JPS6240834U - - Google Patents
Info
- Publication number
- JPS6240834U JPS6240834U JP13262985U JP13262985U JPS6240834U JP S6240834 U JPS6240834 U JP S6240834U JP 13262985 U JP13262985 U JP 13262985U JP 13262985 U JP13262985 U JP 13262985U JP S6240834 U JPS6240834 U JP S6240834U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- clean tunnels
- tunnels
- clean
- cassettes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Description
第１図ａ，ｂおよび第２図ａ，ｂは本考案にか
かるウエハー搬送装置の概要図、第３図はカセツ
トの斜視図、第４図は従来のウエハー搬送装置の
概要図である。
図において、１はカセツト、２はウエハー、３
，１３，１３′，２３，２３′はクリーントンネ
ル、４，１４，２４は台車、５，１５，１５′，
２５，２５′は置き台、６はステーシヨン、８，
１８，２８は連結棒、を示している。
1A and 2B and 2A and 2B are schematic diagrams of a wafer transfer device according to the present invention, FIG. 3 is a perspective view of a cassette, and FIG. 4 is a schematic diagram of a conventional wafer transfer device. In the figure, 1 is a cassette, 2 is a wafer, and 3 is a cassette.
, 13, 13', 23, 23' are clean tunnels, 4, 14, 24 are trolleys, 5, 15, 15',
25, 25' is a stand, 6 is a station, 8,
18 and 28 indicate connecting rods.
Claims (1)
を複数個並べて、該複数個のクリーントンネルの
中をそれぞれ運行するカセツトの複数個を、１個
の台車で動かすようにしたことを特徴とするウエ
ハー搬送装置。 A wafer transport device characterized in that a plurality of clean tunnels through which one cassette is transported are lined up, and a plurality of cassettes traveling through the plurality of clean tunnels are moved by one cart. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13262985U JPS6240834U (en) | 1985-08-29 | 1985-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13262985U JPS6240834U (en) | 1985-08-29 | 1985-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6240834U true JPS6240834U (en) | 1987-03-11 |
Family
ID=31032195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13262985U Pending JPS6240834U (en) | 1985-08-29 | 1985-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6240834U (en) |
-
1985
- 1985-08-29 JP JP13262985U patent/JPS6240834U/ja active Pending
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