JPS63100735U - - Google Patents
Info
- Publication number
- JPS63100735U JPS63100735U JP1986194751U JP19475186U JPS63100735U JP S63100735 U JPS63100735 U JP S63100735U JP 1986194751 U JP1986194751 U JP 1986194751U JP 19475186 U JP19475186 U JP 19475186U JP S63100735 U JPS63100735 U JP S63100735U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- frame
- mask
- pellicle frame
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986194751U JPS63100735U (cs) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986194751U JPS63100735U (cs) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63100735U true JPS63100735U (cs) | 1988-06-30 |
Family
ID=31152013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986194751U Pending JPS63100735U (cs) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100735U (cs) |
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1986
- 1986-12-18 JP JP1986194751U patent/JPS63100735U/ja active Pending