JPS6286534U - - Google Patents
Info
- Publication number
- JPS6286534U JPS6286534U JP17856185U JP17856185U JPS6286534U JP S6286534 U JPS6286534 U JP S6286534U JP 17856185 U JP17856185 U JP 17856185U JP 17856185 U JP17856185 U JP 17856185U JP S6286534 U JPS6286534 U JP S6286534U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- low
- collecting
- organic
- inorganic materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009835 boiling Methods 0.000 claims 3
- 229910010272 inorganic material Inorganic materials 0.000 claims 2
- 239000011147 inorganic material Substances 0.000 claims 2
- 239000011368 organic material Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第１図は本考案の全体斜視図を示し、第２図は
本装置を上から見た平面図、第３図は側面断面図
、第４図は本装置の使用実施例を示す断面図であ
る。第１図〜第３図において１はウエーハ特取付
部、２は試料皿部、３は装置上方にあいている穴
、４はウエーハ等の着脱の際に容易に取り出せる
ようにあいている切り込みと溝である。
Fig. 1 shows an overall perspective view of the present invention, Fig. 2 is a plan view of the device seen from above, Fig. 3 is a side sectional view, and Fig. 4 is a sectional view showing an example of the use of the device. be. In Figures 1 to 3, 1 is a wafer special attachment part, 2 is a sample tray part, 3 is a hole in the upper part of the device, and 4 is a notch to allow easy removal of a wafer, etc. It's a groove.
Claims (1)
リコンウエーハ等の表面上に効率良く採取する装
置であつて、すり合せにより分割される試料を収
容する試料皿と、該試料皿中の低沸点揮発成分を
採取する試料採取板が載置されるウエーハ取付部
とを有し、該試料の密閉加熱を行なえることを特
徴とする有機、無機材料中の低沸点揮発成分採取
装置。 A device that efficiently collects low-boiling volatile components from organic and inorganic materials onto the surface of a silicon wafer, etc., which includes a sample dish that accommodates a sample to be divided by grinding, and a low-boiling volatile component in the sample dish. 1. An apparatus for collecting low boiling point volatile components in organic and inorganic materials, comprising a wafer mounting part on which a sample collecting plate for collecting the sample is mounted, and capable of sealing and heating the sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17856185U JPS6286534U (en) | 1985-11-20 | 1985-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17856185U JPS6286534U (en) | 1985-11-20 | 1985-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6286534U true JPS6286534U (en) | 1987-06-02 |
Family
ID=31120807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17856185U Pending JPS6286534U (en) | 1985-11-20 | 1985-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6286534U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012154718A (en) * | 2011-01-25 | 2012-08-16 | Fujitsu Ltd | Spectral analysis method and sampling unit for spectral analysis |
| JP2012194063A (en) * | 2011-03-16 | 2012-10-11 | Fujitsu Ltd | Analytical method and analyzer for plasticizer in resin |
-
1985
- 1985-11-20 JP JP17856185U patent/JPS6286534U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012154718A (en) * | 2011-01-25 | 2012-08-16 | Fujitsu Ltd | Spectral analysis method and sampling unit for spectral analysis |
| JP2012194063A (en) * | 2011-03-16 | 2012-10-11 | Fujitsu Ltd | Analytical method and analyzer for plasticizer in resin |
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