JPS6262944U - - Google Patents

Info

Publication number
JPS6262944U
JPS6262944U JP15610485U JP15610485U JPS6262944U JP S6262944 U JPS6262944 U JP S6262944U JP 15610485 U JP15610485 U JP 15610485U JP 15610485 U JP15610485 U JP 15610485U JP S6262944 U JPS6262944 U JP S6262944U
Authority
JP
Japan
Prior art keywords
movable electrode
pressure sensor
diaphragm
fixing base
outer periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15610485U
Other languages
English (en)
Other versions
JPH0435778Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985156104U priority Critical patent/JPH0435778Y2/ja
Publication of JPS6262944U publication Critical patent/JPS6262944U/ja
Application granted granted Critical
Publication of JPH0435778Y2 publication Critical patent/JPH0435778Y2/ja
Expired legal-status Critical Current

Links

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  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第１図は本発明の一実施例を示す断面図、第２
図は本発明に用いられる固定電極を示す平面図、
第３図は従来の静電型圧力センサを示す断面図、
第４図は従来例の固定電極を示す平面図である。 １５はダイヤフラム固定ベース、１６はダイヤ
フラム、１８は可動電極、１９は固定電極である
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 固定電極と可動電極とが対向配置に設けられ、
    前記可動電極はダイヤフラム固定ベース上に設け
    られたダイヤフラムによつて支持され、それぞれ
    同心状の円形を成している静電型圧力センサにお
    いて、前記可動電極の外周とダイヤフラム固定ベ
    ースの外周とを結んで形成される仮想円錐内にお
    さまるように前記固定電極の外径を設定したこと
    を特徴とする静電型圧力センサ。
JP1985156104U 1985-10-11 1985-10-11 Expired JPH0435778Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985156104U JPH0435778Y2 (ja) 1985-10-11 1985-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985156104U JPH0435778Y2 (ja) 1985-10-11 1985-10-11

Publications (2)

Publication Number Publication Date
JPS6262944U true JPS6262944U (ja) 1987-04-18
JPH0435778Y2 JPH0435778Y2 (ja) 1992-08-25

Family

ID=31077410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985156104U Expired JPH0435778Y2 (ja) 1985-10-11 1985-10-11

Country Status (1)

Country Link
JP (1) JPH0435778Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58731A (ja) * 1981-06-25 1983-01-05 Matsushita Electric Ind Co Ltd 静電容量式圧力センサ
JPS5845534A (ja) * 1981-09-11 1983-03-16 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58731A (ja) * 1981-06-25 1983-01-05 Matsushita Electric Ind Co Ltd 静電容量式圧力センサ
JPS5845534A (ja) * 1981-09-11 1983-03-16 Matsushita Electric Ind Co Ltd 静電容量型圧力センサ
JPS59171826A (ja) * 1983-03-22 1984-09-28 Copal Takeda Medical Kenkyusho:Kk 静電容量型圧力センサ−の温度補償装置

Also Published As

Publication number Publication date
JPH0435778Y2 (ja) 1992-08-25

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