JPS6287440U - - Google Patents
Info
- Publication number
- JPS6287440U JPS6287440U JP17960285U JP17960285U JPS6287440U JP S6287440 U JPS6287440 U JP S6287440U JP 17960285 U JP17960285 U JP 17960285U JP 17960285 U JP17960285 U JP 17960285U JP S6287440 U JPS6287440 U JP S6287440U
- Authority
- JP
- Japan
- Prior art keywords
- clampers
- probe card
- actuator
- guide
- fixing mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 8
- 230000007246 mechanism Effects 0.000 claims 6
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案による実施例の構成図、第２
図はクランパ２の外観図。
１……プローブカード、２……クランパ、３…
…ガイド、４……リンク、５……アクチユエータ
、６……溝、７……ガイド穴、８……位置決め用
穴、９……ガイドピン。
Figure 1 is a configuration diagram of an embodiment according to this invention, Figure 2
The figure is an external view of the clamper 2. 1...probe card, 2...clamper, 3...
... Guide, 4 ... Link, 5 ... Actuator, 6 ... Groove, 7 ... Guide hole, 8 ... Positioning hole, 9 ... Guide pin.
補正 昭６１．２．２１
図面の簡単な説明を次のように補正する。
明細書第７ページ第１０行と第１１行の間に次
の文を追加する。
「第３図はプローブガード１をクランパ２で保
持した状態図。」Amendment February 21, 1980 The brief description of the drawing is amended as follows. Add the following sentence between lines 10 and 11 on page 7 of the specification. ``Figure 3 shows the state in which the probe guard 1 is held by the clamper 2.''
Claims (1)
７を設けた２個のクランパ２と、クランパ２の溝
６を対向させてガイド穴７に挿入するガイド３と
、２個のクランパ２の端部を連結するリンク４と
、クランパ２の一つに連結したアクチユエータ５
とをもつ固定機構１０と、 プローブカード１の位置決め用穴８に挿入する
ガイドピン９をもち、固定機構１０に対して前後
進および上下動をする搬送機構２０とを備え、 ガイドピン９に挿入したプローブカード１を搬
送機構２０で固定機構１０の位置に搬送し、アク
チユエータ５でクランパ２の間を開き、搬送機構
２０でプローブカード１をクランパ２の間に移動
させ、アクチユエータ５を駆動してクランパ２を
閉じ、プローブカード１を溝６で固定することを
特徴とするプローブカードの着脱機構。[Claim for Utility Model Registration] Two clampers 2 provided with a groove 6 and a guide hole 7 into which the probe card 1 can be inserted, a guide 3 inserted into the guide hole 7 with the grooves 6 of the clampers 2 facing each other, and the two clampers 2. A link 4 connecting the ends of the clampers 2, and an actuator 5 connected to one of the clampers 2.
A fixing mechanism 10 having a guide pin 9 inserted into the positioning hole 8 of the probe card 1, and a transport mechanism 20 that moves forward and backward and up and down with respect to the fixing mechanism 10, and is inserted into the guide pin 9. The probe card 1 is transferred to the position of the fixing mechanism 10 by the transfer mechanism 20, the space between the clampers 2 is opened by the actuator 5, the probe card 1 is moved between the clampers 2 by the transfer mechanism 20, and the actuator 5 is driven. A probe card attaching/detaching mechanism characterized in that a clamper 2 is closed and a probe card 1 is fixed in a groove 6.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17960285U JPH037955Y2 (en) | 1985-11-21 | 1985-11-21 | |
| US06/928,502 US4721198A (en) | 1985-11-13 | 1986-11-07 | Probe card clamping and changing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17960285U JPH037955Y2 (en) | 1985-11-21 | 1985-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6287440U true JPS6287440U (en) | 1987-06-04 |
| JPH037955Y2 JPH037955Y2 (en) | 1991-02-27 |
Family
ID=31122805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17960285U Expired JPH037955Y2 (en) | 1985-11-13 | 1985-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037955Y2 (en) |
-
1985
- 1985-11-21 JP JP17960285U patent/JPH037955Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037955Y2 (en) | 1991-02-27 |
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