JPS6240529Y2 - - Google Patents

Info

Publication number
JPS6240529Y2
JPS6240529Y2 JP6886179U JP6886179U JPS6240529Y2 JP S6240529 Y2 JPS6240529 Y2 JP S6240529Y2 JP 6886179 U JP6886179 U JP 6886179U JP 6886179 U JP6886179 U JP 6886179U JP S6240529 Y2 JPS6240529 Y2 JP S6240529Y2
Authority
JP
Japan
Prior art keywords
electrode
electron beam
axis
deviation
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6886179U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55169055U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6886179U priority Critical patent/JPS6240529Y2/ja
Publication of JPS55169055U publication Critical patent/JPS55169055U/ja
Application granted granted Critical
Publication of JPS6240529Y2 publication Critical patent/JPS6240529Y2/ja
Expired legal-status Critical Current

Links

JP6886179U 1979-05-24 1979-05-24 Expired JPS6240529Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6886179U JPS6240529Y2 (2) 1979-05-24 1979-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6886179U JPS6240529Y2 (2) 1979-05-24 1979-05-24

Publications (2)

Publication Number Publication Date
JPS55169055U JPS55169055U (2) 1980-12-04
JPS6240529Y2 true JPS6240529Y2 (2) 1987-10-16

Family

ID=29302703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6886179U Expired JPS6240529Y2 (2) 1979-05-24 1979-05-24

Country Status (1)

Country Link
JP (1) JPS6240529Y2 (2)

Also Published As

Publication number Publication date
JPS55169055U (2) 1980-12-04

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