JPS6284905A - Manufacture of surface coated ceramics tool - Google Patents
Manufacture of surface coated ceramics toolInfo
- Publication number
- JPS6284905A JPS6284905A JP22542585A JP22542585A JPS6284905A JP S6284905 A JPS6284905 A JP S6284905A JP 22542585 A JP22542585 A JP 22542585A JP 22542585 A JP22542585 A JP 22542585A JP S6284905 A JPS6284905 A JP S6284905A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- bore
- tool
- si3n4
- denitrified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は一基体と硬質層との界面部に欠陥のない、す
なわち基体表面部に脱窒層やボアの存在がなく、したが
って基体表面部の靭性低下がなく、かつ基体表面に対す
る硬質層の付着強度が著しく高い表面被覆セラミックス
工具の製造法に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention has no defects at the interface between a substrate and a hard layer, that is, there is no denitrification layer or bore on the substrate surface, and therefore the substrate surface has no defects. The present invention relates to a method for manufacturing a surface-coated ceramic tool in which the hard layer does not deteriorate in toughness and the adhesion strength of the hard layer to the substrate surface is extremely high.
従来−一般に、結合相としてlMgOやY2O3、さら
にランタニド系の希土類元素の酸1ヒ物、A7203、
MN、およびS iO2などのうちの1種または2種以
上を含有し−さらに必要(:応じて、分散相として。Conventional - In general, lMgO, Y2O3, lanthanide rare earth element arsenide, A7203, etc. are used as the binder phase.
Contains one or more of MN, SiO2, etc. - if necessary (as a dispersed phase).
例えばTiC+ TiN * TlB2 + T+CN
O+ ZrN * ZrO2+HfC* VC* 歯C
* TaCr TaN 9Mo2C+およびWCなどの
周期律表の4 a t 5 a pおよび6a族金属の
炭fヒ物、窒化物、酸化物、およびほう化物、並びにこ
れらの2種以上の固溶体からなる群のうちの1種または
2種以上を含有し、残りの主成分が硬質相としてのS
i 3N4あるいはサイアロン(αサイアロンおよび/
またはβサイアロンからなる)で構成されたSi3N4
基セラミックスまたはサイアロン基セラミックスを基体
とし、この基体の表面ニ、TiC、TiN s T1C
N 、 TiC0、TiCN0 + Al2O2゜およ
びAgNoのうちの1種の単層または2種以上の複層か
らなる硬質層を被覆してなる表面被覆セラミックス工具
が、切削工具や耐摩工具などとして用いられていること
は良く知られるところである。For example, TiC+TiN*TlB2+T+CN
O+ ZrN * ZrO2 + HfC * VC * Tooth C
* A group consisting of carbides, nitrides, oxides, and borides of metals in groups 4a, 5a, p and 6a of the periodic table, such as TaCr TaN 9Mo2C+ and WC, and solid solutions of two or more of these. Contains one or more of these, and the remaining main component is S as a hard phase.
i 3N4 or Sialon (α Sialon and/or
or β-sialon)
A base ceramic or a sialon base ceramic is used as a base, and the surface of this base is TiC, TiN s T1C.
A surface-coated ceramic tool coated with a hard layer consisting of a single layer or a multilayer of two or more of N, TiC0, TiCN0 + Al2O2°, and AgNo is used as a cutting tool, a wear-resistant tool, etc. It is well known that there are.
しかし、上記の従来表面被覆セラミックス工具は、これ
を切削工具や耐摩工具などとして実用(二供した場合、
硬質層に欠けや剥離を生じ易く、比較的短時間で使用寿
命に至るものであった。However, the above-mentioned conventional surface-coated ceramic tools can be put into practical use as cutting tools, wear-resistant tools, etc.
The hard layer was prone to chipping and peeling, and the service life was reached in a relatively short period of time.
そこで、本発明者等は、上記の従来表面被覆セラミック
ス工具に着目し、これを切削工具や耐摩工具として使用
した場合、これの使用寿命の延命化をはかるべく研究を
行なった結果、上記の従来表面被覆セラミックス工具(
二おいて、工具表面部(:欠けや剥離が生じるのは、基
体表面に1例えば化学蒸着法により硬質層を形成する際
に、基本表□4面部の主成分たるSi3N、あるいはナ
イアロン(St−M−0−N)E分解が起って、基体表
面部に脱窒層が形成されるようになるばかりでなく、硬
質層との界面にはボアが形成されるようになり、この結
果基体表面部の靭性が低下し、かつ硬質層の基体表面に
対する付着強度が低下するようになることに原因がある
ことが判明し、さらにこれらの結果をふまえて研究を行
なったところ一基体を上記のS f 3N4基セラミツ
クスあるいはサイアロン基セラミックスに特定すると共
(ニーこの表面(=被覆される硬質層をTiCe Ti
N * T1CN * TiC0+TiCN0 、 U
2O55*よびAgN0(7)うちの1種ノ単層または
2種以上の複層に特定した表面被覆セラミックス工具に
おいては、これに、10Kf/d以上の圧力を有するN
2雰囲気中、1100〜1650 ’Cの温度;二、5
〜60分間保持の条件で加熱加圧処理な抱すと、雰囲気
中のN2が硬質層を通して基体表面部に拡散し、基体表
面部に存在する遊離Siと反応してSi3N4を形成す
るため、脱窒層が消滅し。Therefore, the present inventors focused on the above-mentioned conventional surface-coated ceramic tools, and conducted research to extend the service life of the tools when used as cutting tools or wear-resistant tools. Surface-coated ceramic tools (
2) Chips and peeling occur on the tool surface (1) when forming a hard layer on the base surface by, for example, chemical vapor deposition, Si3N or Nylon (St- M-0-N)E decomposition occurs, and not only a denitrification layer is formed on the surface of the substrate, but also a bore is formed at the interface with the hard layer, and as a result, the substrate It was found that the cause was a decrease in the toughness of the surface and a decrease in the adhesion strength of the hard layer to the substrate surface. Based on these results, further research was conducted and one substrate was S f 3N4-based ceramics or sialon-based ceramics (knee) This surface (= the hard layer to be coated is TiCe Ti
N*T1CN*TiC0+TiCN0, U
For surface-coated ceramic tools specified as a single layer of one type or a multilayer of two or more types of 2O55* and AgN0 (7), N with a pressure of 10 Kf/d or more is added.
2 Temperature of 1100-1650'C in atmosphere; 2, 5
When heated and pressurized for ~60 minutes, N2 in the atmosphere diffuses to the surface of the substrate through the hard layer and reacts with free Si present on the surface of the substrate to form Si3N4, resulting in desorption. The nitrogen layer disappears.
かつSi3N4の形成による体積膨張によって微細なボ
アも消滅し、さらに比較的粗大なボアは雰囲気圧力によ
って消滅するようになることから、基体の表面部は基体
内部のもつ靭性と間等の靭性をもつようになると共に、
脱窒層およびボアの消滅によって硬質層の基体表面に対
する付着強度が著しく向上するようになり、この結果切
削工具や耐摩工具として実用に供した場合、欠けや剥離
の発生が著しく抑制されるようになって、すぐれた耐摩
耗性を示し、著しく長い使用寿命を確保することができ
るようになるという知見を得たのである。In addition, fine bores disappear due to volume expansion due to the formation of Si3N4, and relatively coarse bores disappear due to atmospheric pressure, so that the surface of the base has the same toughness as the inside of the base. As it becomes like this,
The disappearance of the denitrification layer and bore significantly improves the adhesion strength of the hard layer to the substrate surface, and as a result, when used as a cutting tool or wear-resistant tool, the occurrence of chipping and peeling is significantly suppressed. As a result, they have found that it exhibits excellent wear resistance and can ensure an extremely long service life.
この発明は、上記知見にもとづいてなされたものであっ
て、S i 3N4基セラミツクスまたはサイアロン基
セラミックスの基体表面を、TiC* TsN +T1
CN p TtCO# TtCNO# M2O3および
Ag N Oノうちの1種の単層または2種以上の複層
からなる硬質層で被覆してなる表面被覆セラミックス工
具に、10Kg/cm2以上の圧力を有するN2雰囲気
中、 1100〜1650℃の温度に、5〜60分保持
の条件で加熱加圧処理な捲すことによって、工具表面部
(二おける欠けや剥離の発生を抑制し、もってすぐれた
耐摩耗性を発揮せしめて、工具寿命の延命化をはかった
点は特徴を宵するものである。This invention was made based on the above knowledge, and the substrate surface of Si3N4-based ceramics or Sialon-based ceramics is coated with TiC* TsN +T1
CN p TtCO# TtCNO# N2 having a pressure of 10 Kg/cm2 or more is applied to a surface-coated ceramic tool coated with a hard layer consisting of a single layer or a multilayer of two or more of M2O3 and AgNO. By heating and pressurizing the tool by holding it at a temperature of 1100 to 1650°C for 5 to 60 minutes in an atmosphere, it suppresses the occurrence of chipping and peeling on the tool surface and provides excellent wear resistance. It is unique in that it extends the life of the tool by making the most of it.
つぎに、この発明の方法において、加熱加圧処理条件を
上記の通りに限定した理由を説明する。Next, the reason why the heating and pressurizing treatment conditions are limited as described above in the method of the present invention will be explained.
(a) 雰囲気圧力
雰囲気圧力が10Kg/cm2未満では、雰囲気中のN
2の硬質層を通しての基体表面部への拡散が遅く。(a) Atmospheric pressure If the atmospheric pressure is less than 10 kg/cm2, N in the atmosphere
Diffusion to the surface of the substrate through the hard layer of No. 2 is slow.
脱窒層やボアの消滅をはかるのに著しく長時間を要し、
実用的でないことから、その圧力を100Kg/cm2
以上と定めた。なお、現存する加熱加圧装置では200
0Kg/cm2までの加圧が可能である。It takes an extremely long time to eliminate the denitrification layer and bore,
Since it is not practical, the pressure was reduced to 100Kg/cm2.
The above was determined. In addition, with the existing heating and pressurizing equipment, 200
Pressurization up to 0 kg/cm2 is possible.
(b) 加熱温度
その温度が1100℃未満では、雰囲気圧力の場合と同
様に、雰囲気中のN2の硬質層を通しての拡散が遅く、
一方その温度が1650℃を越えると、N2拡散が活発
に起りすぎて硬質層に変質粗粒化が起り、かえって耐摩
耗性の劣1ヒをまねくようになることから、その温度を
1100〜1650℃と定めた。(b) Heating temperature When the temperature is less than 1100°C, the diffusion of N2 in the atmosphere through the hard layer is slow, as in the case of atmospheric pressure;
On the other hand, if the temperature exceeds 1,650°C, N2 diffusion occurs too actively, causing alteration and coarsening of the hard layer, which in turn leads to poor wear resistance. It was set as ℃.
(c) 保持時間
その時間が5分未満では、高温側加熱を行なったとして
も所望のN2拡散を満足して行なうことができず、一方
どのような条件下でも60分の保持時間で十分満足する
結果を得ることができることから、その時間を5〜60
分と定めた。(c) Holding time If the holding time is less than 5 minutes, the desired N2 diffusion cannot be achieved satisfactorily even if high-temperature heating is performed, whereas a holding time of 60 minutes is sufficient under any conditions. 5 to 60 hours since you can get the results you want.
It was set as 1 minute.
つぎに、この発明の方法を実権例により具体的(=説明
する。Next, the method of this invention will be specifically explained using actual examples.
実権例 1
セラミックス基体として、Si3N4粉末:96.5%
、MgO粉末:3%、S 102粉宋二0.5%からな
る配合組成をもった混合粉末より、1気圧のN2雰囲気
中、温度:1750℃に1時間保持の条件でホットプレ
スして製造したS i 3N4基セラミツクス切削工具
と、S i 3N4粉宋ニア6%、A/203粉末:5
%、Y2O3粉末:3%、 TiN粉末:15%、AJ
N粉末:1%からなる配合組成(以上重量%、以下%は
重1%を示す)をもった混合粉末より成形した圧粉体を
、1気田のN2雰囲気中、温度: 1800℃に2時間
保持の条件で普通焼結することによって製造したβサイ
アロン基セラミックス切削工具とを用意し、これらセラ
ミックス基体の表面に、通常の1ヒ学蒸着法を用い、そ
れぞれ第1表に示される組成および平均層厚の硬質層を
形成し、引続いて−これに同じく第1表に示される条件
で加熱加圧処理を施すことによって本発明法1〜8およ
び比較法1〜4をそれぞれ実権した。Actual example 1 Si3N4 powder: 96.5% as a ceramic substrate
, MgO powder: 3%, S 102 powder: 0.5%, by hot pressing at a temperature of 1750°C for 1 hour in an N2 atmosphere of 1 atm. S i 3N 4 based ceramic cutting tool and S i 3N 4 powder Songnia 6%, A/203 powder: 5
%, Y2O3 powder: 3%, TiN powder: 15%, AJ
A green compact formed from a mixed powder having a blend composition of 1% N powder (the above weight %, below % indicates weight 1%) was heated to 1,800°C in a N2 atmosphere for 2 hours. β-sialon-based ceramic cutting tools manufactured by normal sintering under time-holding conditions were prepared, and the compositions shown in Table 1 and Methods 1 to 8 of the present invention and comparative methods 1 to 4 were carried out by forming a hard layer having an average layer thickness and then subjecting it to heat and pressure treatment under the same conditions shown in Table 1.
なお、比較法1は従来製造法に相当する加熱加圧処理を
施さない場合を示し、また、比較法2〜4は、加熱加圧
処理条件のうちの少なくともいずれかの条件(第1表に
秦印を付した条件)がこの発明の範囲から外れた条件で
行なった場合を示す。Comparative method 1 shows the case where the heating and pressure treatment corresponding to the conventional manufacturing method is not performed, and comparative methods 2 to 4 show the case where at least one of the heating and pressing treatment conditions (see Table 1) is applied. Conditions marked with a square mark) are outside the scope of this invention.
つぎj:、上記本発明法1〜8および比較法1〜4によ
り得られた表面被覆セラミックス切削工員を、J I
S −5NP432の形状をもった切削スローアウェイ
チップとして用い、
被削材:Fe12の丸棒。Next, J I
Used as a cutting indexable tip with the shape of S-5NP432. Work material: Fe12 round bar.
切削速度: 350 m/min。Cutting speed: 350 m/min.
送り: 0.358/ rev、 切込み:2m。Feed: 0.358/rev, Depth of cut: 2m.
の条件での鋳鉄の乾式連続高速切削試験、並びに被剛材
:SNCM−8の角材−
切削速度:150渭/囚。Dry continuous high-speed cutting test of cast iron under the following conditions, and rigid material: SNCM-8 square material - Cutting speed: 150 mm/cm.
送り: 0.25W/ rev。Feed: 0.25W/rev.
切込み:1.5m 切削時間:Ilam。Depth of cut: 1.5m Cutting time: Ilam.
の条件での銅の乾式断続切削試験を行ない、前者の鋳鉄
の乾式連続高速切削試験では、切刃の逃げ面摩耗幅が0
.3■に至るまでの切削時間を測定することによって耐
摩耗性を評価し、後者の鋼の乾式断続切削試験では、1
0本の試験切刃数のうちの欠損発生数を測定することに
よって耐欠損性を評価した。これらの測定結果を第1表
に示した。In the former dry continuous high-speed cutting test of cast iron, the flank wear width of the cutting edge was 0.
.. Wear resistance was evaluated by measuring the cutting time up to 3■, and in the dry interrupted cutting test of the latter steel, 1
Fracture resistance was evaluated by measuring the number of fractures among the number of 0 test cutting edges. The results of these measurements are shown in Table 1.
実施例 2
セラミックス基体として、形状を直径:20ssφを有
するドローペンチ用プラグとする以外は、実施例1にお
けると同一の条件で製造したβサイアロン基セラミック
ス耐摩工具を用意し、これの表面(;、同じく化学蒸着
法を用い、平均層厚:0.5μmのTiNからなる下層
と、平均層厚=2μmのT1CNからなる上層とで構成
された硬質層を被覆し、ついで、これに圧カニ 200
Ky/d、温度=1300℃、保持時間=30分の条
件で加熱加圧処理な捲すことによって本発明法を実櫂し
た。Example 2 A β-sialon-based ceramic wear-resistant tool manufactured under the same conditions as in Example 1 was prepared, except that the shape was a plug for draw pliers having a diameter of 20 ssφ as the ceramic base, and the surface of this tool (; A hard layer consisting of a lower layer of TiN with an average layer thickness of 0.5 μm and an upper layer of T1CN with an average layer thickness of 2 μm is coated using a chemical vapor deposition method, and then a pressure crab 200 is applied to this.
The method of the present invention was carried out by heating and pressurizing and rolling under the conditions of Ky/d, temperature = 1300°C, and holding time = 30 minutes.
ついで、この本発明法によって製造された表面被覆セラ
ミックス耐摩工具としてのプラグと、上記の加熱加圧処
理を施さない以外は同一の条件で製造したプラグとを。Next, a plug as a surface-coated ceramic wear-resistant tool manufactured by the method of the present invention and a plug manufactured under the same conditions except that the heating and pressure treatment described above was not performed.
被加工材: 845C1 圧下率:30%、 肉厚:3鰭。Work material: 845C1 Rolling reduction rate: 30%, Thickness: 3 fins.
引抜き速度:15m/1lil。Pulling speed: 15m/1lil.
の条件で鋼管の引抜き加工に用い、摩耗によりプラグの
引抜き面があれで使用寿命に至るまでの加工管の長さを
測定したところ、前者の本発明法により製造されたプラ
グは1400mを示したのに対して、後者の加熱加圧処
理を行なわないプラグは、450mの加工長さで使用寿
命に至るものであった。When the plug was used for drawing steel pipe under the following conditions and the drawing surface of the plug was rough due to wear, the length of the processed pipe until the end of its service life was measured, and the former plug manufactured by the method of the present invention showed a length of 1400 m. On the other hand, the latter plug, which was not subjected to heat and pressure treatment, reached the end of its service life after a processing length of 450 m.
実施例1の第1表に示される結果から、それぞれ本発明
法1〜8によって製造された表面被覆セラミックス切削
工具としての切削スローアウェイチップは、いずれも加
熱処理を行なわない比較法1によって製造された切削ス
ローアウェイチップに比して、すぐれた耐摩耗性を示す
ばかりでなく、切刃における欠けや欠損の発生がなく、
耐欠損性にもすぐれていることが明らかである。From the results shown in Table 1 of Example 1, the cutting indexable tips as surface-coated ceramic cutting tools manufactured by methods 1 to 8 of the present invention, respectively, were manufactured by comparative method 1 without heat treatment. Compared to conventional cutting indexable inserts, this insert not only exhibits superior wear resistance, but also eliminates chipping and breakage on the cutting edge.
It is clear that it also has excellent fracture resistance.
一方比較例2〜4に見られるように、加熱加圧処理条件
のうちのいずれかの条件でもこの発明の範囲から外れる
と、所望のすぐれた耐摩耗性および耐欠損性を確保する
ことができないものである。On the other hand, as seen in Comparative Examples 2 to 4, if any of the heating and pressure treatment conditions deviates from the scope of the present invention, the desired excellent wear resistance and chipping resistance cannot be achieved. It is something.
また、実施例2に見られるように1本発明法にしたがっ
て加熱加圧処理を施した表面被覆セラミックス耐摩工具
としてのプラグは、これを権さないプラグに比して、著
しく長い使用寿命を示すようになることが明らかである
。In addition, as seen in Example 2, the plug as a surface-coated ceramic wear-resistant tool that has been subjected to heat and pressure treatment according to the method of the present invention has a significantly longer service life than the plug that does not have this process. It is clear that this will happen.
上述のように、この発明の方法によれば、基体表面部に
脱窒層が存在せず、かつ基体表面(二対する硬質層の付
着強度が良好な表面被覆セラミックス工具を製造するこ
とができ、これを切削工具や耐摩工具などとして実用(
二供した場合には、欠けや剥離の発生なく、すぐれた耐
摩耗性を示し、著しく長期に亘ってすぐれた性能を発揮
するなど工業上有用な効果がもたらされるのである。As described above, according to the method of the present invention, it is possible to produce a surface-coated ceramic tool in which there is no denitrification layer on the surface of the substrate and the hard layer has good adhesion strength to the substrate surface. This is put to practical use as cutting tools and wear-resistant tools (
When used for two or more times, it exhibits excellent abrasion resistance without chipping or peeling, and exhibits excellent performance over an extremely long period of time, resulting in industrially useful effects.
Claims (1)
クスの基体表面を、Tiの炭化物、窒化物、炭窒化物、
炭酸化物、および炭窒酸化物、並びにAlの酸化物およ
び窒酸化物のうちの1種の単層または2種以上の複層か
らなる硬質層で被覆してなる表面被覆セラミックス工具
に、100Kg/cm^2以上の圧力を有する窒素雰囲
気中、1100〜1650℃の温度に、5〜60分保持
の条件で加熱加圧処理を施すことを特徴とする表面被覆
セラミックス工具の製造法。The substrate surface of silicon nitride-based ceramics or sialon-based ceramics is coated with Ti carbide, nitride, carbonitride,
100 kg/ A method for manufacturing a surface-coated ceramic tool, characterized by subjecting it to a heating and pressure treatment at a temperature of 1100 to 1650° C. for 5 to 60 minutes in a nitrogen atmosphere having a pressure of cm^2 or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22542585A JPS6284905A (en) | 1985-10-09 | 1985-10-09 | Manufacture of surface coated ceramics tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22542585A JPS6284905A (en) | 1985-10-09 | 1985-10-09 | Manufacture of surface coated ceramics tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6284905A true JPS6284905A (en) | 1987-04-18 |
| JPH0335049B2 JPH0335049B2 (en) | 1991-05-24 |
Family
ID=16829168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22542585A Granted JPS6284905A (en) | 1985-10-09 | 1985-10-09 | Manufacture of surface coated ceramics tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6284905A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7675708B2 (en) * | 2003-07-28 | 2010-03-09 | Hitachi Metals, Ltd. | Substrate for thin-film magnetic head |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59232985A (en) * | 1983-06-16 | 1984-12-27 | 三菱マテリアル株式会社 | Surface coated sialon base ceramic tool member |
-
1985
- 1985-10-09 JP JP22542585A patent/JPS6284905A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59232985A (en) * | 1983-06-16 | 1984-12-27 | 三菱マテリアル株式会社 | Surface coated sialon base ceramic tool member |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7675708B2 (en) * | 2003-07-28 | 2010-03-09 | Hitachi Metals, Ltd. | Substrate for thin-film magnetic head |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0335049B2 (en) | 1991-05-24 |
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