JPS6266154A - 化学感応半導体装置 - Google Patents

化学感応半導体装置

Info

Publication number: JPS6266154A
Authority: JP; Japan
Prior art keywords: chemically sensitive; passageway; sensitive; field effect; gate
Prior art date: 1985-09-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP61211830A

Other languages

English (en)

Japanese (ja)

Inventor

ジョン　エドワード　アンドリュウ　ショー

アラスター　シッバルド

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

EMI Group Ltd

Original Assignee

Thorn EMI PLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-09-14

Filing date

1986-09-10

Publication date

1987-03-25

1986-09-10 Application filed by Thorn EMI PLC filed Critical Thorn EMI PLC

1987-03-25 Publication of JPS6266154A publication Critical patent/JPS6266154A/ja

Status Pending legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title claims description 15
239000000126 substance Substances 0.000 title description 3
230000005669 field effect Effects 0.000 claims description 13
239000012491 analyte Substances 0.000 claims description 12
239000004020 conductor Substances 0.000 claims description 12
239000000463 material Substances 0.000 claims description 11
239000000758 substrate Substances 0.000 claims description 11
238000012360 testing method Methods 0.000 claims description 10
230000000694 effects Effects 0.000 claims description 2
230000035945 sensitivity Effects 0.000 claims description 2
239000010410 layer Substances 0.000 description 33
239000012530 fluid Substances 0.000 description 6
150000002500 ions Chemical class 0.000 description 6
239000012212 insulator Substances 0.000 description 5
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical group [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
229910052581 Si3N4 Inorganic materials 0.000 description 3
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
239000008280 blood Substances 0.000 description 3
210000004369 blood Anatomy 0.000 description 3
238000000151 deposition Methods 0.000 description 3
239000011521 glass Substances 0.000 description 3
238000000034 method Methods 0.000 description 3
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
239000011575 calcium Substances 0.000 description 2
229910021419 crystalline silicon Inorganic materials 0.000 description 2
230000008021 deposition Effects 0.000 description 2
238000000605 extraction Methods 0.000 description 2
239000007789 gas Substances 0.000 description 2
239000001257 hydrogen Substances 0.000 description 2
229910052739 hydrogen Inorganic materials 0.000 description 2
150000004767 nitrides Chemical class 0.000 description 2
229910052763 palladium Inorganic materials 0.000 description 2
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
229920000642 polymer Polymers 0.000 description 2
239000000243 solution Substances 0.000 description 2
OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
108090000790 Enzymes Proteins 0.000 description 1
102000004190 Enzymes Human genes 0.000 description 1
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
108010050375 Glucose 1-Dehydrogenase Proteins 0.000 description 1
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
229910002319 LaF3 Inorganic materials 0.000 description 1
206010028980 Neoplasm Diseases 0.000 description 1
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
206010070834 Sensitisation Diseases 0.000 description 1
101150068246 V-MOS gene Proteins 0.000 description 1
BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical group ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
150000001450 anions Chemical class 0.000 description 1
239000007864 aqueous solution Substances 0.000 description 1
238000009534 blood test Methods 0.000 description 1
229910001424 calcium ion Inorganic materials 0.000 description 1
239000001506 calcium phosphate Substances 0.000 description 1
229910000389 calcium phosphate Inorganic materials 0.000 description 1
235000011010 calcium phosphates Nutrition 0.000 description 1
201000011510 cancer Diseases 0.000 description 1
150000001768 cations Chemical class 0.000 description 1
239000011248 coating agent Substances 0.000 description 1
238000000576 coating method Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
MIMDHDXOBDPUQW-UHFFFAOYSA-N dioctyl decanedioate Chemical compound CCCCCCCCOC(=O)CCCCCCCCC(=O)OCCCCCCCC MIMDHDXOBDPUQW-UHFFFAOYSA-N 0.000 description 1
QHGRPTNUHWYCEN-UHFFFAOYSA-N dioctyl phenyl phosphate Chemical compound CCCCCCCCOP(=O)(OCCCCCCCC)OC1=CC=CC=C1 QHGRPTNUHWYCEN-UHFFFAOYSA-N 0.000 description 1
238000005530 etching Methods 0.000 description 1
239000008103 glucose Substances 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
239000010931 gold Substances 0.000 description 1
150000002431 hydrogen Chemical class 0.000 description 1
230000002209 hydrophobic effect Effects 0.000 description 1
229910052809 inorganic oxide Inorganic materials 0.000 description 1
238000009413 insulation Methods 0.000 description 1
WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
230000007774 longterm Effects 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
239000011159 matrix material Substances 0.000 description 1
239000000203 mixture Substances 0.000 description 1
229910017604 nitric acid Inorganic materials 0.000 description 1
229910052762 osmium Inorganic materials 0.000 description 1
239000002245 particle Substances 0.000 description 1
229910052697 platinum Inorganic materials 0.000 description 1
229920000915 polyvinyl chloride Polymers 0.000 description 1
239000004800 polyvinyl chloride Substances 0.000 description 1
239000011591 potassium Substances 0.000 description 1
229910052700 potassium Inorganic materials 0.000 description 1
239000000843 powder Substances 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
239000011241 protective layer Substances 0.000 description 1
150000003839 salts Chemical class 0.000 description 1
230000008313 sensitization Effects 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
229910052814 silicon oxide Inorganic materials 0.000 description 1
229920002379 silicone rubber Polymers 0.000 description 1
239000004945 silicone rubber Substances 0.000 description 1
239000011734 sodium Substances 0.000 description 1
229910001415 sodium ion Inorganic materials 0.000 description 1
239000002195 soluble material Substances 0.000 description 1
238000000807 solvent casting Methods 0.000 description 1
QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 1
BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 description 1
-1 vapors Substances 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Landscapes

Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Health & Medical Sciences (AREA)
Physics & Mathematics (AREA)
Molecular Biology (AREA)
Microelectronics & Electronic Packaging (AREA)
Chemical Kinetics & Catalysis (AREA)
Electrochemistry (AREA)
Engineering & Computer Science (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

JP61211830A 1985-09-14 1986-09-10 化学感応半導体装置 Pending JPS6266154A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
GB8522785		1985-09-14
GB858522785A GB8522785D0 (en)	1985-09-14	1985-09-14	Chemical-sensitive semiconductor device

Publications (1)

Publication Number	Publication Date
JPS6266154A true JPS6266154A (ja)	1987-03-25

Family

ID=10585189

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP61211830A Pending JPS6266154A (ja)	1985-09-14	1986-09-10	化学感応半導体装置

Country Status (4)

Country	Link
US (1)	US4764797A (fr)
EP (1)	EP0215546A3 (fr)
JP (1)	JPS6266154A (fr)
GB (1)	GB8522785D0 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
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JP2003531592A (ja) *	2000-04-24	2003-10-28	イーグルリサーチアンドディベロップメント，リミティッドライアビリティーカンパニー	超高速の核酸配列決定のための電界効果トランジスタ装置
JP2003533676A (ja) *	2000-04-24	2003-11-11	イーグルリサーチアンドディベロップメント，リミティッドライアビリティーカンパニー	超高速の核酸配列決定のための電界効果トランジスタ装置

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GB8717036D0 (en) *	1987-07-18	1987-08-26	Emi Plc Thorn	Sensor arrangements
DE3870156D1 (de) *	1987-10-13	1992-05-21	Taiyo Yuden Kk	Chemische sensoren und deren bestandteile.
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NL9001628A (nl) *	1990-07-17	1992-02-17	Priva Agro Holding Bv	Inrichting voor het meten van de concentratie van een chemische stof in fluidum.
DE4318407A1 (de) *	1993-06-03	1994-12-08	Rossendorf Forschzent	Mikrokapillare mit integrierten chemischen Mikrosensoren und Verfahren zu ihrer Herstellung
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US7785785B2 (en)	2004-11-12	2010-08-31	The Board Of Trustees Of The Leland Stanford Junior University	Charge perturbation detection system for DNA and other molecules
US11339430B2 (en)	2007-07-10	2022-05-24	Life Technologies Corporation	Methods and apparatus for measuring analytes using large scale FET arrays
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US8349167B2 (en)	2006-12-14	2013-01-08	Life Technologies Corporation	Methods and apparatus for detecting molecular interactions using FET arrays
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EP2307577B1 (fr)	2008-06-25	2015-06-03	Life Technologies Corporation	Procédés pour mesurer des substances à analyser à l'aide de réseaux fet à grande échelle
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US20100137143A1 (en)	2008-10-22	2010-06-03	Ion Torrent Systems Incorporated	Methods and apparatus for measuring analytes
JP5228891B2 (ja) *	2008-11-21	2013-07-03	株式会社リコー	センサデバイス
US8776573B2 (en)	2009-05-29	2014-07-15	Life Technologies Corporation	Methods and apparatus for measuring analytes
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DE102009045475B4 (de) *	2009-10-08	2023-06-29	Robert Bosch Gmbh	Gassensitive Halbleitervorrichtung sowie deren Verwendung
DE102010001998A1 (de) *	2010-02-16	2011-08-18	Robert Bosch GmbH, 70469	Gassensitiver Feldeffekttransistor und Verfahren zur Herstellung eines gassensitiven Feldeffekttransistors
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TWI465716B (zh)	2010-06-30	2014-12-21	生命技術公司	用於檢測及測量化學反應及化合物之電晶體電路
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WO2012036679A1 (fr)	2010-09-15	2012-03-22	Life Technologies Corporation	Procédés et appareil de mesure d'analytes
US8685324B2 (en)	2010-09-24	2014-04-01	Life Technologies Corporation	Matched pair transistor circuits
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US9116117B2 (en)	2013-03-15	2015-08-25	Life Technologies Corporation	Chemical sensor with sidewall sensor surface
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1985
- 1985-09-14 GB GB858522785A patent/GB8522785D0/en active Pending
1986
- 1986-06-24 EP EP86304836A patent/EP0215546A3/fr not_active Withdrawn
- 1986-07-08 US US06/883,158 patent/US4764797A/en not_active Expired - Fee Related
- 1986-09-10 JP JP61211830A patent/JPS6266154A/ja active Pending

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2003531592A (ja) *	2000-04-24	2003-10-28	イーグルリサーチアンドディベロップメント，リミティッドライアビリティーカンパニー	超高速の核酸配列決定のための電界効果トランジスタ装置
JP2003533676A (ja) *	2000-04-24	2003-11-11	イーグルリサーチアンドディベロップメント，リミティッドライアビリティーカンパニー	超高速の核酸配列決定のための電界効果トランジスタ装置
JP4758047B2 (ja) *	2000-04-24	2011-08-24	ライフテクノロジーズコーポレーション	超高速の核酸配列決定のための電界効果トランジスタ装置

Also Published As

Publication number	Publication date
GB8522785D0 (en)	1985-10-16
US4764797A (en)	1988-08-16
EP0215546A3 (fr)	1989-06-21
EP0215546A2 (fr)	1987-03-25

Publication	Publication Date	Title
JPS6266154A (ja)	1987-03-25	化学感応半導体装置
US4354308A (en)	1982-10-19	Method for manufacture of a selective chemical sensitive FET transducer
US4505799A (en)	1985-03-19	ISFET sensor and method of manufacture
US4739380A (en)	1988-04-19	Integrated ambient sensing devices and methods of manufacture
US5138251A (en)	1992-08-11	Fet sensor apparatus of flow-cell adaptive type and method of manufacturing the same
JP3111283B2 (ja)	2000-11-20	イオン選択性膜を有するミニチュア化された化学バイオセンサ素子とこの素子のための支持体の製造方法
US4874499A (en)	1989-10-17	Electrochemical microsensors and method of making such sensors
US4961833A (en)	1990-10-09	Field-effect transistor-type semiconductor sensor
US4502938A (en)	1985-03-05	Encapsulated chemoresponsive microelectronic device arrays
TWI422818B (zh)	2014-01-11	氫離子感測場效電晶體及其製造方法
US20040136866A1 (en)	2004-07-15	Planar nanowire based sensor elements, devices, systems and methods for using and making same
KR100197747B1 (ko)	1999-06-15	화학물과 이온센서 테스트용 유체공학 헤드
US11674924B2 (en)	2023-06-13	Sensor with a membrane having full circumferential adhesion
US4232326A (en)	1980-11-04	Chemically sensitive field effect transistor having electrode connections
US20060148118A1 (en)	2006-07-06	Fabrication of array pH sensitive EGFET and its readout circuit
JP3318405B2 (ja)	2002-08-26	参照電極
JPH0765985B2 (ja)	1995-07-19	ＩＳＦＥＴ並びにこれを利用したＩＳＦＥＴプローブとＩＳＦＥＴｐＨセンサ
JPS63208753A (ja)	1988-08-30	免疫センサ及び免疫検出方法
JPH0469338B2 (fr)	1992-11-05
JPH04363651A (ja)	1992-12-16	集積化イオンセンサ
JPH01284748A (ja)	1989-11-16	センサ接続用コネクタ
Sibbald et al.	1987	A flow-through ion-selective field-effect transistor
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