JPS6286958U - - Google Patents
Info
- Publication number
- JPS6286958U JPS6286958U JP17692985U JP17692985U JPS6286958U JP S6286958 U JPS6286958 U JP S6286958U JP 17692985 U JP17692985 U JP 17692985U JP 17692985 U JP17692985 U JP 17692985U JP S6286958 U JPS6286958 U JP S6286958U
- Authority
- JP
- Japan
- Prior art keywords
- melt
- slim rod
- pipe
- manufacturing apparatus
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Silicon Compounds (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は第１図の装置の主要部分を示す斜視図、第３
図は本考案の他の実施例を示す主要部分の断面図
である。
１０，１００…石英管、１２，１２…石英管ホ
ルダー、１４…ルツボ、１６…融液、１８…加熱
ヒータ。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a perspective view showing the main parts of the device in Figure 1;
The figure is a sectional view of the main parts showing another embodiment of the present invention. 10,100...quartz tube, 12,12...quartz tube holder, 14...crucible, 16...melt, 18...heater.
Claims (1)
少なくとも一方に開口を有するとともに、その内
側形状が製造すべきスリムロツドの形状に対応し
ている管手段と、 該管手段の開口側が前記溶融体内に浸漬するよ
うに複数の管手段を保持するホルダー手段と、 前記溶融体に加えられている圧力と前記管手段
内の圧力との差を制御して管手段内に溶融体や導
入する圧力制御手段とを具備することを特徴とす
るスリムロツド製造装置。 (2) 前記溶融体は、ドープ材を含むシリコンの
溶融体である実用新案登録請求の範囲第１項記載
のスリムロツド製造装置。 (3) 前記管手段は石英によつて形成されている
実用新案登録請求の範囲第１項又は第２項のいず
れかに記載のスリムロツド製造装置。[Scope of claims for utility model registration] (1) A storage means for storing a melt of the subject material;
tube means having an opening on at least one side and whose inner shape corresponds to the shape of the slim rod to be manufactured; and holder means for holding a plurality of tube means such that the open side of the tube means is immersed in the melt. and pressure control means for controlling the difference between the pressure applied to the melt and the pressure within the pipe means to introduce the melt into the pipe means. (2) The slim rod manufacturing apparatus according to claim 1, wherein the melt is a silicon melt containing a dopant. (3) The slim rod manufacturing apparatus according to claim 1 or 2, wherein the pipe means is made of quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17692985U JPS6286958U (en) | 1985-11-19 | 1985-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17692985U JPS6286958U (en) | 1985-11-19 | 1985-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6286958U true JPS6286958U (en) | 1987-06-03 |
Family
ID=31117647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17692985U Pending JPS6286958U (en) | 1985-11-19 | 1985-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6286958U (en) |
-
1985
- 1985-11-19 JP JP17692985U patent/JPS6286958U/ja active Pending
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