JPS6262431U - - Google Patents
Info
- Publication number
- JPS6262431U JPS6262431U JP15370685U JP15370685U JPS6262431U JP S6262431 U JPS6262431 U JP S6262431U JP 15370685 U JP15370685 U JP 15370685U JP 15370685 U JP15370685 U JP 15370685U JP S6262431 U JPS6262431 U JP S6262431U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- inner tube
- exhaust
- adapter
- quartz inner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 239000007789 gas Substances 0.000 claims 2
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15370685U JPH0719140Y2 (ja) | 1985-10-09 | 1985-10-09 | 減圧ｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15370685U JPH0719140Y2 (ja) | 1985-10-09 | 1985-10-09 | 減圧ｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6262431U true JPS6262431U (2) | 1987-04-17 |
| JPH0719140Y2 JPH0719140Y2 (ja) | 1995-05-01 |
Family
ID=31072824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15370685U Expired - Lifetime JPH0719140Y2 (ja) | 1985-10-09 | 1985-10-09 | 減圧ｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719140Y2 (2) |
-
1985
- 1985-10-09 JP JP15370685U patent/JPH0719140Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719140Y2 (ja) | 1995-05-01 |
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