JPS6288008A - Multi-degree-of-freedom spatial microtremor mechanism - Google Patents
Multi-degree-of-freedom spatial microtremor mechanismInfo
- Publication number
- JPS6288008A JPS6288008A JP22700285A JP22700285A JPS6288008A JP S6288008 A JPS6288008 A JP S6288008A JP 22700285 A JP22700285 A JP 22700285A JP 22700285 A JP22700285 A JP 22700285A JP S6288008 A JPS6288008 A JP S6288008A
- Authority
- JP
- Japan
- Prior art keywords
- base
- moving table
- links
- degree
- connection part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
- B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
- B23Q1/545—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces
- B23Q1/5462—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces with one supplementary sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Program-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
- B25J9/0015—Flexure members, i.e. parts of manipulators having a narrowed section allowing articulation by flexion
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Control Of Position Or Direction (AREA)
- Manipulator (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は空間的な動きを行う多自由度機構に係り、とく
にサブミクロンオーダの精度にて位置決めするのに好適
な多自由度空間微動機構に関するものである。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a multi-degree-of-freedom mechanism that performs spatial movement, and particularly relates to a multi-degree-of-freedom spatial fine movement mechanism suitable for positioning with submicron order accuracy. It is something.
従来、空間的な動きを行なう多自由度機構に関しては、
たとえば、ヤングおよびり−によるｒフィーシビリテイ
スタデイオブアプラットフォームタイプオブロボティ
ックマニピュシーターズフロムアキネマチック ビュー
ポイント（Ｆ ｅａｓｉｂｉＨｔｙ Ｓ ｔｕｄｙ
ｏｆ ａ Ｐ １ａｔｆｏｒ１１Ｔｙｐｅ ｏｆ
Ｒｏｂｏｔｉｃ Ｍａｎｉｐｕｌａｔｏｒｓ
ｆｒｏ＋ａ ａＫｉｎａ＋５ａｔｉｃ Ｖｉｅｗｐ
ｏｉｎｔ） Ｊ ＡＳＭＥペーパ８３−Ｄ Ｅ Ｔ −
３５，１９８３にスチュアート・プラットフォームにつ
いて論ぜられている。この論文には、たとえば第７図に
示す如く、ベース１と移動台２とを６個のリンク３１乃
至３６によって連結されており。Conventionally, regarding multi-degree-of-freedom mechanisms that perform spatial movements,
For example, the Feasibiility Study of a Platform Type of Robotic Manipulators from a Kinematic Viewpoint by Young and Ri.
of aP 1atfor11Type of
Robotic Manipulators
fro+a aKina+5atic Viewp
oint) J ASME Paper 83-D E T -
35, 1983, discusses the Stuart platform. In this paper, for example, as shown in FIG. 7, a base 1 and a movable table 2 are connected by six links 31 to 36.
これら６個のリンク３１乃至３６は夫々中央部のアクチ
ュエータ４１乃至４６にて長さ方向を調整可能になって
おり、かつ両端部とベース１および移動台２とを球対偶
５１ａ、５１ｂ乃至５６ａ、５６ｂを介して連結し、移
動台２の空間的な位置および姿勢を自由に変化可能に構
成されたものと略同様なものが記載されている。These six links 31 to 36 can be adjusted in the length direction by actuators 41 to 46 in the center, respectively, and both ends are connected to the base 1 and the movable table 2 by ball pairs 51a, 51b to 56a, 56b, and is configured to be able to freely change the spatial position and posture of the moving table 2.
しかるに上記の多自由度空間移動機構に使用されている
球対偶５１ａ乃至５６ａおよび５１ｂ乃至５６ｂの構成
では、球部の外周面とこの外周面を摺動する摺動面との
間の間隙および両者の加工誤差などにより、たとえアク
チュエータ４１乃至４６を高精度に形成してこれに接続
するリンク３１乃至３６の端部の球対偶５１ａ、５１ｂ
乃至５６ａ、５６ｂの球部の軸心方向位置を一定に保持
させたとしても球部の中心位置と、これの外周面を摺動
する摺動面すなわちベース１もしくは移動台２の揺動中
心位置との間にズレを発生する。そのため、サブミクロ
ンオーダの精度で移動台２の位置および姿勢を制御する
ことが困難である。However, in the configuration of the ball pairs 51a to 56a and 51b to 56b used in the above-mentioned multi-degree-of-freedom spatial movement mechanism, the gap between the outer circumferential surface of the sphere and the sliding surface that slides on this outer circumferential surface, and the gap between the two. Due to machining errors, even if the actuators 41 to 46 are formed with high precision, the ball pair 51a, 51b at the end of the links 31 to 36 connected to the actuators 41 to 46 may be formed with high precision.
Even if the axial positions of the spherical parts of 56a and 56b are held constant, the center position of the spherical part and the sliding surface that slides on the outer peripheral surface thereof, that is, the swing center position of the base 1 or the movable table 2. A discrepancy occurs between the two. Therefore, it is difficult to control the position and orientation of the movable table 2 with accuracy on the order of submicrons.
本発明は前記従来の欠点を除去し、簡単な構成で小形化
を可能としかつ移動台の位置および姿勢をサブミクロン
オーダの精度で制御可能とする多自由度空間微動機構を
提供することにある。An object of the present invention is to provide a multi-degree-of-freedom spatial fine movement mechanism that eliminates the above-mentioned conventional drawbacks, enables miniaturization with a simple configuration, and enables control of the position and orientation of a moving table with submicron order precision. .
本発明はｉ「記の目的達成するため、ベースおよび移動
台と長さ方向調整機構を有する複数個のリンクの両端部
とを一体に連結し、上記複数個のリンク両端部付近に上
記ベースおよび移動台よりも剛性を低くして球対偶機能
を有する接続部を設けたことを特徴とするものである。In order to achieve the object of the present invention, a base and a moving platform are integrally connected to both ends of a plurality of links having longitudinal adjustment mechanisms, and the base and the movable table are connected near both ends of the plurality of links. It is characterized by having a connection part that has lower rigidity than the moving table and has a ball-to-coupling function.
以下１本発明の一実施例を示す第１図および第２図につ
いて説明する。第１図は本発明による多自由度空間微動
機構を示す斜視図、第２図は第１図に示す接続部の拡大
図、第３図は第１図に示すアクチュエータの拡大断面図
である。1 and 2 showing an embodiment of the present invention will be explained below. FIG. 1 is a perspective view showing a multi-degree-of-freedom spatial fine movement mechanism according to the present invention, FIG. 2 is an enlarged view of the connecting portion shown in FIG. 1, and FIG. 3 is an enlarged sectional view of the actuator shown in FIG. 1.
同図において、６はベース、７は移動台、８１−ａ乃至
８６ａおよび８１ｂ乃至８６ｂは２個一対で合計１２個
からなるリンクにして、夫々外方先端部を上記ベース６
および移動台７に一体になるように固嵌し、その外方先
端部付近に巾方向中心線０−０′と対称にその両端部に
同一形状をした２個の切欠穴１０ａ、１０ｂを穿設して
これら２個の切欠穴１０ａ。In the same figure, 6 is a base, 7 is a moving table, 81-a to 86a and 81b to 86b are pairs of links, 12 in total, and the outer tip of each link is connected to the base 6.
It is firmly fitted into the moving table 7 as one body, and two notched holes 10a and 10b having the same shape are bored at both ends of the moving table 7, symmetrically with respect to the center line 0-0' in the width direction, near the outer tip of the moving table 7. These two cutout holes 10a are provided.
１０ｂ間の巾Ｗを細く形成し、これによってこの部分の
剛性を上記ベース６および移動台７よりも小さくした接
続部９を有している。１１乃至１６は６個の７クチユエ
ータにして夫々筒状をしてその一端部を開口し、その他
端部に一方のリンク８１ａ乃至８６ａまたは８１ｂ乃至
８６ｂの後端部を螺着するアクチュエータ本体１１ａ乃
至１６ａと、このアクチュエータ本体１１ａ乃至１６ａ
内に遊嵌し、外周面に上記アクチュエータ本体１１ａ乃
至１６ａの内周面に介挿する電極１１ｃ乃至１６ｃを固
定する電圧素子１１ｂ乃至１６ｂと、この圧電端子１１
ｂ乃至１６ｂの外方端部に一端部を接続し、他端部に他
方のリンク８１ｂ乃至８６ｂまたは８１ａ乃至８６ａの
後端部を螺着する取付部ｌｉｄ乃至１６ｄとから形成さ
れ、上記電極１１Ｃ乃至１６ｃに電圧を印加したとき、
圧電素子１１ｂ乃至１６ｂ、アクチュエータ本体１１ａ
乃至１６ａおよび取付部ｌｉｄ乃至１６ｄを介してリン
ク８１ａ乃至８６ａおよび８１ｂ乃至８６ｂの長さを微
動させる如くしている。なお図示していないが各リンク
８１ａ乃至８６ｂおよび８１ｂ乃至８６ｂにはその長さ
を検出する変位検出器が取付けられている。The connecting portion 9 has a width W between the portions 10b that is narrow, thereby making the rigidity of this portion smaller than that of the base 6 and the movable table 7. Actuator bodies 11a to 16 each have a cylindrical shape and have one end open, and the rear end of one of the links 81a to 86a or 81b to 86b is screwed to the other end. 16a, and this actuator body 11a to 16a
Voltage elements 11b to 16b that are loosely fitted into the inner circumference and fix electrodes 11c to 16c inserted on the inner circumferential surface of the actuator bodies 11a to 16a on the outer circumferential surface, and the piezoelectric terminal 11
one end is connected to the outer end of the electrodes 11C to 16b, and attachment parts lid to 16d are screwed to the other ends to screw the rear ends of the other links 81b to 86b or 81a to 86a. When voltage is applied to 16c to 16c,
Piezoelectric elements 11b to 16b, actuator body 11a
The lengths of the links 81a to 86a and 81b to 86b are slightly moved via the attachment parts lid to 16d. Although not shown, a displacement detector is attached to each link 81a to 86b and 81b to 86b to detect the length thereof.
本発明による自由度空間微動機構は前記の如く構成され
ているから、移動台２よりリンク８１ａ乃至８６ａおよ
び８１ｂ乃至８６ｂに力が加わると、接続部９が変形し
て第２図に２点鎖線にて示す如く揺動するので、接続部
９はその巾方向中心線○−○′上の中心点を中心点０１
にして回ねり対偶を形成する。Since the degree-of-freedom spatial fine movement mechanism according to the present invention is constructed as described above, when force is applied from the moving table 2 to the links 81a to 86a and 81b to 86b, the connecting portion 9 is deformed, as shown in the chain double-dashed line in FIG. Since the connection part 9 swings as shown in , the center point on the center line ○-○' in the width direction is the center point 01
to form a turning pair.
またリンク８１ａ乃至８６ａおよび８１ｂ乃至８６ｂに
その中心線０−ｏ′を中心点０１にして回動させる力が
加わると、リンク８１ａ乃至８６ａおよび８１ｂ乃至８
６ｂは回動するので、接続部９は球対偶を形成する。Further, when a force is applied to the links 81a to 86a and 81b to 86b to rotate them with their center lines 0-o' as the center point 01, the links 81a to 86a and 81b to 86b
Since 6b rotates, the connecting portion 9 forms a pair of balls.
さらにアクチュエータ１１乃至１６によりリンク８１ａ
乃至８６ａおよび８１ｂ乃至８６ｂの長さを微動したと
き、接続部９の巾方向中心線０−○′上の中心点ＯＩを
中心にして曲げられてねじり変形をしつつ移動台７の位
置および姿勢を制御するので、接続部９は前記第７図に
示す球対偶と同一機能を行なう。Further, the actuators 11 to 16 actuate the link 81a.
When the lengths of 86a to 86a and 81b to 86b are slightly moved, the position and posture of the movable table 7 is bent and torsionally deformed about the center point OI on the width direction center line 0-○' of the connecting portion 9. Therefore, the connecting portion 9 performs the same function as the ball pair shown in FIG. 7.
すなわち、上記接続部９は、弾塑性変形によす球対偶の
機能を等価的に実現させることができる。In other words, the connecting portion 9 can equivalently realize the function of a pair of spheres through elastic-plastic deformation.
また弾塑性変形のさい接続部９の中心位置０旨ま常に一
定に保持されるので、高精度で移動台２の位置および姿
勢を制御することができる。Further, since the center position 0 of the connecting portion 9 is always kept constant during elastic-plastic deformation, the position and attitude of the movable table 2 can be controlled with high precision.
これに加えてベース６、移動台７．リンク８１ａ乃至８
６ａおよび８１ｂ乃至８６ｂ、接続部９がすべて一体に
構成され、アクチュエータ１１乃至１６にて連結されて
いるので、構成が簡単で小形化にすることができ、かつ
操作が容易である。In addition to this, a base 6, a moving platform 7. Links 81a to 8
6a and 81b to 86b and the connecting portion 9 are all integrally constructed and connected by the actuators 11 to 16, so the construction is simple and compact, and the operation is easy.
なお前記の実施例においては、各リンクの接続部を巾方
向に２個の切欠穴にて形成した場合について述べたが、
これに限定されるものでなく、例えば第４図に示す如く
、接続部９′を円形状の細径１７にしたり第５図に示す
如くリンク１８の接続部９′を間隙１８ａを有する如く
２個に分割し、これらのリンク１８を細径の丸棒１８ｂ
にて接続したり。In the above embodiment, a case was described in which the connecting portion of each link was formed with two notched holes in the width direction.
However, the present invention is not limited to this. For example, as shown in FIG. 4, the connecting portion 9' may be made circular with a small diameter 17, or as shown in FIG. These links 18 are divided into small diameter round rods 18b.
Connect at.
第６図に示す如く、リンク１９の接続部９′にベース６
および移動台７よりも剛性の低い材質から形成された部
材１９ａを介挿したりすることも可能である。As shown in FIG. 6, the base 6
It is also possible to insert a member 19a made of a material with lower rigidity than the moving table 7.
以上述べたる如く１本発明によれば、ベース。 As described above, one aspect of the present invention is a base.
移動台、リンクおよび接続部がすべて一体に構成され、
アクチュエータにて連結されているので、構成が簡単で
小形化にすることができかつ操作が容易である。The moving platform, links and connecting parts are all integrated,
Since they are connected by an actuator, the structure is simple and compact, and the operation is easy.
また上記接続部が弾塑性変形により球対偶の機能を等価
的に実現させることができ、かつ弾塑性変形のさい、接
続部の中心位置を常に一定に保持することができるので
、サブミクロンオーダの精度で移動台の位置および姿勢
を制御することができる。In addition, the above-mentioned connecting part can equivalently realize the function of a ball-to-couple through elastic-plastic deformation, and the center position of the connecting part can always be kept constant during elastic-plastic deformation. The position and attitude of the moving platform can be controlled with precision.
図面のＷＪ、ｉｉＬな説明
第１図は本発明の一実施例を示す多自由度空間微動機構
の斜視図、第２図は第１図に示す接続部の拡大図、第３
図は第１図に示すアクチュエータの拡大断面図、第４図
は第１図に示す接続部の他の一実施例を示す斜視図、第
５図は第１図に示す接続部のさらに他の一実施例を示す
斜視図、第６図は第１図に示す接続部のさらに他の一実
施例を示す斜視図、第７図は従来の多自由度空間移動機
構を示す斜視図である。WJ, iiL description of the drawings FIG. 1 is a perspective view of a multi-degree-of-freedom spatial fine movement mechanism showing one embodiment of the present invention, FIG. 2 is an enlarged view of the connection part shown in FIG. 1, and FIG.
The figures are an enlarged sectional view of the actuator shown in Fig. 1, Fig. 4 is a perspective view showing another embodiment of the connection part shown in Fig. 1, and Fig. 5 is a further embodiment of the connection part shown in Fig. 1. FIG. 6 is a perspective view showing still another embodiment of the connecting portion shown in FIG. 1, and FIG. 7 is a perspective view showing a conventional multi-degree-of-freedom space movement mechanism.
１．６・・・ベース、２，７・・・移動台、３１〜３６
．８１ａ 〜８６ ａ 、 ８１ ｂ −８６ｂ−リン
ク、 １１＝−１６，４１〜４６・・・アクチュエータ
、５１ａ〜５６ｂ、 ５１ｂ〜５６ｂ・・・球対偶、９
．９’、９’、９”−・・接続部、１０ａ、 １０ｂ−
切欠穴。1.6...Base, 2,7...Moving table, 31-36
．． 81a-86a, 81b-86b-link, 11=-16, 41-46... actuator, 51a-56b, 51b-56b... ball pair, 9
．． 9', 9', 9''--Connection part, 10a, 10b-
Notched hole.
１１〜１６・・・アクチュエータ。11-16...actuator.
代理人弁理士 秋 本 正 実 弟 １ 図 第 ２ 図Representative Patent Attorney Minoru Aki Hon Younger brother 1 diagram Figure 2
Claims (1)
数個のリンクの両端部を一体に連結し、上記複数個のリ
ンクの両端部付近に上記ベースおよび移動台よりも剛性
を低くして球対偶機能を有する接続部を設けたことを特
徴とする多自由度空間微動機構。 ２、前記長さ方向調整機構は圧電素子に設けた電極に電
圧を印加したとき、圧電で素子が長さ方向に微動するよ
うに構成されていることを特徴とする特許請求の範囲第
１項記載の多自由度空間微動機構。[Claims] 1. Both ends of a plurality of links having longitudinal adjustment mechanisms are integrally connected to a base and a movable table, and a base and a movable table are provided near both ends of the plurality of links than the base and the movable table. A multi-degree-of-freedom spatial fine movement mechanism characterized by having a connection part with low rigidity and a ball-to-coupling function. 2. The length direction adjustment mechanism is configured such that when a voltage is applied to an electrode provided on the piezoelectric element, the element moves slightly in the length direction by piezoelectricity. The described multi-degree-of-freedom spatial microtremor mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60227002A JPH06105416B2 (en) | 1985-10-14 | 1985-10-14 | Multi-DOF space fine movement mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60227002A JPH06105416B2 (en) | 1985-10-14 | 1985-10-14 | Multi-DOF space fine movement mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6288008A true JPS6288008A (en) | 1987-04-22 |
| JPH06105416B2 JPH06105416B2 (en) | 1994-12-21 |
Family
ID=16853967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60227002A Expired - Lifetime JPH06105416B2 (en) | 1985-10-14 | 1985-10-14 | Multi-DOF space fine movement mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06105416B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63226709A (en) * | 1987-03-17 | 1988-09-21 | Hitachi Constr Mach Co Ltd | Fine positioning device |
| JPS63305410A (en) * | 1987-06-08 | 1988-12-13 | Hitachi Constr Mach Co Ltd | Fine positioning device |
| WO2002045903A1 (en) * | 2000-12-08 | 2002-06-13 | Renault Automation Comau | Machine-tool in particular with parallel architecture accommodating deformed articulations |
| WO2007069667A1 (en) * | 2005-12-15 | 2007-06-21 | Tokyo Institute Of Technology | Elastic joint device |
| JP2009237535A (en) * | 2008-03-25 | 2009-10-15 | Hon Hai Precision Industry Co Ltd | Imaging apparatus |
| CN107414787A (en) * | 2017-03-24 | 2017-12-01 | 中国科学院长春光学精密机械与物理研究所 | A kind of 6 SPS configuration Six Degree-of-Freedom Parallel Platforms for preventing supporting leg rotation |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49101812A (en) * | 1973-01-31 | 1974-09-26 | ||
| JPS5052230A (en) * | 1973-09-01 | 1975-05-09 | ||
| JPS588052A (en) * | 1981-07-07 | 1983-01-18 | Sumitomo Chem Co Ltd | Preparation of phenyl isocyanate compound |
| JPS6052230A (en) * | 1983-09-02 | 1985-03-25 | Omron Tateisi Electronics Co | Minutely moving stage mechanism |
| JPS60155394A (en) * | 1984-01-25 | 1985-08-15 | 住友電気工業株式会社 | Wrist mechanism of robot |
-
1985
- 1985-10-14 JP JP60227002A patent/JPH06105416B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49101812A (en) * | 1973-01-31 | 1974-09-26 | ||
| JPS5052230A (en) * | 1973-09-01 | 1975-05-09 | ||
| JPS588052A (en) * | 1981-07-07 | 1983-01-18 | Sumitomo Chem Co Ltd | Preparation of phenyl isocyanate compound |
| JPS6052230A (en) * | 1983-09-02 | 1985-03-25 | Omron Tateisi Electronics Co | Minutely moving stage mechanism |
| JPS60155394A (en) * | 1984-01-25 | 1985-08-15 | 住友電気工業株式会社 | Wrist mechanism of robot |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63226709A (en) * | 1987-03-17 | 1988-09-21 | Hitachi Constr Mach Co Ltd | Fine positioning device |
| JPS63305410A (en) * | 1987-06-08 | 1988-12-13 | Hitachi Constr Mach Co Ltd | Fine positioning device |
| WO2002045903A1 (en) * | 2000-12-08 | 2002-06-13 | Renault Automation Comau | Machine-tool in particular with parallel architecture accommodating deformed articulations |
| FR2817784A1 (en) * | 2000-12-08 | 2002-06-14 | Renault Automation Comau | MACHINE TOOL, PARTICULARLY WITH A PARALLEL ARCHITECTURE HAVING DEFORMATION ARTICULATIONS AND ADAPTED DEFORMATION ARTICULATION |
| WO2007069667A1 (en) * | 2005-12-15 | 2007-06-21 | Tokyo Institute Of Technology | Elastic joint device |
| JP2009237535A (en) * | 2008-03-25 | 2009-10-15 | Hon Hai Precision Industry Co Ltd | Imaging apparatus |
| CN107414787A (en) * | 2017-03-24 | 2017-12-01 | 中国科学院长春光学精密机械与物理研究所 | A kind of 6 SPS configuration Six Degree-of-Freedom Parallel Platforms for preventing supporting leg rotation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06105416B2 (en) | 1994-12-21 |
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