JPS6310549U - - Google Patents
Info
- Publication number
- JPS6310549U JPS6310549U JP1986105081U JP10508186U JPS6310549U JP S6310549 U JPS6310549 U JP S6310549U JP 1986105081 U JP1986105081 U JP 1986105081U JP 10508186 U JP10508186 U JP 10508186U JP S6310549 U JPS6310549 U JP S6310549U
- Authority
- JP
- Japan
- Prior art keywords
- preheating tube
- reactor
- preheating
- blind plate
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986105081U JPS6310549U (da) | 1986-07-09 | 1986-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986105081U JPS6310549U (da) | 1986-07-09 | 1986-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310549U true JPS6310549U (da) | 1988-01-23 |
Family
ID=30979172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986105081U Pending JPS6310549U (da) | 1986-07-09 | 1986-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310549U (da) |
-
1986
- 1986-07-09 JP JP1986105081U patent/JPS6310549U/ja active Pending
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