JPS63102768U - - Google Patents
Info
- Publication number
- JPS63102768U JPS63102768U JP19655386U JP19655386U JPS63102768U JP S63102768 U JPS63102768 U JP S63102768U JP 19655386 U JP19655386 U JP 19655386U JP 19655386 U JP19655386 U JP 19655386U JP S63102768 U JPS63102768 U JP S63102768U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- beam source
- heater
- cylindrical part
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図はこの考案の一実施例を示す分子線源発
生装置の断面図、第２図は従来の分子線源発生装
置の断面図である。
図において、１は分子線源、２は分子線源るつ
ぼ、３はキヤツプ部、４は円筒部、５はヒータ、
６は熱輻射防止板、７は熱電対、９は溝である。
なお、各図中の同一符号は同一または相当部分を
示す。
FIG. 1 is a sectional view of a molecular beam source generator showing an embodiment of this invention, and FIG. 2 is a sectional view of a conventional molecular beam source generator. In the figure, 1 is a molecular beam source, 2 is a molecular beam source crucible, 3 is a cap part, 4 is a cylindrical part, 5 is a heater,
6 is a heat radiation prevention plate, 7 is a thermocouple, and 9 is a groove.
Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
と、この分子線源るつぼに収容された分子線源と
、前記分子線源るつぼに装着されたヒータと、こ
のヒータの輻射熱を反射させる熱輻射防止板と、
前記分子線源るつぼの温度を測定する熱電対とか
らなり、前記ヒータにより前記分子線源ルツボを
加熱昇温せしめることにより前記分子線源より分
子線を発生させる分子線源発生装置において、前
記キヤツプ部と円筒部との付け根の前記円筒部内
周上外壁に溝を形成し、この溝内に前記ヒータの
一部を収納したことを特徴とする分子線源発生装
置。 A molecular beam source crucible consisting of a cap part and a cylindrical part, a molecular beam source housed in the molecular beam source crucible, a heater attached to the molecular beam source crucible, and a thermal radiation prevention device that reflects the radiant heat of the heater. board and
In the molecular beam source generation device, the device includes a thermocouple for measuring the temperature of the molecular beam source crucible, and generates a molecular beam from the molecular beam source by heating and increasing the temperature of the molecular beam source crucible with the heater. A molecular beam source generating device characterized in that a groove is formed in the upper outer wall of the inner periphery of the cylindrical part at the base of the cylindrical part and the cylindrical part, and a part of the heater is housed in the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19655386U JPS63102768U (en) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19655386U JPS63102768U (en) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102768U true JPS63102768U (en) | 1988-07-04 |
Family
ID=31155482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19655386U Pending JPS63102768U (en) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102768U (en) |
-
1986
- 1986-12-19 JP JP19655386U patent/JPS63102768U/ja active Pending