JPS6241793A - シリコン単結晶引上げ用ルツボ - Google Patents
シリコン単結晶引上げ用ルツボInfo
- Publication number
- JPS6241793A JPS6241793A JP60177242A JP17724285A JPS6241793A JP S6241793 A JPS6241793 A JP S6241793A JP 60177242 A JP60177242 A JP 60177242A JP 17724285 A JP17724285 A JP 17724285A JP S6241793 A JPS6241793 A JP S6241793A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- silicon nitride
- cylinder
- single crystal
- pulling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60177242A JPS6241793A (ja) | 1985-08-12 | 1985-08-12 | シリコン単結晶引上げ用ルツボ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60177242A JPS6241793A (ja) | 1985-08-12 | 1985-08-12 | シリコン単結晶引上げ用ルツボ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6241793A true JPS6241793A (ja) | 1987-02-23 |
| JPH0573720B2 JPH0573720B2 (2) | 1993-10-14 |
Family
ID=16027635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60177242A Granted JPS6241793A (ja) | 1985-08-12 | 1985-08-12 | シリコン単結晶引上げ用ルツボ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6241793A (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008115056A (ja) * | 2006-11-07 | 2008-05-22 | Covalent Materials Corp | シリコン溶融ルツボおよびこれに用いる離型材 |
| CN118109895A (zh) * | 2024-04-30 | 2024-05-31 | 安徽壹石通材料科技股份有限公司 | 一种氮化硅/熔融石英复合坩埚及其制备方法与应用 |
-
1985
- 1985-08-12 JP JP60177242A patent/JPS6241793A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008115056A (ja) * | 2006-11-07 | 2008-05-22 | Covalent Materials Corp | シリコン溶融ルツボおよびこれに用いる離型材 |
| CN118109895A (zh) * | 2024-04-30 | 2024-05-31 | 安徽壹石通材料科技股份有限公司 | 一种氮化硅/熔融石英复合坩埚及其制备方法与应用 |
| CN118109895B (zh) * | 2024-04-30 | 2024-08-13 | 安徽壹石通材料科技股份有限公司 | 一种氮化硅/熔融石英复合坩埚及其制备方法与应用 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0573720B2 (2) | 1993-10-14 |
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