JPS63106141U - - Google Patents
Info
- Publication number
- JPS63106141U JPS63106141U JP19948186U JP19948186U JPS63106141U JP S63106141 U JPS63106141 U JP S63106141U JP 19948186 U JP19948186 U JP 19948186U JP 19948186 U JP19948186 U JP 19948186U JP S63106141 U JPS63106141 U JP S63106141U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- wafers
- pitch
- wafer
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 12
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Stacking Of Articles And Auxiliary Devices (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19948186U JPH064586Y2 (ja) | 1986-12-26 | 1986-12-26 | ウエハー移し替え装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19948186U JPH064586Y2 (ja) | 1986-12-26 | 1986-12-26 | ウエハー移し替え装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63106141U true JPS63106141U (2) | 1988-07-08 |
| JPH064586Y2 JPH064586Y2 (ja) | 1994-02-02 |
Family
ID=31161146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19948186U Expired - Lifetime JPH064586Y2 (ja) | 1986-12-26 | 1986-12-26 | ウエハー移し替え装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064586Y2 (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023073741A (ja) * | 2021-11-16 | 2023-05-26 | 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック | 基板移載装置 |
-
1986
- 1986-12-26 JP JP19948186U patent/JPH064586Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023073741A (ja) * | 2021-11-16 | 2023-05-26 | 株式会社Ｓｃｒｅｅｎ Ｓｐｅ テック | 基板移載装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH064586Y2 (ja) | 1994-02-02 |
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