JPS628530A - Method of mounting electronic device - Google Patents

Method of mounting electronic device

Info

Publication number
JPS628530A
JPS628530A JP60147838A JP14783885A JPS628530A JP S628530 A JPS628530 A JP S628530A JP 60147838 A JP60147838 A JP 60147838A JP 14783885 A JP14783885 A JP 14783885A JP S628530 A JPS628530 A JP S628530A
Authority
JP
Japan
Prior art keywords
resin
circuit board
element chip
sealed
powder resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60147838A
Other languages
Japanese (ja)
Inventor
Kenichiro Ryono
漁野 堅一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60147838A priority Critical patent/JPS628530A/en
Publication of JPS628530A publication Critical patent/JPS628530A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/682Shapes or dispositions thereof comprising holes having chips therein
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To seal an element chip with resin in a simple way and at a low cost, by depositing a thermosetting powder resin on a circuit board including the element chip so as to form a uniformly thick layer and selectively heating the powder resin on the regions of the circuit board to be sealed for melting and curing the resin. CONSTITUTION:A semiconductor element chip 2 is secured onto an insulating circuit board 1, and the chip 2 is electrically connected to a thin metallic film 3 on the circuit board 1 by means of metallic wires 4. Liquid resin 5 is dropped thereon. Further, powder resin 6 is deposited on the whole circuit board 1 and irradiated with laser beams 7 only in the region to be sealed. The powder resin 5 is thereby selectively heated and melted, while the melted liquid resin 8 is prevented from being overspread, by the non-heated powder resin 6. After the resin 8 is cured, the residual powder resin 6 is removed. Finally, the structure is heated so that the element is completely sealed with the cured resin 9.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電子装置の実装方法に関し、特に半導体素子チ
ップを樹脂封止する方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of mounting an electronic device, and particularly to a method of resin-sealing a semiconductor element chip.

〔従来の技術〕[Conventional technology]

従来、集積回路装置等の半導体素子チップを回路基板に
実装する方法として、回路基板に素子チップを固着しか
つ電気的接続を行った後、素子チップ等を直接成形内に
セットしてトランスファー成形により樹脂封止する方法
、或いは同様に素子チップを固着および電気接続した上
でチップを囲むように封止枠を取着し、その後この封止
枠内に熱硬化性樹脂を滴下して硬化させる枠ボフテング
方法、更には樹脂をスクリーン印刷する方法等が用いら
れている。
Conventionally, as a method for mounting semiconductor element chips such as integrated circuit devices on circuit boards, after fixing the element chips to the circuit board and making electrical connections, the element chips, etc. are directly set in molding, and transfer molding is performed. A resin sealing method, or a similar method in which the element chip is fixed and electrically connected, a sealing frame is attached to surround the chip, and then a thermosetting resin is dripped into the sealing frame and cured. A bofting method, a method of screen printing resin, etc. are used.

しかしながら、前者のトランスファー成形法では封止形
状が小さく出来ることから小型電子装置の封止法に通し
てい、るが、トランスファー成形機および成形型等の特
別な設備を必要とし、かつ成形型内への回路基板の搬入
、搬出等の工数が必要であり、しかも成形後にパリ取り
工程も必要とされる等、工数が多くかつ高価格になると
いう問題がある。
However, with the former transfer molding method, the sealing shape can be made small, so it has been used as a sealing method for small electronic devices, but it requires special equipment such as a transfer molding machine and a mold, and the This method requires many man-hours for loading and unloading the circuit board, and also requires a deburring process after molding, resulting in a large number of man-hours and a high price.

また、最後のスクリーン印刷法(特開昭58−2076
43号)では、スクリーン印刷時の圧力で電気的接続を
行っている金属細線が切断され或いは短絡され、更に素
子チップが損傷される等電子装置の信頼性が低下される
という問題がある。
Also, the last screen printing method (Japanese Unexamined Patent Publication No. 58-2076
No. 43), there is a problem in that the thin metal wires making electrical connections are cut or short-circuited due to the pressure during screen printing, and the reliability of the electronic device is reduced, such as damage to the element chips.

このため、特別の設備を必要とせず、かつ電子装置の信
頼性を低下することが少ない枠ポツテング法が、安価で
かつ小型の電子装置に用いられている。例えば、第2図
(a)〜(c)は従来のこの種の方法の一例であり、先
ず同図(a)のように、回路基板21表面に半導体素子
チップ22を固着した後、回路基板21表面に設けた金
属薄膜配線23と素子チップ22とを金属細線24で電
気的に接続する。そして、素子チップ22等を液状樹脂
25でプリコートした後、素子チップ22等を囲むよう
に封止枠26を取着する。
For this reason, the frame potting method, which does not require special equipment and does not reduce the reliability of electronic devices, is used for inexpensive and small-sized electronic devices. For example, FIGS. 2(a) to 2(c) are examples of conventional methods of this kind. First, as shown in FIG. 2(a), a semiconductor element chip 22 is fixed on the surface of a circuit board 21, and then the circuit board is The metal thin film wiring 23 provided on the surface of the element chip 21 and the element chip 22 are electrically connected by a thin metal wire 24. After precoating the element chip 22 and the like with the liquid resin 25, a sealing frame 26 is attached so as to surround the element chip 22 and the like.

その上で、同図(b)のように、この封止枠26内に封
止用の液状樹脂27を滴下し、同図(c)のように封止
枠26で周囲を規制した状態で液状樹脂を硬化させるこ
とにより、封止を完成している。
Then, as shown in the figure (b), liquid resin 27 for sealing is dripped into the sealing frame 26, and the surrounding area is regulated by the sealing frame 26 as shown in the figure (c). Sealing is completed by curing the liquid resin.

〔発明が解決しようとする問題点〕 上述した従来の枠ポツテング法では、前述のように特別
の設備を要せず、手軽に行えるという利点を有するもの
の、回路基板上に封止枠を取着するためのスペースが必
要とされるため、全体として封止寸法が大きくなり、例
えば電子腕時計のように特に小型化が要求される電子装
置の封止には適さないという問題がある。
[Problems to be Solved by the Invention] The conventional frame potting method described above has the advantage of not requiring any special equipment and is easy to perform as described above, but it is difficult to attach the sealing frame to the circuit board. Since a space is required for the sealing, the sealing size becomes large as a whole, and there is a problem in that it is not suitable for sealing an electronic device that particularly requires miniaturization, such as an electronic wristwatch.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の電子装置の封止方法は、封止形状を小さくしか
も簡単で安価に樹脂封止を行うために、素子チップを含
む回路基板上に熱硬化性の粉体樹脂を一様な厚さに堆積
する工程と、封止を行う回路基板箇所上の前記粉体樹脂
を選択的に加熱して溶融硬化させる工程と、残存する粉
体樹脂を除去する工程とを含む方法としている。
The method for encapsulating an electronic device of the present invention is to apply thermosetting powder resin to a uniform thickness on a circuit board containing an element chip in order to make the encapsulation shape small and to perform simple and inexpensive resin encapsulation. The method includes the steps of: depositing the powder resin on the circuit board portion to be sealed; selectively heating the powder resin on the circuit board portion to be sealed to melt and harden it; and removing the remaining powder resin.

〔実施例〕〔Example〕

次に、本発明を図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

第1図(a)〜(C)は本発明方法の一実施例を工程順
に説明する断面図であり、先ず、同図(a)のように、
セラミックやエポキシ等の絶縁性回路基板1上に半導体
素子チップ2を固着し、回路基板1表面に設けた金属薄
膜配線3と素子チップ2とをアルミニウムや金等の金属
細線4で電気的に接続する。そして、これら素子チン、
プ2や金属細線4を覆うように、液状樹脂5を滴下し、
所謂プリコートを形成している。その上で、回路基板1
の上面に粉体樹脂6を300〜2000μmの一様な厚
さで堆積させる。この粉体樹脂6は、エポキシ検出樹脂
が主に使用でき、150〜200℃付近で溶融し、その
後冷却すると固体となり硬化する熱硬化性のものが用い
られる。
FIGS. 1(a) to 1(C) are cross-sectional views explaining one embodiment of the method of the present invention in the order of steps. First, as shown in FIG. 1(a),
A semiconductor element chip 2 is fixed onto an insulating circuit board 1 made of ceramic, epoxy, etc., and the element chip 2 is electrically connected to a metal thin film wiring 3 provided on the surface of the circuit board 1 using a thin metal wire 4 made of aluminum, gold, etc. do. And these elements,
Drop the liquid resin 5 so as to cover the pipe 2 and the thin metal wire 4,
It forms a so-called precoat. On top of that, circuit board 1
Powdered resin 6 is deposited on the upper surface of the substrate to a uniform thickness of 300 to 2000 μm. The powder resin 6 can mainly be an epoxy detection resin, which is a thermosetting resin that melts at around 150 to 200° C. and then becomes solid and hardens when cooled.

次いで、同図(b)のように、封止を行う箇所、即ち素
子チップ2を含むできるだけ狭い領域上にレーザ光線や
赤外線等7を選択的に照射する。これにより、前記粉体
樹脂6は選択的に加熱されて溶融される。この時、溶融
した液状の樹脂8は、周辺に拡がろうとするが、前工程
で加熱されていない部分は樹脂6が粉体の状態に保たれ
ているので、溶融部分との境界の粉体樹脂が封止枠の役
目をしてその拡がりを防止する。
Next, as shown in FIG. 2B, laser beams, infrared rays, etc. 7 are selectively irradiated onto the area to be sealed, that is, the narrowest possible area including the element chip 2. As a result, the powder resin 6 is selectively heated and melted. At this time, the molten liquid resin 8 tries to spread to the surrounding area, but since the resin 6 is kept in a powder state in the parts that have not been heated in the previous process, the powder at the boundary with the molten part The resin acts as a sealing frame to prevent it from spreading.

しかる上で、樹脂8の硬化を待って残存する粉体樹脂5
を除去し、仕上げ加熱を行なえば、同図(c)のように
、硬化された樹脂9による封止が完成される。
After that, wait for the resin 8 to harden and remove the remaining powder resin 5.
is removed and finishing heating is performed to complete the sealing with the hardened resin 9, as shown in FIG. 9(c).

したがって、この方法では粉体樹脂6に封止枠の機能を
持たせて液状とされた熱硬化性樹脂8の周辺への拡がり
を規制しているので、素子チップの周囲に別部材の封止
枠を取着する必要はなく、そのための工程および回路基
板1上のスペースは不要となる。また、粉体樹脂6に光
を選択的に照射する等して選択的な加熱を行うだけで自
己整合的に封止枠を構成でき、以下液状樹脂を滴下する
だけでよいので、特別な装置を必要とすることもない。
Therefore, in this method, the powder resin 6 has the function of a sealing frame to restrict the spread of the liquid thermosetting resin 8 to the periphery, so a separate member is sealed around the element chip. There is no need to attach a frame, and the process and space on the circuit board 1 for this purpose are unnecessary. In addition, the sealing frame can be constructed in a self-aligning manner simply by selectively heating the powder resin 6 by selectively irradiating it with light, etc., and since it is only necessary to drop the liquid resin, special equipment is required. There is no need for it.

これにより、小さな電子装置の封止を容易にかつ安価に
行うことができる。
Thereby, small electronic devices can be easily and inexpensively sealed.

ここで、前記実施例では1個の素子チップを実装する場
合を説明したが、混成rcのように、複数個のICチッ
プ、抵抗、コンデンサ、コイル等を搭載した回路基板を
樹脂封止する場合にも同様に適用することができる。
Here, in the above embodiment, a case was explained in which one element chip was mounted, but when a circuit board mounted with multiple IC chips, resistors, capacitors, coils, etc., such as a hybrid RC, is sealed with resin. The same can be applied to

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、素子チップを含む回路基
板上に粉体樹脂を一様な厚さに堆積する工程と、封止を
行う回路基板箇所上の前記粉体樹脂を選択的に加熱して
溶融硬化させる工程と、残存する粉体樹脂を除去する工
程とを含んでいるので、粉体樹脂の封止枠機能によって
特別に封止枠を設けることなく液状樹脂の周辺への拡が
りを規制でき、特別な装置を要することなく、少ない工
程でかつ容易に樹脂封止を行うことができ、電子装置を
小型にかつ安価に封止−することができる。
As explained above, the present invention includes a step of depositing powder resin to a uniform thickness on a circuit board including an element chip, and selectively heating the powder resin on a portion of the circuit board to be sealed. This method includes a step of melting and hardening the resin, and a step of removing the remaining powder resin, so the sealing frame function of the powder resin prevents the liquid resin from spreading to the surrounding area without the need for a special sealing frame. It is possible to easily perform resin sealing in a small number of steps without requiring any special equipment, and electronic devices can be sealed in a small size and at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)〜(c)は本発明方法を工程順に説明する
ための断面図、第2図(a)〜(C)は従来方法を工程
順に説明するための断面図である。 1.21・・・回路基板、2.22・・・半導体素子チ
ップ、3,23・・・金属薄膜配線、4,24・・・金
属細線、5,25・・・プリコート、6・・・熱硬化性
の粉体樹脂、7・・・レーザ光線、8・・・溶融した液
状樹脂、9・・・硬化した樹脂、26・・・封止枠、2
7・・・液状樹脂1図(a) 第1図(C)
FIGS. 1(a) to (c) are sectional views for explaining the method of the present invention in the order of steps, and FIGS. 2(a) to (C) are sectional views for explaining the conventional method in the order of steps. 1.21... Circuit board, 2.22... Semiconductor element chip, 3, 23... Metal thin film wiring, 4, 24... Metal thin wire, 5, 25... Precoat, 6... Thermosetting powder resin, 7... Laser beam, 8... Molten liquid resin, 9... Hardened resin, 26... Sealing frame, 2
7...Liquid resin Figure 1 (a) Figure 1 (C)

Claims (1)

【特許請求の範囲】[Claims] 1、半導体素子チップを回路基板上に固着し所定の電気
的接続を行った上で、この素子チップ等を樹脂封止する
電子装置の実装方法において、前記素子チップを含む回
路基板上に熱硬化性の粉体樹脂を一様な厚さに堆積する
工程と、封止を行う回路基板箇所上の前記粉体樹脂を選
択的に加熱して溶融硬化させる工程と、残存する粉体樹
脂を除去する工程とを含むことを特徴とする電子装置の
実装方法。
1. In an electronic device mounting method in which a semiconductor element chip is fixed on a circuit board, predetermined electrical connections are made, and the element chip etc. is sealed with a resin, thermosetting is applied onto the circuit board containing the element chip. a step of depositing a uniform thickness of powdered resin, a step of selectively heating and melting the powdered resin on the portion of the circuit board to be sealed, and a step of removing the remaining powdered resin. A method for mounting an electronic device, comprising the steps of:
JP60147838A 1985-07-04 1985-07-04 Method of mounting electronic device Pending JPS628530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60147838A JPS628530A (en) 1985-07-04 1985-07-04 Method of mounting electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60147838A JPS628530A (en) 1985-07-04 1985-07-04 Method of mounting electronic device

Publications (1)

Publication Number Publication Date
JPS628530A true JPS628530A (en) 1987-01-16

Family

ID=15439391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60147838A Pending JPS628530A (en) 1985-07-04 1985-07-04 Method of mounting electronic device

Country Status (1)

Country Link
JP (1) JPS628530A (en)

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