JPS6284929U - - Google Patents

Info

Publication number
JPS6284929U
JPS6284929U JP17724185U JP17724185U JPS6284929U JP S6284929 U JPS6284929 U JP S6284929U JP 17724185 U JP17724185 U JP 17724185U JP 17724185 U JP17724185 U JP 17724185U JP S6284929 U JPS6284929 U JP S6284929U
Authority
JP
Japan
Prior art keywords
polishing plate
needle tip
wafer prober
tip polishing
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17724185U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17724185U priority Critical patent/JPS6284929U/ja
Publication of JPS6284929U publication Critical patent/JPS6284929U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図ａおよびｂは本考案によるウエーハプロ
ーバの針先研磨板部分の一実施例の断面図および
側面図、第２図ａおよびｂは本考案によるウエー
ハプローバの針先研磨板の他の実施例の斜視図お
よびＡ―Ａ′断面図、第３図は本考案のウエーハ
プローバの針先研磨板の他の実施例の斜視図およ
びＢ―Ｂ′断面図、第４図は本考案のウエーハプ
ローバの針先研磨板のさらに他の実施例の斜視図
、第５図は従来のウエーハプローバの斜視図であ
る。 ３……針先研磨板、４……溝。

Claims (1)

    【実用新案登録請求の範囲】
  1. 針先研磨板を備えたウエーハプローバにおいて
    、該針先研磨板の上面に溝を設けたことを特徴と
    するウエーハプローバ。
JP17724185U 1985-11-18 1985-11-18 Pending JPS6284929U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17724185U JPS6284929U (ja) 1985-11-18 1985-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17724185U JPS6284929U (ja) 1985-11-18 1985-11-18

Publications (1)

Publication Number Publication Date
JPS6284929U true JPS6284929U (ja) 1987-05-30

Family

ID=31118256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17724185U Pending JPS6284929U (ja) 1985-11-18 1985-11-18

Country Status (1)

Country Link
JP (1) JPS6284929U (ja)

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