JPS6254456U - - Google Patents
Info
- Publication number
- JPS6254456U JPS6254456U JP14578085U JP14578085U JPS6254456U JP S6254456 U JPS6254456 U JP S6254456U JP 14578085 U JP14578085 U JP 14578085U JP 14578085 U JP14578085 U JP 14578085U JP S6254456 U JPS6254456 U JP S6254456U
- Authority
- JP
- Japan
- Prior art keywords
- anode
- curving
- bending
- curved
- aluminum alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 108010083687 Ion Pumps Proteins 0.000 claims 1
- 238000005452 bending Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
図面は本考案実施例を示すもので、第１図は正
面図、第２図は側面図、第３図は小孔の一部を示
す拡大図、第４図はポンプ取り付け用のサポート
、第５図は電極の側面図。 １…アノード本体、２，３…板体、４…サポー
ト、５…電極、６…孔。
面図、第２図は側面図、第３図は小孔の一部を示
す拡大図、第４図はポンプ取り付け用のサポート
、第５図は電極の側面図。 １…アノード本体、２，３…板体、４…サポー
ト、５…電極、６…孔。
Claims (1)
- 多数の小孔を有する細長い板体を波状に湾曲ま
たは曲折し、該湾曲または曲折した板体を多数組
み合わせて溶接することによりハネカム状に形成
したことを特徴とするスパツタイオンポンプ用ア
ルミ合金製アノード。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14578085U JPS6254456U (ja) | 1985-09-26 | 1985-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14578085U JPS6254456U (ja) | 1985-09-26 | 1985-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6254456U true JPS6254456U (ja) | 1987-04-04 |
Family
ID=31057632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14578085U Pending JPS6254456U (ja) | 1985-09-26 | 1985-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6254456U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5434542U (ja) * | 1977-08-10 | 1979-03-07 | ||
| JPS59123152A (ja) * | 1982-12-28 | 1984-07-16 | Hajime Ishimaru | イオンポンプ |
-
1985
- 1985-09-26 JP JP14578085U patent/JPS6254456U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5434542U (ja) * | 1977-08-10 | 1979-03-07 | ||
| JPS59123152A (ja) * | 1982-12-28 | 1984-07-16 | Hajime Ishimaru | イオンポンプ |