲された鋼板の一側面に当接する矯正ローラ６
と、前記鋼板位置検出機構５からの信号を受け
て、鋼板の前，後端部において、前記矯正ローラ
６を駆動し、該ローラ６を介して鋼板の一側面を
加圧する矯正ローラ駆動機構７とを備えたフオー
ミングローラ装置の幅矯正機。1 In a forming roller device 4 in which a plurality of forming rollers 3 consisting of upper and lower rollers 1 and 2 are arranged in the feeding direction of a steel plate, and these forming rollers 3...3 bend a steel plate into a wave shape, In front of the steel plate fed into the mining roller 3...3,
A steel plate position detection mechanism 5 that detects the rear end and the center and sends a detection signal to a correction roller drive mechanism to be described later.
and a straightening roller 6 which is disposed between the forming rollers 3 and 3 and comes into contact with one side of the steel plate bent by the forming roller 3 in the previous stage.
and a straightening roller drive mechanism 7 which receives a signal from the steel plate position detection mechanism 5, drives the straightening roller 6 at the front and rear ends of the steel plate, and presses one side of the steel plate via the roller 6. Width straightening machine for forming roller device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23911584A JPS61119333A (en) | 1984-11-13 | 1984-11-13 | Width correcting machine of forming roller device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23911584A JPS61119333A (en) | 1984-11-13 | 1984-11-13 | Width correcting machine of forming roller device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61119333A JPS61119333A (en) | 1986-06-06 |
| JPS623687B2 true JPS623687B2 (en) | 1987-01-26 |
Family
ID=17040016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23911584A Granted JPS61119333A (en) | 1984-11-13 | 1984-11-13 | Width correcting machine of forming roller device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61119333A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11002566B2 (en) | 2007-06-27 | 2021-05-11 | Brooks Automation, Inc. | Position feedback for self bearing motor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101817039B (en) * | 2010-03-02 | 2013-06-26 | 江苏瑞盛水处理有限公司 | Stainless steel honeycomb inclined-tube wave plate forming method for water treatment and forming device |
| CN105312379B (en) * | 2015-11-10 | 2018-02-27 | 佛山市诺创智能设备有限公司 | A kind of container roof plate rolling forming process and its equipment |
-
1984
- 1984-11-13 JP JP23911584A patent/JPS61119333A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11002566B2 (en) | 2007-06-27 | 2021-05-11 | Brooks Automation, Inc. | Position feedback for self bearing motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61119333A (en) | 1986-06-06 |
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