JPS6260837B2 - - Google Patents
Info
- Publication number
- JPS6260837B2 JPS6260837B2 JP5444879A JP5444879A JPS6260837B2 JP S6260837 B2 JPS6260837 B2 JP S6260837B2 JP 5444879 A JP5444879 A JP 5444879A JP 5444879 A JP5444879 A JP 5444879A JP S6260837 B2 JPS6260837 B2 JP S6260837B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- output
- efficiency
- medium gas
- input power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Description
【発明の詳細な説明】
この発明は、レーザ発振効率の算出機能を備え
たレーザ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser device having a function of calculating laser oscillation efficiency.
一般にレーザ装置においては、その入力電力と
レーザ出力とは短時間であれば比例関係にある。
例えば、横方向励起型炭酸ガスレーザ（以下CO2
レーザと称する）装置の入力電力に対してそのレ
ーザ出力は第１図に特性線l1で示すように比例し
ている。 Generally, in a laser device, its input power and laser output are in a proportional relationship for a short time.
For example, a laterally pumped carbon dioxide laser (hereinafter referred to as CO 2
The laser output is proportional to the input power of the device (referred to as a laser), as shown by the characteristic line l 1 in FIG.
しかしながら、長時間レーザ媒質ガスを封じ切
つた状態でCO2レーザ装置を動作させていると、
第１図の特性線l2のように同じ入力電力でもレー
ザ出力は低下するようになる。即ち、一定の入力
電力でも時間が経過すれば第２図に示すようにレ
ーザ出力が次第に低下する。 However, if the CO 2 laser device is operated with the laser medium gas sealed off for a long time,
As shown by the characteristic line l2 in FIG. 1, the laser output decreases even with the same input power. That is, even if the input power is constant, the laser output gradually decreases as time passes, as shown in FIG.
このようなレーザ出力の変動は、レーザ出力に
より切断、溶接などの加工を行う場合に安定な加
工を阻害することになる。この問題を解決するた
め、レーザ出力が低下しないように入力電力を
徐々に増加することが考えられるが、レーザ出力
を一定に保つため電力を無駄に消費することにな
つて好ましくなく、また電力増加も装置破壊など
の点で限度がある。 Such fluctuations in laser output hinder stable processing when processing such as cutting and welding is performed using laser output. In order to solve this problem, it is possible to gradually increase the input power so that the laser output does not decrease, but this is undesirable because it wastes power to keep the laser output constant, and it also increases the power. However, there are limits in terms of equipment destruction.
この発明は上記の点に鑑みてなされたもので、
レーザ発振効率を検出することにより、出力の安
定化、省エネルギー化、故障発見の早期化などが
図れるレーザ装置を提供することを目的としてい
る。 This invention was made in view of the above points,
The purpose of the present invention is to provide a laser device that can stabilize output, save energy, and discover failures early by detecting laser oscillation efficiency.
以下この発明の一実施例を図について説明す
る。 An embodiment of the present invention will be described below with reference to the drawings.
第３図において、１０はバラスト抵抗１０Ａ、
陰極１０Ｂ、全反射鏡１０Ｃ、部分透過鏡１０
Ｄ、陽極１０Ｅなどで構成されたレーザ発振器、
１１はレーザ出力検出器、１２は電源、１３は入
力電流を検出する電流検出器、１４はこの電流検
出器１３の出力と入力電圧より入力電力を算出す
る電力演算器、１５は前記レーザ出力検出器１１
と電力演算器１４の出力を比較する比較演算器、
１６は出力端子、１７は前記比較演算器１４の出
力、即ちレーザ発振器１０の効率を表示する表示
器（例えばメータ、ランプ、数字表示器、音の強
弱による表示手段など）、１８は効率が一定値以
下になつたときその旨を報知する警報装置（例え
ばブザー、ベル、サイレン、ランプなど）、１９
はレーザ媒質ガス交換装置で、前記比較演算器１
５の出力が一定値以下となつたときに自動的に作
動するようになつている。 In Fig. 3, 10 is a ballast resistor of 10A,
Cathode 10B, total reflection mirror 10C, partial transmission mirror 10
D, a laser oscillator composed of an anode 10E, etc.;
11 is a laser output detector, 12 is a power supply, 13 is a current detector that detects an input current, 14 is a power calculator that calculates input power from the output of this current detector 13 and the input voltage, and 15 is the laser output detector Vessel 11
a comparison calculator that compares the output of the power calculator 14 with the output of the power calculator 14;
16 is an output terminal; 17 is a display that displays the output of the comparator 14, that is, the efficiency of the laser oscillator 10 (for example, a meter, a lamp, a numerical display, a display means based on the intensity of sound, etc.); 18 is a terminal whose efficiency is constant; Alarm device (e.g., buzzer, bell, siren, lamp, etc.) that notifies you when the value falls below the specified value, 19
is a laser medium gas exchange device, and the comparison calculator 1
It is designed to automatically operate when the output of No. 5 falls below a certain value.
次に動作について説明する。電源１２の電圧が
バラスト抵抗１０Ａを通して陰極１０Ｂに印加さ
れると、陰極１０Ｂと陽極１０Ｅの間にグロー放
電が生じる。このとき、陰極１０Ｂと陽極１０Ｅ
の間には炭酸ガスを含むレーザ媒質ガスが供給さ
れており、全反射鏡１０Ｃと部分透過鏡１０Ｄと
の間にレーザ光が発生し、部分透過鏡１０Ｄから
外部へ放出される。 Next, the operation will be explained. When the voltage of the power supply 12 is applied to the cathode 10B through the ballast resistor 10A, a glow discharge occurs between the cathode 10B and the anode 10E. At this time, the cathode 10B and the anode 10E
A laser medium gas containing carbon dioxide gas is supplied between them, and a laser beam is generated between the total reflection mirror 10C and the partially transmitting mirror 10D, and is emitted to the outside from the partially transmitting mirror 10D.
このようにしてレーザ光の放出が続行される
が、長時間グロー放電が続くと、レーザ媒質ガス
が劣化し、また陰極１０Ｂの先端がグロー放電の
熱などにより酸化して消耗する。また、発振器１
０内に大気が流入してレーザ媒質ガスの組成を変
えてしまつたり、バラスト抵抗１０Ａが断線して
グロー放電が正常に行われなくなるとか、電流が
陰極１０Ｂ、陽極１０Ｅ以外の経路にも流れるな
どといつた異常が発生することも予想される。 Emission of laser light continues in this manner, but if the glow discharge continues for a long time, the laser medium gas deteriorates and the tip of the cathode 10B is oxidized and consumed by the heat of the glow discharge. Also, oscillator 1
Air may flow into the 0 and change the composition of the laser medium gas, or the ballast resistor 10A may be disconnected and glow discharge may not occur normally, or the current may flow to paths other than the cathode 10B and anode 10E. It is expected that such abnormalities will occur.
このような状態になると、入力電力に対してレ
ーザ出力は低下し、効率低下となる。この効率低
下は電力演算器１４とレーザ出力検出器１１の出
力比較が比較演算器１５において行われることに
よつて検知され、効率が表示器１７に表示される
とともに、基準設定値以下のときには出力端子１
６にその旨の出力があり、この信号によつて警報
装置１８、レーザ媒質ガス交換装置１９が動作す
る。効率低下がレーザ媒質ガスの劣化に起因する
場合は、ガス交換によつて効率が上昇し、信号出
力は停止される。ガス交換が充分に行われても信
号の出力が継続する場合（この場合にはリレーな
どにより自動的にレーザ発振を停止させることも
可能である）は、係員は他の原因と判断し、適切
な処置をとる。 In such a state, the laser output decreases relative to the input power, resulting in a decrease in efficiency. This decrease in efficiency is detected by comparing the outputs of the power calculator 14 and the laser output detector 11 in the comparator 15, and the efficiency is displayed on the display 17, and when the efficiency is below the reference setting value, the output is terminal 1
There is an output to that effect at 6, and this signal causes the alarm device 18 and the laser medium gas exchange device 19 to operate. If the efficiency decrease is due to deterioration of the laser medium gas, the efficiency will increase through gas exchange and the signal output will be stopped. If the signal continues to be output even after sufficient gas exchange has occurred (in this case, it is possible to automatically stop laser oscillation using a relay, etc.), the staff will determine that there is another cause and take appropriate action. Take appropriate action.
上記実施例では横方向励起型CO2レーザ装置に
ついて説明したが、ガラス管型CO2レーザ装置や
異なるレーザ媒質ガスのガスレーザ装置あるいは
固体レーザ装置にも適用できる。 In the above embodiment, a lateral excitation type CO 2 laser device has been described, but the present invention can also be applied to a glass tube type CO 2 laser device, a gas laser device using a different laser medium gas, or a solid state laser device.
以上のようにこの発明によれば、レーザ発振器
の入力電力とレーザ出力を検出し、これらを比較
して効率算出を行うようにしたので、レーザ発振
時の効率が一見して分るようになつて安定した出
力状態での使用が可能となる。また、レーザ媒質
ガスの劣化や陰極の消耗あるいはレーザ発振器内
の異常発生を早期に検出することができたり、高
効率での使用により省エネルギー化に寄与でき
る。さらに、レーザ発振効率が基準設定値以下に
なるとレーザ媒質ガスの交換を自動的に行うよう
にしており、効率低下の原因がレーザ媒質ガスの
劣化に起因する場合には効率が上昇してレーザ発
振の継続が可能となる。 As described above, according to the present invention, the input power and laser output of the laser oscillator are detected and the efficiency is calculated by comparing these, so that the efficiency during laser oscillation can be seen at a glance. This makes it possible to use the device in a stable output state. Furthermore, deterioration of the laser medium gas, consumption of the cathode, or occurrence of an abnormality within the laser oscillator can be detected at an early stage, and highly efficient use can contribute to energy savings. Furthermore, when the laser oscillation efficiency falls below the standard setting value, the laser medium gas is automatically replaced, and if the cause of the decrease in efficiency is due to deterioration of the laser medium gas, the efficiency increases and the laser oscillation It becomes possible to continue.
第１図はCO2レーザ装置の入力電力に対するレ
ーザ出力の一例を示すグラフ図、第２図はCO2レ
ーザ装置の使用時間に対するレーザ出力の一例を
示すグラフ図、第３図はこの発明に係るレーザ装
置の一実施例を示すブロツク図である。
１０…レーザ発振器、１１…レーザ出力検出
器、１２…電源、１３…電流検出器、１４…電力
演算器、１５…比較演算器、１６…出力端子、１
７…表示器、１８…警報装置、１９…レーザ媒質
ガス交換装置。なお、図中同一符号は同一または
相当部分を示す。
Fig. 1 is a graph showing an example of laser output versus input power of a CO 2 laser device, Fig. 2 is a graph showing an example of laser output versus usage time of the CO 2 laser device, and Fig. 3 is a graph showing an example of laser output versus input power of the CO 2 laser device. 1 is a block diagram showing one embodiment of a laser device. FIG. 10... Laser oscillator, 11... Laser output detector, 12... Power source, 13... Current detector, 14... Power calculator, 15... Comparison calculator, 16... Output terminal, 1
7...Display device, 18...Alarm device, 19...Laser medium gas exchange device. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
検出する装置と、レーザ出力を検出する装置と、
前記両装置の検出出力を比較してレーザ発振効率
算出を行う装置と、この効率算出値が基準設定値
以下である場合にレーザ媒質ガスの交換を自動的
に行うレーザ媒質ガス交換装置を備えたことを特
徴とするレーザ装置。1 a laser oscillator, a device for detecting input power of the laser oscillator, a device for detecting laser output,
A device that calculates laser oscillation efficiency by comparing the detection outputs of both devices, and a laser medium gas exchange device that automatically exchanges the laser medium gas when the calculated efficiency value is below a reference setting value. A laser device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5444879A JPS55146993A (en) | 1979-05-02 | 1979-05-02 | Laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5444879A JPS55146993A (en) | 1979-05-02 | 1979-05-02 | Laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55146993A JPS55146993A (en) | 1980-11-15 |
| JPS6260837B2 true JPS6260837B2 (en) | 1987-12-18 |
Family
ID=12970974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5444879A Granted JPS55146993A (en) | 1979-05-02 | 1979-05-02 | Laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55146993A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61133681A (en) * | 1984-12-04 | 1986-06-20 | Amada Co Ltd | Monitor of light-output controlling device of gas laser |
| JP2804027B2 (en) * | 1987-07-13 | 1998-09-24 | ファナック 株式会社 | Laser output correction method |
| JPH02241071A (en) * | 1989-03-15 | 1990-09-25 | Fanuc Ltd | Nc laser equipment |
| JP4137972B2 (en) | 2006-12-14 | 2008-08-20 | ファナック株式会社 | Gas composition abnormality judgment method and discharge excitation gas laser oscillator |
-
1979
- 1979-05-02 JP JP5444879A patent/JPS55146993A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55146993A (en) | 1980-11-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO1997006586A1 (en) | Method and apparatus for predicting semiconductor laser failure | |
| JPS6260837B2 (en) | ||
| JPWO2006061891A1 (en) | Laser diode pumped solid state laser oscillator and laser diode control method in the oscillator | |
| EP0310670B1 (en) | Abnormal condition detector in a laser oscillator conduit system | |
| KR0178435B1 (en) | Method and device for measuring frequency variation of self-mixed signal in laser resonator | |
| JPH0632697Y2 (en) | Gas laser oscillator | |
| JPS61133681A (en) | Monitor of light-output controlling device of gas laser | |
| JPS63207487A (en) | Laser beam machine | |
| JPH08184672A (en) | Distance measuring apparatus | |
| JPH03283684A (en) | Laser oscillator | |
| EP0895324B1 (en) | Microwave excited gas laser apparatus | |
| JPS63318180A (en) | Laser oscillator control device | |
| JPS6028290A (en) | Argon gas laser | |
| JPH0590689A (en) | Solid-state laser output controller | |
| JPH1065242A (en) | Gas laser oscillation device | |
| US5177756A (en) | Laser apparatus including crystal protection circuitry and method of operation thereof | |
| JPH0255685A (en) | Nc laser device | |
| JPH03255687A (en) | Gas laser device | |
| JPS6171684A (en) | Laser oscillator | |
| JP2007257334A (en) | Fire alarm | |
| JPH0864888A (en) | Carbon dioxide gas laser oscillator | |
| JPS6226881A (en) | Laser oscillator | |
| JPH03102889A (en) | Carbon dioxide laser device | |
| JPH04364789A (en) | Laser oscillator | |
| JPH03179789A (en) | Alarm circuit |