JPS6283866U - - Google Patents

Info

Publication number
JPS6283866U
JPS6283866U JP17589185U JP17589185U JPS6283866U JP S6283866 U JPS6283866 U JP S6283866U JP 17589185 U JP17589185 U JP 17589185U JP 17589185 U JP17589185 U JP 17589185U JP S6283866 U JPS6283866 U JP S6283866U
Authority
JP
Japan
Prior art keywords
substrate
wall member
film
bell
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17589185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0248422Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985175891U priority Critical patent/JPH0248422Y2/ja
Publication of JPS6283866U publication Critical patent/JPS6283866U/ja
Application granted granted Critical
Publication of JPH0248422Y2 publication Critical patent/JPH0248422Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1985175891U 1985-11-14 1985-11-14 Expired JPH0248422Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985175891U JPH0248422Y2 ( ) 1985-11-14 1985-11-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985175891U JPH0248422Y2 ( ) 1985-11-14 1985-11-14

Publications (2)

Publication Number Publication Date
JPS6283866U true JPS6283866U ( ) 1987-05-28
JPH0248422Y2 JPH0248422Y2 ( ) 1990-12-19

Family

ID=31115634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985175891U Expired JPH0248422Y2 ( ) 1985-11-14 1985-11-14

Country Status (1)

Country Link
JP (1) JPH0248422Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006299292A (ja) * 2005-04-15 2006-11-02 Ulvac Kyushu Corp 真空成膜装置及び成膜方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148489A (en) * 1976-06-04 1977-12-09 Nippon Sheet Glass Co Ltd Vacuum evaporation process
JPS5623671U ( ) * 1979-07-30 1981-03-03
JPS57134559A (en) * 1981-02-12 1982-08-19 Toyota Central Res & Dev Lab Inc Physical vapor deposition device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148489A (en) * 1976-06-04 1977-12-09 Nippon Sheet Glass Co Ltd Vacuum evaporation process
JPS5623671U ( ) * 1979-07-30 1981-03-03
JPS57134559A (en) * 1981-02-12 1982-08-19 Toyota Central Res & Dev Lab Inc Physical vapor deposition device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006299292A (ja) * 2005-04-15 2006-11-02 Ulvac Kyushu Corp 真空成膜装置及び成膜方法

Also Published As

Publication number Publication date
JPH0248422Y2 ( ) 1990-12-19

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