JPS6281603A - Color filter manufacturing method - Google Patents
Color filter manufacturing methodInfo
- Publication number
- JPS6281603A JPS6281603A JP60222974A JP22297485A JPS6281603A JP S6281603 A JPS6281603 A JP S6281603A JP 60222974 A JP60222974 A JP 60222974A JP 22297485 A JP22297485 A JP 22297485A JP S6281603 A JPS6281603 A JP S6281603A
- Authority
- JP
- Japan
- Prior art keywords
- dyed
- area
- dyeing
- layer
- color filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000004043 dyeing Methods 0.000 claims description 25
- 239000011347 resin Substances 0.000 claims description 13
- 229920005989 resin Polymers 0.000 claims description 13
- 238000001259 photo etching Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 description 25
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 241000255925 Diptera Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
発明の件、!lIな脱明
〔産業上の利用分野〕
本発明は、カラーフィルターの製造方法に関するものぐ
ある。[Detailed description of the invention] Invention! [Industrial Application Field] The present invention relates to a method for manufacturing a color filter.
本発明は、カラーフィルターにおいて、被染色1jの、
染色時O膜厚O膨張Oちがいや染色前からの膜厚差によ
る膜厚差を、被染色層形取前または被染色層染色後に、
被染色層■膜厚り薄い染色領域に、酸も被染色;―の膜
厚り厚い染色領域と■膜厚差だけ感光性透明位j脂1−
トフォトエッチングにより形匝して、各染色領域の膜厚
差となくすものである。The present invention provides a color filter in which dyed material 1j is
Differences in film thickness due to differences in film thickness before dyeing, before dyeing or after dyeing,
Layer to be dyed ■ Thin film thickness dyed area, acid is also dyed;
It is shaped by photo-etching to eliminate the difference in film thickness between each dyed area.
従来のカラーフィルターは、被染色層への染色時の染料
の侵入による#張のちがいや、染色前からの被染色層の
膜l早差により、各染色領域には膜厚差があった。Conventional color filters have differences in film thickness in each dyed area due to differences in # tension due to dye intrusion into the dyed layer during dyeing, and differences in film thickness of the dyed layer before dyeing.
しかし、こhを級晶表示本に用いた場合各巣色領域によ
り膜厚が異なると、配向処理状態VC差が生じたり、セ
ル厚が異なったりして、液晶の配向が不均一になるとい
う問題点を有する。″また、各染色領域ごとに膜厚差の
あるカラーフィルター上にt隊パターンを作成し友場合
、段差部分で断線が起こりやすい1本発明は、このよう
な問題点を解決するもので、その目的とするところは、
各染色領域の膜厚の等しいカラーフィルターを提供する
ところにある。However, when this is used in a liquid crystal display book, if the film thickness differs depending on the focal color area, there will be a difference in the alignment processing state VC, or the cell thickness will differ, resulting in non-uniform alignment of the liquid crystal. There are problems. ``Furthermore, when a T-pattern pattern is created on a color filter that has a different film thickness for each dyeing area, disconnections tend to occur at stepped portions.The present invention solves this problem. The purpose is to
The purpose of this method is to provide a color filter in which each dyed area has an equal film thickness.
本発明によるカラーフィルターは、被染色J目形取前ま
たは、被染色層染色後において、フォトエツチングによ
り、被染色層の膜厚の島い染色領域に、蚊も被染色層の
膜厚の厚V−h染色領−域との膜厚差だけ感光性透明樹
脂1四を形成することを特畝とする。In the color filter according to the present invention, before taking the J-shaped pattern to be dyed or after dyeing the layer to be dyed, mosquitoes can be etched into dyed areas with a small thickness of the layer to be dyed by photo-etching. The special ridge is to form the photosensitive transparent resin 14 by the difference in film thickness from the Vh dyed area.
第1図に、本発明によるカラーフィルターの製造方法の
第1例を示す、このカラーフィルターは、A、B、Cの
三種の染色領域金持ち、各染色領域における被染色1−
の膨張セ、A、B、CのIllに大きいものとする。ま
ず、透明基板1上、染色領域Bに、あらかじめ調べた、
被染色l・−の染色後の染色領1tJijAと染色領域
Bとの膜厚差だけ感光性透明樹脂膜層2Bをフォトエツ
チングにより形成する。FIG. 1 shows a first example of the method for manufacturing a color filter according to the present invention. This color filter has three types of dyed areas A, B, and C.
Let the expansion of A, B, and C be larger than Ill. First, on the transparent substrate 1, in the dyed area B, the
A photosensitive transparent resin film layer 2B is formed by photo-etching by the difference in film thickness between the dyed area 1tJijA and the dyed area B after dyeing 1.--.
また、染色領域Cについても、同様にして感光性透明樹
脂膜r42cを形成する1次に、皐一層である被染色1
v#3をガラス基板lおよび感光性透明樹脂142 B
、 2 C,J:に形成する。染色前において、被染
色層の各染色領域における膜厚は等しい、被染色I−の
染色は、耐染・色性をもつフォトレジストr* 7ft
:形成し、染色領域のみこれをフォトエツチングにより
除き、染色したのちフォトレジスト−の除くとiう一連
の工程のくり返しにより行ない染色された被染色1曽3
A、3B、3Gを形成する。Similarly, regarding the dyeing area C, the primary layer forming the photosensitive transparent resin film r42c is the first layer to be dyed.
v#3 to glass substrate l and photosensitive transparent resin 142B
, 2C,J:. Before dyeing, the film thickness in each dyeing area of the layer to be dyed is equal.The dyeing of dyeing target I- is done using a photoresist r*7ft with stain resistance and color property.
: The dyed area is removed by photoetching, dyed, and then the photoresist is removed by repeating a series of steps.
Form A, 3B, and 3G.
染色綬においては、感yt、注透明樹脂層2による補正
によって各染色領域の膜厚は等しい。In the dyed ribbon, the film thickness of each dyed area is equal due to the correction by the transparent resin layer 2.
第2図に、本発明によるカラーフィルターの製造方法の
嘉2レリを示す、凱2列は、第1列と同様に形成した被
染色膜3上に、染色後感光性透F94樹脂映を形成して
膜厚の補正を行ない、各染色領域の膜厚を同一にしたも
のである。FIG. 2 shows the method for manufacturing a color filter according to the present invention. In the second row, a photosensitive transparent F94 resin film is formed on the dyed film 3 formed in the same manner as in the first row. Then, the film thickness was corrected to make the film thickness of each stained area the same.
第3図に本発明によるカラーフィルターの製造方法の第
3列を示す、第1例、第2例においては、被染色層はQ
L−1−であったが、第3例においては、被染色1−ヲ
、フォトエツチングによりパターニングするため、被染
色tvjは各染色領域について独立している。染色一度
は、被染色層の膜厚と相関があるため所定の染色製置を
得るためには、染色前においても被染色層の膜厚が等し
いとは限らない。FIG. 3 shows the third row of the method for manufacturing a color filter according to the present invention. In the first and second examples, the layer to be dyed is Q
However, in the third example, dyeing target 1-wo is patterned by photo-etching, so that dyeing target tvj is independent for each dyeing area. Since the degree of dyeing is correlated with the thickness of the layer to be dyed, in order to obtain a predetermined dyeing result, the thickness of the layer to be dyed is not necessarily equal even before dyeing.
着た、染料のちがいにより、各染色領域の被染色1−の
膨張も異なる。まず、透明基板l上の染色領14B上に
、あらかじめ調べた被染色層の染色後の染色領域Aと染
色領域Bの膜厚差だけ、感光性透明樹脂膜2Bをフォト
エツチングにより形成する。Depending on the dye applied, the expansion of the dyed area 1- in each dyed area also differs. First, a photosensitive transparent resin film 2B is formed on the dyed area 14B on the transparent substrate l by photo-etching, by the difference in film thickness between the dyed area A and the dyed area B after dyeing of the layer to be dyed, which has been examined in advance.
また、染色領域Cについても同様にして、感光性透明樹
脂層2Cを形成する1次に、透明基板1上の染色領域A
上に、フォトエツチングにより被染色層3A全形改し、
染色を行なったのち、防染剤もしくは防染膜により防染
処叩を行なう1次に、感光性透明樹脂1−2B上の染色
領域B、感光性透明樹脂層2C上の染色領域Cについて
も同様な工程をくり返して染色された被染色1に3B、
3(:全形成し各染色領域の膜厚の等しいカラーフィル
ターが作られる。Similarly, for the dyed area C, the dyed area A on the transparent substrate 1 is applied to the primary layer forming the photosensitive transparent resin layer 2C.
On top, the entire shape of the dyed layer 3A was changed by photoetching,
After dyeing, the first step is to perform a resist dyeing treatment using a resisting agent or a resisting film, and also for the dyed area B on the photosensitive transparent resin 1-2B and the dyed area C on the photosensitive transparent resin layer 2C. 3B to the dyed object 1 which was dyed by repeating the same process.
3 (: Fully formed, a color filter with equal film thickness in each dyed area is created.
第4図に、本発明によるカラーフィルターの製造方法の
訂4例を示す、第4例は、第3 PAJと同様に形成し
た被染色H4の段差を、染色後に感光性透明樹脂膜を用
いて補正を行ない、各染色領域の膜厚を同一にしたもの
である。FIG. 4 shows a fourth example of a revised method for producing a color filter according to the present invention. Correction was performed to make the film thickness of each stained area the same.
本発明によるカラーフィルターは、各染色領域の膜厚が
等しいため、こ?’Lを液晶表示体に用いた場合には、
配向処理が均一に行なわれ、セル内の液晶の配向状態が
良好になるといった効果を有する。また、本発明による
カラーフィルター上に透明電険を形成する場合、各染色
領域の膜厚の異なるカラーフィルターとくらべ1段の部
分における断線が少ないといった効果を有する。Since the color filter according to the present invention has the same film thickness in each dyed area, When 'L is used in a liquid crystal display,
This has the effect that the alignment treatment is performed uniformly and the alignment state of the liquid crystal within the cell is improved. Furthermore, when a transparent electrical conductor is formed on a color filter according to the present invention, there is an effect that there are fewer disconnections at one stage compared to a color filter in which each dyed region has a different film thickness.
第1図から第4図は本発明におけるカラーフィルターの
構造図。
1・・・透明基板
2B、−染色領域B上の感光性透明樹脂層2C・・染色
領域C上の感元性透明樹脂層3A・・染色領域A上の染
色された被染色層3B・・染色領域B上の染色された被
染色層3C・・染色領域C上の染色された被染色層以上1 to 4 are structural diagrams of the color filter according to the present invention. 1...Transparent substrate 2B, - Photosensitive transparent resin layer 2C on dyed area B...Sensitive transparent resin layer 3A on dyed area C...Dyeed dyed layer 3B on dyed area A... The dyed layer 3C on the dyed area B...The dyed layer on the dyed area C and above
Claims (1)
選択的に染色することにより製造するカラーフィルター
において、被染色層形成前または被染色層染色後に、フ
ォトエッチングにより、染色後の膜厚の薄い染色領域に
、最も染色後の膜厚の厚い染色領域との膜厚差だけ、感
光性透明樹脂主線を形成することを特徴とするカラーフ
ィルターの製造方法。In a color filter manufactured by selectively dyeing a layer to be dyed formed on a transparent substrate using a predetermined dye, the dyed film is removed by photo-etching before forming the layer to be dyed or after dyeing the layer to be dyed. A method for manufacturing a color filter, characterized in that a main line of a photosensitive transparent resin is formed in a thin dyed area by the thickness difference between the dyed area and the thickest dyed area after dyeing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60222974A JPS6281603A (en) | 1985-10-07 | 1985-10-07 | Color filter manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60222974A JPS6281603A (en) | 1985-10-07 | 1985-10-07 | Color filter manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6281603A true JPS6281603A (en) | 1987-04-15 |
Family
ID=16790806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60222974A Pending JPS6281603A (en) | 1985-10-07 | 1985-10-07 | Color filter manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6281603A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247604A (en) * | 1988-08-09 | 1990-02-16 | Toppan Printing Co Ltd | Color filter |
| JP2006269533A (en) * | 2005-03-22 | 2006-10-05 | Sharp Corp | Solid-state imaging device, manufacturing method thereof, and electronic information device |
-
1985
- 1985-10-07 JP JP60222974A patent/JPS6281603A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247604A (en) * | 1988-08-09 | 1990-02-16 | Toppan Printing Co Ltd | Color filter |
| JP2006269533A (en) * | 2005-03-22 | 2006-10-05 | Sharp Corp | Solid-state imaging device, manufacturing method thereof, and electronic information device |
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