JPS6246266Y2 - - Google Patents

Info

Publication number
JPS6246266Y2
JPS6246266Y2 JP3297783U JP3297783U JPS6246266Y2 JP S6246266 Y2 JPS6246266 Y2 JP S6246266Y2 JP 3297783 U JP3297783 U JP 3297783U JP 3297783 U JP3297783 U JP 3297783U JP S6246266 Y2 JPS6246266 Y2 JP S6246266Y2
Authority
JP
Japan
Prior art keywords
storage box
wafer carrier
clean air
section
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3297783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59140434U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3297783U priority Critical patent/JPS59140434U/ja
Publication of JPS59140434U publication Critical patent/JPS59140434U/ja
Application granted granted Critical
Publication of JPS6246266Y2 publication Critical patent/JPS6246266Y2/ja
Granted legal-status Critical Current

Links

JP3297783U 1983-03-08 1983-03-08 ウエハキヤリア搬送装置 Granted JPS59140434U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3297783U JPS59140434U (ja) 1983-03-08 1983-03-08 ウエハキヤリア搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3297783U JPS59140434U (ja) 1983-03-08 1983-03-08 ウエハキヤリア搬送装置

Publications (2)

Publication Number Publication Date
JPS59140434U JPS59140434U (ja) 1984-09-19
JPS6246266Y2 true JPS6246266Y2 (de) 1987-12-12

Family

ID=30163782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3297783U Granted JPS59140434U (ja) 1983-03-08 1983-03-08 ウエハキヤリア搬送装置

Country Status (1)

Country Link
JP (1) JPS59140434U (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0741830B2 (ja) * 1988-09-22 1995-05-10 神鋼電機株式会社 自己クリーン機能付搬送車

Also Published As

Publication number Publication date
JPS59140434U (ja) 1984-09-19

Similar Documents

Publication Publication Date Title
US5752985A (en) Clean room having an air conditioning system
US10304702B2 (en) Efem
JPH09153533A (ja) 半導体ウエハ保管システムおよびそのシステムを使用した半導体装置の製造方式
CN1321294C (zh) 薄板状电子组件清洁搬运装置及薄板状电子产品制造系统
JP2010003867A (ja) 搬送用局所クリーンルーム、およびミニエン装置
US12615995B2 (en) Interface tool
KR100706250B1 (ko) 반도체 소자 제조 장치 및 방법
US6852601B2 (en) Heat treatment method that includes a low negative pressure
JP4364396B2 (ja) 物品容器開閉・転送装置
JPS6246266Y2 (de)
KR20000077388A (ko) 레지스트 도포현상처리장치
KR100823430B1 (ko) 카세트 반송 방법 및 카세트 반송 시스템
JP2001182978A (ja) クリーンルーム設備
US20050111937A1 (en) Method of manufacturing a semiconductor integrated circuit device which prevents foreign particles from being drawn into a semiconductor container containing semiconductor wafers
JP2003264219A (ja) 局所クリーン装置
KR102728247B1 (ko) 기판 처리 장치
JP4372901B2 (ja) ケース開閉装置
JP2001044119A (ja) レジスト塗布現像処理装置
JP2007220773A (ja) ミニエンバイロメント装置及びそれを用いたクリーンルーム設備
JPH0745488A (ja) 清浄雰囲気保持容器
JP2515003B2 (ja) クリ―ンチュ―ブ装置
KR100627016B1 (ko) 반도체 제조를 위한 크린룸
JP3341978B2 (ja) 洗浄システム
JP4405965B2 (ja) ポリッシング装置
JP4357828B2 (ja) フロントエンドモジュール