JPS6310013Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a vibration-proof floor frame for a precision factory.

In precision factories such as semiconductor manufacturing factories, there are processes (precision manufacturing equipment) that require floor vibration to be reduced to the submicron level. On the other hand, with the recent remarkable development of semiconductor products, changes in production lines and precision manufacturing equipment have become significant, and there is a need for flexibility to be able to freely deal with these changes.

By the way, conventional anti-vibration measures include building the floor structure with high overall rigidity in consideration of future changes;
A method is used in which the floor structure is built in a normal economical structure and a foundation made of concrete or the like is built for each mounting frame for precision manufacturing equipment.

In addition, recently, the floor structure has been made into a normal economical structure, and the floor parts that require vibration isolation are rigidly connected to the floor structures on the lower and upper floors using connecting materials such as metal poles, thereby reducing the mass and range of the vibration system. It has been considered to increase the vibration energy, thereby reducing the initial amplitude at the time of impact and damping the vibration energy.

However, the first method is disadvantageous in terms of economic efficiency as the utilization rate of the building is low and the building is expensive. This requires extensive remodeling work, which incurs large construction costs each time, resulting in long-term production interruptions.

In addition, in the third method, a considerable amount of strength is required for the connecting materials, resulting in a situation similar to installing additional columns, and if a strong impact is applied, it will spread to other floors and have a negative impact, so this should be done as much as possible. In order to reduce the number of floors, it is necessary to connect the tie materials to as many floors as possible, which has the disadvantage of reducing the utilization rate of space on other floors and hindering work.

The present invention takes these matters into consideration and aims to economically and easily construct a floor structure with high vibration isolation properties.

Therefore, in the present invention, the floor structure is constructed using a normal economical structure, and the middle part of the beam of the floor part that requires vibration isolation is
The beams on the upper or lower floors are connected by a vibration isolating device consisting of a vibration isolating spring and a connecting member, and the effective span is substantially shortened to increase the beam rigidity.

The illustrated embodiment will be described below.

Figures 1 to 3 show the first embodiment, and in the figures, 1... is the floor slab of each floor, 2... is the beam of each floor, 3... is the column of each floor, and 4 is the floor slab of each floor. This is a vibration isolating device consisting of a vibration isolating spring and a connecting member interposed between the beams of the upper and lower floors.

The floor slabs 1... and beams 2... on each floor are of the normal economical floor structure A..., that is, a simple floor structure with relatively low rigidity that is adopted in general factories, and the upper floors that require vibration isolation. A plurality of anchor bolts 21... are planted under the beam in the middle part of the beam 2 in the floor structure of the lower floor, and the anchor bolts 21... are placed on the middle part of the beam 2 in the floor structure of the lower floor, facing the anchor bolts 21... A plurality of anchor bolts 21... are installed.

The vibration isolator 4 consists of a coil spring 41 as a vibration isolator 4a, a base plate 42 as a connecting member 4b, a steel pole 43, a screw rod 44, nuts 45, 45, and seat plates 46, 46. Through hole 4
A support piece 422 having a flange 431 is provided protrudingly provided, and a plurality of through-holes 423 for attachment corresponding to the anchor bolts 21 are arranged around the support piece. A plurality of through holes 432 for attachment are arranged on the flange in correspondence with the anchor bolts 21, a spring frame 433 is fixed to the upper end, and a through hole 434 is provided at the center of the tip of the spring frame. The coil spring 41 is housed inside the spring frame 433, and its base end is fixed to the base end of the spring frame, and its tip is movable to connect the base end of the screw rod 44, and the screw rod is attached to the spring frame. The seat plate 4
6 and 46 are set in size and shape to correspond to the base plate 42 and the flange 431 of the steel pole 43, and at the same time, the anchor bolts 2
Through holes 461..., corresponding to 1..., 21...,
461... is drilled.

Then, the base plate 42 is assembled together with the seat plate 46 into the anchor bolts 21 of the beam 2 on the upper floor, and is fixed by tightening with the nuts 22.
are installed together with the seat plate 46 into the anchor bolts 21...on the beams 2 on the lower floor, and are tightened and fixed with the nuts 22... to construct the building.

Next, nuts 45,4 of the screw rod 44
5 to adjust the tension or pressing force of the coil spring 41. This tension or compression force is
A few tens to a few hundred kilograms is suitable.

4 to 6 are examples of FIG. 2,
In this case, in the previous example, the vibration isolating spring 4a of the vibration isolating device 4 is provided on the base plate 42 side.

Therefore, the spring frame 4 is attached to the base plate 42.
A spring frame 425 having a through hole 424 similar to that of 33 is provided upside down, and a coil spring 4 is installed in the spring frame.
1 is installed inside the vibration isolating spring 4a, the base end is fixed to the tip of the spring frame, and the base end of the screw rod 44 is movable and inverted, and the screw rod is loosely inserted into the vibration isolating spring. It passes through the hole 424 and projects downward, and a supporting piece 436 having a through hole 435 similar to the supporting piece 422 is provided upside down at the upper end of the steel pole 43.
The tip of the screw rod 44 is connected to the through hole 4 of the support piece.
35 and is fastened to the support piece by nuts 45, 45. The seat plate 46 is omitted on the base plate 42 side.

The rest is almost the same as the previous example, so it will be omitted.

In addition, in the above-mentioned embodiment, the base plate 42
is fixed to the beam 2 on the upper floor, but it is also possible to reverse the direction and fix it on the beam on the lower floor. Also,
The anti-vibration spring 4a may be installed in the middle of the steel pole 43, or a wire or the like may be used instead of the steel pole. Furthermore, the floor structure of the lower floor may be a dirt floor.

According to the present invention, the middle part of the beam of the floor section that requires vibration isolation is connected to the beam on the upper or lower floor using vibration isolation springs and connecting members, so the amplitude of vibrations applied to that floor section can be reduced by vibration isolation. It can be significantly reduced by the spring, and the natural frequency of the floor part can be changed by the vibration isolation spring to eliminate resonance with precision manufacturing equipment, so even if the floor structure is an ordinary economical structure. It can provide excellent vibration isolation, and since it is only necessary to connect the beams on the floor with the beams on the upper or lower floors using vibration isolation springs and connecting members, the structure is extremely simple and easy to install, and the production line and Even when the precision manufacturing equipment is changed, the mounting positions of the vibration isolating spring and the connecting member can be changed in accordance with the change, and the positions can be easily changed.

Therefore, construction costs are low for both construction and modification, making it highly economical, providing the flexibility to deal with changes freely, eliminating long-term production interruptions during changes, and increasing the utilization rate of the building. , it is possible to achieve the intended purpose without having any adverse effects on or being adversely affected by other floors, and is extremely effective and appropriate in practice.

[Brief explanation of drawings]

The drawings show embodiments of the present invention; FIG. 1 is a schematic diagram of the configuration of the first embodiment, FIGS. 2 and 3 are enlarged cross-sectional front views of the main parts of the same example, and FIG. 5 and 6 are enlarged cross-sectional front views of the main parts of the second embodiment. 1... Floor slab, 2... Beam, 3... Column, 4... Vibration isolator, 4a... Vibration isolating spring, 4b... Connection member.

Claims (1)

[Scope of utility model registration request] A precision factory prevention system characterized in that the floor structure is built using a normal economical structure, and the middle part of the beam of the floor section that requires vibration isolation is connected to the beam on the upper or lower floor using vibration isolation springs and connecting members. Shaking bed frame.