JPS629263A - エッチング制御装置 - Google Patents

エッチング制御装置

Info

Publication number
JPS629263A
JPS629263A JP60148952A JP14895285A JPS629263A JP S629263 A JPS629263 A JP S629263A JP 60148952 A JP60148952 A JP 60148952A JP 14895285 A JP14895285 A JP 14895285A JP S629263 A JPS629263 A JP S629263A
Authority
JP
Japan
Prior art keywords
metal
etching
inspected
etching solution
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60148952A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518057B2 (fr
Inventor
Katsuo Akasegawa
勝雄 赤瀬川
Masato Yamamoto
正人 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP60148952A priority Critical patent/JPS629263A/ja
Publication of JPS629263A publication Critical patent/JPS629263A/ja
Publication of JPH0518057B2 publication Critical patent/JPH0518057B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
JP60148952A 1985-07-05 1985-07-05 エッチング制御装置 Granted JPS629263A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60148952A JPS629263A (ja) 1985-07-05 1985-07-05 エッチング制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60148952A JPS629263A (ja) 1985-07-05 1985-07-05 エッチング制御装置

Publications (2)

Publication Number Publication Date
JPS629263A true JPS629263A (ja) 1987-01-17
JPH0518057B2 JPH0518057B2 (fr) 1993-03-10

Family

ID=15464322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60148952A Granted JPS629263A (ja) 1985-07-05 1985-07-05 エッチング制御装置

Country Status (1)

Country Link
JP (1) JPS629263A (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58162853A (ja) * 1982-03-23 1983-09-27 Toshiba Corp 腐食速度判定装置
JPS60117142A (ja) * 1983-11-30 1985-06-24 Toshiba Corp 金属の腐食速度測定方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58162853A (ja) * 1982-03-23 1983-09-27 Toshiba Corp 腐食速度判定装置
JPS60117142A (ja) * 1983-11-30 1985-06-24 Toshiba Corp 金属の腐食速度測定方法

Also Published As

Publication number Publication date
JPH0518057B2 (fr) 1993-03-10

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Legal Events

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EXPY Cancellation because of completion of term