JPS6237630Y2 - - Google Patents

Description

[Detailed description of the invention] <Industrial application field> The present invention is a lapping method in which the lapping surface plate and the workpiece are independently rotated, and the flat surface of the workpiece is lapped using a lapping agent between the lapping surface plate and the workpiece. It is related to the device.

<Prior art> A conventional wrap device is capable of moving forward and backward in a direction perpendicular to a spindle head supported on an extension of the fixed base above a wrap surface plate that is rotatably supported around an axis perpendicular to a fixed base. The upper surface of the work holder main body, on which the shaft is supported and the workpiece fixed to the lower surface, is provided with a protrusion that has an insertion hole into which the reciprocating shaft can be inserted, and by inserting the retractable shaft into the insertion hole, the The workpiece was prevented from flying out due to the rotation of the surface plate.

However, in conventional machines, the work holder body rotates around the axis of the advance/retreat axis as the lap surface plate rotates, which results in irregular machining of the workpiece and the machining surface of the workpiece is not uniform. Moreover, since the work holder body cannot be raised or lowered along with the forward/backward axis, there is a risk that the machined surface may be damaged by the lapping agent when the lapping surface plate starts and stops rotating, which is an obstacle to improving processing accuracy. .

<Purpose of the invention> The object of the invention is to provide a wrap device that can rotate, raise and lower a workpiece with a main shaft that can rotate and move back and forth, and that can be easily connected and disconnected from the main shaft.

<Structure of the invention> The wrapping device according to the invention has a plurality of long grooves that end at the upper end formed on the outer periphery of a protrusion protruding from the upper surface of a work holder main body to which a work is fixed to the lower surface.
A cylindrical holding member fixed to a main shaft that rotates and moves up and down holds a plurality of balls that engage with the long grooves, and a scarf that presses and releases the balls is inserted into the outer surface of this holding member. be.

<Example> Hereinafter, an example of the present invention will be described based on the drawings. In FIG. 1, 10 is a fixed base;
A turntable 11 is mounted on this fixed base 10 around a vertical axis. It is rotatably supported and rotationally driven by a drive device (not shown). A ring-shaped lap surface plate 12 having a lap surface formed on the upper surface is fixed on the turntable 11.
The lap platen 12 is immersed in a lap liquid contained in a liquid tank (not shown) mounted on the turntable 11 so as to surround the lap platen 12. A support stand 13 is installed on the fixed base 10, and a support rail 15 having a guide surface 14 parallel to the lap surface of the wrap surface plate 12 is fixed to the support stand 13. A base 16 is mounted movably along the guide surface 14.
A spindle head 17 is fixed to the front surface of the slide base 16, and a reciprocating member 18 is fitted into the spindle head 17 so as to be movable back and forth in an axial direction perpendicular to the spindle head 17. Moving member 1
8 has a main shaft 19 that can only rotate around a vertical axis.
is supported on the shaft. A forward/backward drive motor 20 is fixed to the spindle head 17 and a rotary drive motor 21 is fixed to the slide base 16. It is designed to be rotated.

In FIG. 2, the work holder main body 40 is a disk-shaped work holder main body, and a protrusion 4 having a circular cross section is provided at the center of the upper surface of the work holder main body 40.
1 is provided protrudingly. At the lower end of the main shaft 19 is a cylindrical holding member 42 into which a protrusion 41 can be inserted from below.
is fixed. A plurality of through holes 44 into which resin balls 43 can be inserted are formed in the radial direction at the lower end of the holding member 42 from the outer surface, and caulking 45 is provided on the inner peripheral side of the holding member of the through holes 44 to prevent the balls 43 from falling off. is formed. A plurality of long grooves 46 that engage the balls 43 are formed on the outer surface of the protrusion 41 from near the work holder main body 40 to near the upper end of the protrusion 41 along the axis of the protrusion 41 . A scarf 47 that presses and releases the ball 43 in the through hole 44 is fitted onto the outer surface of the holding member 42 so as to be slidable in the vertical direction. Possibly cut out to form a downward, inward taper 48 . On the outer surface of the holding member 42 below the through-hole 44 , an upward and outwardly directed taper 49 that comes into contact with the taper 48 is formed so as to protrude from the outer surface of the holding member 42 . The scarf 47 is prevented from falling due to the contact between the taper 48 and the taper 49. A spring 50 is provided that cuts out the inner surface of the scarf 47 from above the through hole 44 and presses the scarf 47 downward between the holding member 42 and the scarf 47 while the taper 48 and the taper 49 are in contact with each other. . Above the scarf 47, a spring 50 and a locking member 51 for restraining the movement of the scarf 47 are fixed to the outer surfaces of the main shaft 19 and the holding member 42. A plurality of weights 52 whose centers are cut out so as not to interfere with the scarf 47 are placed on the workholder body 40, and the weights 52 are fixed to the workholder body 40 by a plurality of bolts 53 that are screwed into the workholder body 40. has been done. A work W is fixed to the lower surface of the work holder main body 40 with an adhesive or the like.

The processing order will be explained based on the above-described configuration. A workpiece W is fixed to each of a plurality of work holder bodies 40 at a location other than on the lap surface plate 12 where work is easy to do, and one of the work holder bodies 40 is moved above the lap surface plate 12. When the reciprocating member 18 is at the upper end position, the scarf 47 is pushed up against the spring 50 to a position where the taper 48 and the ball 43 can come into contact with each other, and the protrusion 41 is inserted into the holding member 42. When the scarf 47 is released in this state, the scarf 47 is lowered by the repulsive force of the spring 50, and the ball 43 is engaged in the long groove 46.
By lowering the work holder body 40, the ball 43 comes into contact with the dead end portion of the upper end of the long groove 46, and the work holder body 40 becomes suspended from the main shaft 19. In this condition, wrap the surface plate 12.
While rotating the main shaft 19 by the rotary drive motor 21, the forward/backward drive motor 2
0 to lower the main shaft 19. A position where the workpiece W is floating due to a film of lapping liquid formed between the lapping surface plate 12 and the workpiece W due to the rotation of the lapping surface plate 12, and the ball 43 is not in contact with the dead end portion of the long groove 46. The forward/backward drive motor 20 is stopped.

The lapping process is performed by the lapping agent in the lapping liquid due to the pressing force of the work W against the lapping surface plate 12 due only to the gravitational action of the work holder body 40 and the weight 52, and the relative movement between the lapping surface plate 12 and the work W. Ru. After processing, the forward/backward drive motor 20 is operated to raise the main shaft 19. The dead end portion of the upper end of the long groove 46 comes into contact with the ball 43, and the work holder main body 40 is raised while rotating while hanging from the main shaft 19. When the advancing/retracting member 18 has been moved to the upper end position, the advancing/retracting drive motor 20 and the rotary drive motor 21 are stopped. The scarf 47 is pushed up against the force of the spring 50, the ball 43 can be removed from the long groove 46, and the work holder main body 4
0 and remove the work holder body 40 from the spindle 19. Thereafter, similar processing is performed on the unprocessed workpiece W by repeating the above-described order.

Effects of the Invention As described above, the invention comprises a rotating lapping table, a spindle that rotates and moves up and down above the lapping table, a protrusion on the top surface of a work holder body having a work secured to its underside, on the outer periphery of which are formed a number of long grooves that dead end at their upper ends, a number of balls that engage with the long grooves held by a cylindrical holding member fixed to the spindle that rotates and moves up and down, and a scarf that presses and releases the balls is inserted into the outer surface of the holding member, thereby allowing the work holder to be lowered or raised while rotating, thereby preventing the machined surface from being damaged by the lapping agent when the lapping table starts and stops rotating,
Machining accuracy is improved. Also, since the rotation of the spindle can be transmitted to the work holder, the work can be machined uniformly. Furthermore, since the work holder is formed with a long groove to allow the work holder to move up and down relative to the spindle, the work holder is pressed against the lapping platen with a constant force due to the weight of the work holder, and the work can be machined more uniformly. Also, since the work holder can move up and down relative to the spindle, there is the merit that it is not necessary to strictly control the lowering position of the spindle in response to changes in the thickness of the work. Moreover, the work holder can be connected or disconnected to the spindle by simply operating the scarf, which has the merit of improving the work efficiency.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention, and FIG. 1 is a view showing the main parts of a wrapping device, and FIG. 2 is an enlarged cross-sectional view of the work holder in FIG. 1. 10...Fixed base, 11...Turntable, 12...Lap surface plate, 13...Support stand, 15
...Support rail, 16...Slide base, 17
... Spindle head, 18... Advance/retreat member, 19... Main shaft,
20... Advance/retreat drive motor, 21... Rotation drive motor, 40... Work holder main body, 41... Projection, 42... Holding member, 43... Ball, 44...
...Through hole, 45...Caulking, 46...Long groove, 47...
...scarf, 48...taper, 49...taper,
50... Spring, 51... Locking member.

Claims (1)

[Scope of utility model registration request] A main shaft is provided above the lap surface plate, which is rotatably supported around an axis perpendicular to a fixed base, so that it can rotate and move forward and backward in the vertical direction, and a protrusion is provided at the center of the upper surface of the work holder body, which fixes the work on the lower surface. established,
A plurality of long grooves with a dead end at the upper end are formed in the axial direction on the outer periphery of the protrusion, a holding member into which the protrusion can be inserted is fixed to the lower end of the main shaft, and a plurality of long grooves that are engaged with the long grooves are fixed to the lower end of the main shaft. A wrap device that holds a ball movably in the radial direction and includes a scarf that presses and releases the ball against the outer surface of the holding member and is slidably inserted in the vertical direction.