JPS629536B2 - - Google Patents

Info

Publication number
JPS629536B2
JPS629536B2 JP3482683A JP3482683A JPS629536B2 JP S629536 B2 JPS629536 B2 JP S629536B2 JP 3482683 A JP3482683 A JP 3482683A JP 3482683 A JP3482683 A JP 3482683A JP S629536 B2 JPS629536 B2 JP S629536B2
Authority
JP
Japan
Prior art keywords
synthetic quartz
silica
gas
fluorine
groups
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3482683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59162143A (ja
Inventor
Haruo Okamoto
Katsuya Sawada
Shohei Sekikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP3482683A priority Critical patent/JPS59162143A/ja
Publication of JPS59162143A publication Critical patent/JPS59162143A/ja
Publication of JPS629536B2 publication Critical patent/JPS629536B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Compositions (AREA)
  • Silicon Compounds (AREA)
JP3482683A 1983-03-03 1983-03-03 合成石英の製造方法 Granted JPS59162143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3482683A JPS59162143A (ja) 1983-03-03 1983-03-03 合成石英の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3482683A JPS59162143A (ja) 1983-03-03 1983-03-03 合成石英の製造方法

Publications (2)

Publication Number Publication Date
JPS59162143A JPS59162143A (ja) 1984-09-13
JPS629536B2 true JPS629536B2 (lt) 1987-02-28

Family

ID=12425000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3482683A Granted JPS59162143A (ja) 1983-03-03 1983-03-03 合成石英の製造方法

Country Status (1)

Country Link
JP (1) JPS59162143A (lt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001247317A (ja) * 1999-12-27 2001-09-11 Shin Etsu Chem Co Ltd 合成石英ガラス及びその製造方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0835848A3 (en) * 1996-08-21 1998-06-10 Nikon Corporation Fluorine-containing silica glass, its method of manufacture and a projection exposure apparatus comprising the glass
JP4663860B2 (ja) * 2000-09-06 2011-04-06 株式会社オハラ 光学部材用合成石英ガラスおよび合成石英ガラスの製造方法
US6698247B2 (en) * 2001-05-04 2004-03-02 Corning Incorporated Method and feedstock for making silica by flame combustion
JP5987514B2 (ja) * 2012-07-13 2016-09-07 Dic株式会社 ２相共連続型シリカ構造体及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001247317A (ja) * 1999-12-27 2001-09-11 Shin Etsu Chem Co Ltd 合成石英ガラス及びその製造方法

Also Published As

Publication number Publication date
JPS59162143A (ja) 1984-09-13

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