JPS6258421U - - Google Patents
Info
- Publication number
- JPS6258421U JPS6258421U JP14981785U JP14981785U JPS6258421U JP S6258421 U JPS6258421 U JP S6258421U JP 14981785 U JP14981785 U JP 14981785U JP 14981785 U JP14981785 U JP 14981785U JP S6258421 U JPS6258421 U JP S6258421U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crystal substrate
- cantilever
- cantilever beam
- optical waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981785U JPS6258421U (2) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981785U JPS6258421U (2) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6258421U true JPS6258421U (2) | 1987-04-11 |
Family
ID=31065381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14981785U Pending JPS6258421U (2) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6258421U (2) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767956A (en) * | 1980-10-15 | 1982-04-24 | Yokogawa Hokushin Electric Corp | Recorder |
| JPS57163205A (en) * | 1981-03-31 | 1982-10-07 | Matsushita Electric Works Ltd | Optical switch |
-
1985
- 1985-09-30 JP JP14981785U patent/JPS6258421U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767956A (en) * | 1980-10-15 | 1982-04-24 | Yokogawa Hokushin Electric Corp | Recorder |
| JPS57163205A (en) * | 1981-03-31 | 1982-10-07 | Matsushita Electric Works Ltd | Optical switch |
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