JPS6248754B2 - - Google Patents
Info
- Publication number
- JPS6248754B2 JPS6248754B2 JP60261382A JP26138285A JPS6248754B2 JP S6248754 B2 JPS6248754 B2 JP S6248754B2 JP 60261382 A JP60261382 A JP 60261382A JP 26138285 A JP26138285 A JP 26138285A JP S6248754 B2 JPS6248754 B2 JP S6248754B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon film
- base material
- carbon
- forming
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Conductive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60261382A JPS62124272A (ja) | 1985-11-22 | 1985-11-22 | 導電性炭素膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60261382A JPS62124272A (ja) | 1985-11-22 | 1985-11-22 | 導電性炭素膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62124272A JPS62124272A (ja) | 1987-06-05 |
| JPS6248754B2 true JPS6248754B2 (th) | 1987-10-15 |
Family
ID=17361070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60261382A Granted JPS62124272A (ja) | 1985-11-22 | 1985-11-22 | 導電性炭素膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124272A (th) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6455542U (th) * | 1987-09-30 | 1989-04-06 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63293164A (ja) * | 1987-05-27 | 1988-11-30 | Agency Of Ind Science & Technol | 炭素材料の製造法 |
-
1985
- 1985-11-22 JP JP60261382A patent/JPS62124272A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6455542U (th) * | 1987-09-30 | 1989-04-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62124272A (ja) | 1987-06-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |