JPS628629U - - Google Patents
Info
- Publication number
- JPS628629U JPS628629U JP9898985U JP9898985U JPS628629U JP S628629 U JPS628629 U JP S628629U JP 9898985 U JP9898985 U JP 9898985U JP 9898985 U JP9898985 U JP 9898985U JP S628629 U JPS628629 U JP S628629U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- mesh
- shutter
- optical path
- small protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000004907 flux Effects 0.000 claims 1
- 238000005286 illumination Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Shutters For Cameras (AREA)
Description
第１図は本考案の実施例を示すミラーシヤツタ
ーを備えたロータリーシヤツター装置の断面図、
第２図は第１図のミラーシヤツターの裏面図、第
３図は第１図のミラーシヤツターの肉抜き溝部の
詳細を示す突起付網目模様の拡大図、第４図は第
３図のＡ―Ａ断面拡大図、第５図は第１図に示す
ロータリーシヤツター装置を備えた投影型露光装
置の光学系配置図である。
〔主要部分の符号の説明〕、１…ミラーシヤツ
ター、１ａ…裏面、１ｂ…鏡面、８…開口部、９
…セクター部、９Ａ…肉抜き領域、１０…リブ、
１１…突起部、１２…肉抜き溝。
FIG. 1 is a sectional view of a rotary shutter device equipped with a mirror shutter showing an embodiment of the present invention;
Figure 2 is a back view of the mirror shutter in Figure 1, Figure 3 is an enlarged view of the mesh pattern with protrusions showing details of the lightening groove of the mirror shutter in Figure 1, and Figure 4 is the same as in Figure 3. FIG. 5, an enlarged cross-sectional view taken along line A--A, is a layout diagram of the optical system of a projection exposure apparatus equipped with the rotary shutter device shown in FIG. [Explanation of symbols of main parts], 1...Mirror shutter, 1a...Back surface, 1b...Mirror surface, 8...Opening, 9
... Sector portion, 9A... Lightening area, 10... Rib,
11... Protrusion, 12... Lightening groove.
Claims (1)
光路とに導くミラーシヤツターを有する露光装置
において、前記ミラーシヤツターの鏡面とは反対
側の裏面に、網目模様のリブと該リブによつて囲
まれた多数の網目状肉抜き溝とを形成すると共に
、前記各網目状肉抜き溝内のほぼ中央部分付近に
小突起を設け、該小突起の端面を鏡面加工の際の
取付け基準面と一致する如く構成したことを特徴
とする露光装置用ミラーシヤツター。 In an exposure apparatus having a mirror shutter that switches a light flux from an illumination light source and guides it to an exposure optical path and another optical path, a rib with a mesh pattern is provided on the back surface of the mirror shutter on the opposite side from the mirror surface. A large number of surrounded mesh-like lightening grooves are formed, and a small protrusion is provided near the center of each of the mesh-like lightening grooves, and the end surface of the small protrusion is used as a mounting reference surface during mirror finishing. A mirror shutter for an exposure device, characterized in that it is configured to match.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9898985U JPH0121557Y2 (en) | 1985-06-28 | 1985-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9898985U JPH0121557Y2 (en) | 1985-06-28 | 1985-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS628629U true JPS628629U (en) | 1987-01-19 |
| JPH0121557Y2 JPH0121557Y2 (en) | 1989-06-27 |
Family
ID=30967456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9898985U Expired JPH0121557Y2 (en) | 1985-06-28 | 1985-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0121557Y2 (en) |
-
1985
- 1985-06-28 JP JP9898985U patent/JPH0121557Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0121557Y2 (en) | 1989-06-27 |