JPS6257712B2 - - Google Patents

Info

Publication number
JPS6257712B2
JPS6257712B2 JP54082093A JP8209379A JPS6257712B2 JP S6257712 B2 JPS6257712 B2 JP S6257712B2 JP 54082093 A JP54082093 A JP 54082093A JP 8209379 A JP8209379 A JP 8209379A JP S6257712 B2 JPS6257712 B2 JP S6257712B2
Authority
JP
Japan
Prior art keywords
film
gas
electrode
film forming
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54082093A
Other languages
English (en)
Japanese (ja)
Other versions
JPS565974A (en
Inventor
Hidekazu Inoe
Isamu Shimizu
Kyosuke Ogawa
Nobuo Kitajima
Tadaharu Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8209379A priority Critical patent/JPS565974A/ja
Publication of JPS565974A publication Critical patent/JPS565974A/ja
Publication of JPS6257712B2 publication Critical patent/JPS6257712B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP8209379A 1979-06-27 1979-06-27 Film forming method Granted JPS565974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8209379A JPS565974A (en) 1979-06-27 1979-06-27 Film forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8209379A JPS565974A (en) 1979-06-27 1979-06-27 Film forming method

Publications (2)

Publication Number Publication Date
JPS565974A JPS565974A (en) 1981-01-22
JPS6257712B2 true JPS6257712B2 (sr) 1987-12-02

Family

ID=13764810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8209379A Granted JPS565974A (en) 1979-06-27 1979-06-27 Film forming method

Country Status (1)

Country Link
JP (1) JPS565974A (sr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2520589B2 (ja) * 1985-06-17 1996-07-31 キヤノン株式会社 Ｃｖｄ法による堆積膜形成方法
KR100197649B1 (ko) * 1995-09-29 1999-06-15 김영환 박막 증착장치
CN107250429B (zh) * 2015-02-18 2020-08-14 株式会社尼康 薄膜制造装置和薄膜制造方法
JP6869123B2 (ja) * 2017-06-23 2021-05-12 東京エレクトロン株式会社 プローブ装置及び針跡転写方法

Also Published As

Publication number Publication date
JPS565974A (en) 1981-01-22

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