JPS6270168U - - Google Patents
Info
- Publication number
- JPS6270168U JPS6270168U JP16068285U JP16068285U JPS6270168U JP S6270168 U JPS6270168 U JP S6270168U JP 16068285 U JP16068285 U JP 16068285U JP 16068285 U JP16068285 U JP 16068285U JP S6270168 U JPS6270168 U JP S6270168U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- vapor deposition
- sectional area
- heat generation
- taken
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000020169 heat generation Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図Ａ，Ｂ（Ａは正面図、Ｂは側面図）は本
考案の実施例であり、第２図Ａ，Ｂは本考案の他
の実施例（Ａは平面図、Ｂは正面図）、第３，４
図は従来の真空蒸着用ボートの一例である。
１１，２１，３１……リード部、１２，２２，
３２……蒸発槽部、１３，２３……蒸気出口。
Figures 1A and B (A is a front view, B is a side view) are embodiments of the present invention, and Figures 2A and B are other embodiments of the invention (A is a plan view, B is a front view). ), 3rd and 4th
The figure shows an example of a conventional vacuum deposition boat. 11, 21, 31...Lead part, 12, 22,
32... Evaporation tank section, 13, 23... Steam outlet.
Claims (1)
トの断面積を、リード部Ｐ１と蒸発槽部Ｐ２とす
る時Ｐ１／Ｐ２≧１．２５にしたことを特徴とす
る抵抗加熱型の真空蒸着用ボート。 A resistance heating type vacuum characterized in that the cross-sectional area of the boat made of a low heat generation material in the direction of current flow is set to P 1 /P 2 ≧1.25 when the lead part P 1 and the evaporation tank part P 2 are taken as P 1 /P 2 ≧1.25. Vapor deposition boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16068285U JPS6270168U (en) | 1985-10-22 | 1985-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16068285U JPS6270168U (en) | 1985-10-22 | 1985-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6270168U true JPS6270168U (en) | 1987-05-02 |
Family
ID=31086287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16068285U Pending JPS6270168U (en) | 1985-10-22 | 1985-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6270168U (en) |
-
1985
- 1985-10-22 JP JP16068285U patent/JPS6270168U/ja active Pending