JPS6310084U

JPS6310084U -

Info

Publication number: JPS6310084U
Application number: JP10313386U
Authority: JP
Priority date: 1986-07-07
Filing date: 1986-07-07
Publication date: 1988-01-22

Description

[Brief explanation of drawings]

第１図は本考案の真空吸着パツドの一実施例を
示し、縦断面を模式的に描いた説明図である。第
２図は従来例の真空吸着パツドの側面図を示し、
同図Ａは吸着作動していない状態、同図Ｂは吸着
作動している状態である。１……従来例の吸着パツド、２……被吸着物、
４……比較的硬い材料で構成した管状部材、４ａ
……厚肉の大径部、４ｂ……リング状の溝、５…
…柔軟で弾性に富む材料で構成した筒状部材、５
ａ……内フランジ状の突条、６……ヒータ。 FIG. 1 shows an embodiment of the vacuum suction pad of the present invention, and is an explanatory diagram schematically depicting a vertical cross section. Figure 2 shows a side view of a conventional vacuum suction pad.
Figure A shows a state where the suction operation is not performed, and Figure B shows a state where the suction operation is performed. 1... Conventional suction pad, 2... Object to be adsorbed,
4...Tubular member made of relatively hard material, 4a
...Thick walled large diameter part, 4b...Ring-shaped groove, 5...
...A cylindrical member made of a flexible and highly elastic material, 5
a... Inner flange-like protrusion, 6... Heater.

Claims

[Claims for Utility Model Registration] 1. A ring groove is provided on the outer periphery of the tip of a tubular member made of a relatively hard material, and an inner flange is provided on the inner peripheral surface of the cylindrical member made of a flexible and highly elastic material. a cylindrical member is externally fitted onto the tubular member by providing a protrusion of the shape of the ring groove and engaging the protrusion with the ring groove;
A vacuum suction pad for IC transport, characterized in that the tip of the cylindrical member projects beyond the tip of the tubular member by a dimension of 0.05 mm or more and 1 mm or less. 2. The vacuum suction pad for IC transport according to claim 1, wherein the tubular member is made of a material with good thermal conductivity and is equipped with a heater.