JPS6297979U - - Google Patents

Info

Publication number
JPS6297979U
JPS6297979U JP19161185U JP19161185U JPS6297979U JP S6297979 U JPS6297979 U JP S6297979U JP 19161185 U JP19161185 U JP 19161185U JP 19161185 U JP19161185 U JP 19161185U JP S6297979 U JPS6297979 U JP S6297979U
Authority
JP
Japan
Prior art keywords
particle beam
stopper
line
intersection
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19161185U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19161185U priority Critical patent/JPS6297979U/ja
Publication of JPS6297979U publication Critical patent/JPS6297979U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図は本考案の装置の一実施例の説明図であ
る。 1はビームライン、3はビームストツパー駆動
装置、5はビームストツパー、7はガラス窓、8
は赤外線カメラを示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 粒子ビームが透過可能なビームストツパーを荷
    電粒子ビームラインに対し直交する方向に移動し
    得るよう配設し、該ビームストツパーと前記ビー
    ムラインの交叉点の斜め側方に赤外線観測器を設
    置してなることを特徴とする粒子ビームモニタリ
    ング装置。
JP19161185U 1985-12-11 1985-12-11 Pending JPS6297979U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19161185U JPS6297979U (ja) 1985-12-11 1985-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19161185U JPS6297979U (ja) 1985-12-11 1985-12-11

Publications (1)

Publication Number Publication Date
JPS6297979U true JPS6297979U (ja) 1987-06-22

Family

ID=31145910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19161185U Pending JPS6297979U (ja) 1985-12-11 1985-12-11

Country Status (1)

Country Link
JP (1) JPS6297979U (ja)

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