JPS63113301A - Non-contact displacement measurement method - Google Patents
Non-contact displacement measurement methodInfo
- Publication number
- JPS63113301A JPS63113301A JP25946486A JP25946486A JPS63113301A JP S63113301 A JPS63113301 A JP S63113301A JP 25946486 A JP25946486 A JP 25946486A JP 25946486 A JP25946486 A JP 25946486A JP S63113301 A JPS63113301 A JP S63113301A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical fiber
- measured
- distance
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 9
- 238000000691 measurement method Methods 0.000 title claims description 7
- 239000013307 optical fiber Substances 0.000 claims abstract description 69
- 238000000034 method Methods 0.000 claims description 5
- 230000001419 dependent effect Effects 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 239000000835 fiber Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、被測定物との距離の測定を非接触により行
なう非接触変位測定方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a non-contact displacement measuring method for measuring the distance to an object to be measured in a non-contact manner.
一般に、被測定物との距離の測定を非接触により行なう
場合、たとえば第４図に示すような光ファイバを利用し
た測定が行なわれており、投光用光ファイバ（１）の先
端と受光用光ファイバ（２）の先端とが被測定物（３）
の表面から同−距離になるよう。Generally, when measuring the distance to the object to be measured in a non-contact manner, measurement is carried out using an optical fiber as shown in Fig. 4. The tip of the optical fiber (2) is the object to be measured (3)
so that they are at the same distance from the surface of
両光ファイバ（１） 、 （２＋を配設し、投光用光フ
ァイバ（υにより被測定物（３）の表面に光を投射し、
被測定物（３）の表面からの反射光を受光用光ファイバ
（２）により受光し、受光用光ファイバ（２］の受光量
にもとづき２両光フアイバ（１，１、（２）の先端と被
測定物（３）の表面との距離りを導出している。Both optical fibers (1) and (2+ are installed, and the light is projected onto the surface of the object to be measured (3) using the light projection optical fiber (υ).
The light reflected from the surface of the object to be measured (3) is received by the receiving optical fiber (2), and the tips of the two optical fibers (1, 1, (2) are adjusted based on the amount of light received by the receiving optical fiber (2). The distance between the surface of the object to be measured (3) and the surface of the object to be measured (3) is derived.
このとき、両光ファイバ（１） 、 （２）の先端と被
測定物（３）の表面との距離りが小さい場合、第５図（
ａ）に示すように、投光用光ファイバ（１）による被測
定物（３）の表面における光の投射スポラｌ−（Ｓ）と
、受光用光ファイバ（２７による被測定物（３）の表面
における受光視野（Ｒ）とが重なることはなく、同図（
ｂ）−ｇらには（ｅ）に示すように、距離りが大きくな
るに連れ。At this time, if the distance between the tips of both optical fibers (1) and (2) and the surface of the object to be measured (3) is small, as shown in Fig. 5 (
As shown in a), the projection spora l-(S) of light on the surface of the object to be measured (3) by the light emitting optical fiber (1) and the projection spora l-(S) of the light on the surface of the object to be measured (3) by the light receiving optical fiber (27). The light-receiving field of view (R) on the surface does not overlap, as shown in the same figure (
b) - g as shown in (e), as the distance increases.
投射スポラ） （Ｓ）と受光視野（Ｒ）との重なりが次
第に大きくなるため、距ｉＤと受光用光ファイバ（２）
の受光量との関係は第６図中の実線に示すようになり、
距離りの増加に伴う投射スポラ） （Ｓ）と受光視野（
Ｒ）との重なりの増加により、受光用光ファイバ（２）
の受光量は次第に増加するが、距離りがある程度以上に
なると、反射光の減衰が大きくなって受光用光ファイバ
（２）の受光量は次第に減少する。Since the overlap between the projection spora) (S) and the receiving field of view (R) gradually increases, the distance iD and the receiving optical fiber (2)
The relationship between the amount of light received and the amount of light received is shown by the solid line in Figure 6,
As the distance increases, the projection spora) (S) and the receiving field of view (S)
Due to the increased overlap with R), the receiving optical fiber (2)
The amount of light received by the light-receiving optical fiber (2) gradually increases, but when the distance exceeds a certain level, the attenuation of the reflected light increases and the amount of light received by the light-receiving optical fiber (2) gradually decreases.
従って、被測定物（３）と同一反射率のテストピースに
対する前記したような距離と受光量との関係を予め求め
ておけば、当該関係曲線上の実際の被測定物（３）から
の反射光の受光量に相当する点から、両党ファイバ（１
） 、 （２１の先端と被測定物（３）の表面との距Ｈ
Ｄを容易に導出できることになる。Therefore, if the relationship between the distance and the amount of light received is determined in advance for a test piece with the same reflectance as the object to be measured (3), then the actual reflection from the object to be measured (3) on the relationship curve can be calculated in advance. From the point that corresponds to the amount of light received, both party fibers (1
), (distance H between the tip of 21 and the surface of the object to be measured (3)
This means that D can be easily derived.
そして、このような光ファイバを利用した測定方法の利
点として、たとえば投射光月光源に可視光レーザなどの
単一波長のコヒーレント光源を用いた場合に、分解能が
波長程度（”；０．１μｍ）となって距離検出精度は非
常に高くなり、しかも装膜が小型でかつ軽量な構成とな
り、取り扱いが容易になるなどの点が挙げられる。An advantage of such a measurement method using an optical fiber is that, for example, when a coherent light source with a single wavelength such as a visible laser is used as the projection light source, the resolution is on the order of a wavelength (0.1 μm). As a result, distance detection accuracy is extremely high, and the coating is small and lightweight, making it easy to handle.
しかし、この場合、被測定物（３）の反射率が異なれば
、前記したような距離と受光量との関係も変化し、たと
えば反射率が第６図中の実線の場合よりも大きいと、距
離と受光量との関係曲線は、同図中の１点鎖線のように
同図中の実線の場合よりも縦軸の受光量の正方向に全体
的に変位し、反射率が同図中の実線の場合よりも小さい
と、距離と受光量との関係曲線は、同図中の２点鎖線の
ように縦軸の負方向に全体的に変位するため、たとえば
被測定物（３）の表面性状が変化して反射率が途中で変
化するような場合に、反射率の変化により受光量が変化
したききに、実際には距離は変わらずに反射率が変化し
たために生じた受光量の変化であっても、距離の変化と
してしか検出できず、表面性状が一様でない被測定物（
３）との距離の測定知は適用できないことになり、応用
性に欠けるという問題点がある。However, in this case, if the reflectance of the object to be measured (3) differs, the relationship between the distance and the amount of received light as described above will also change; for example, if the reflectance is larger than the case of the solid line in FIG. The relationship curve between distance and amount of received light is generally shifted in the positive direction of the amount of received light on the vertical axis, as indicated by the dashed-dotted line in the same figure, compared to the solid line in the same figure, and the reflectance is If it is smaller than the case of the solid line, the relationship curve between the distance and the amount of light received will be entirely displaced in the negative direction of the vertical axis as shown by the two-dot chain line in the same figure. When the surface texture changes and the reflectance changes midway, when the amount of light received changes due to the change in reflectance, the amount of light received changes due to the change in reflectance without actually changing the distance. Even if the change occurs, it can only be detected as a change in distance;
3) cannot be applied, and there is a problem in that it lacks applicability.
そこで、この発明では１表面性状が一様でない被測定物
との距離の測定にも適用できるようにすることを技術的
課題とする。Therefore, the technical object of the present invention is to enable the method to be applied to the measurement of the distance to an object to be measured whose surface properties are not uniform.
この発明は、前記の点に留意してなされたものであり、
投光用光ファイバの先端と受光用光ファイバの先端とが
被測定物表面から同一距離になるよう、前記両光ファイ
バを配設し、前記投光用光ファイバにより前記被測定物
表面に光を照射し、前記被測定物表面からの反射光を前
記受光用光ファイバにより受光し、前記受光用光ファイ
バの受光量にもとづき前記両党ファイバの先端と前記被
測定物表面との距離を測定する非接触変位測定方法にお
いて、前記投光用光ファイバを一部分岐して受光用補助
光ファイバを形成し、前記受光用光ファイバの受光量と
前記受光用補助光ファイバの受光量との比にもとづき、
前記投光用光ファイバおよび受光用光ファイバの先端と
被測定物表面との距離を測定することを特徴とする非接
触変位測定方法である。This invention was made with the above points in mind,
Both optical fibers are arranged so that the tip of the light-emitting optical fiber and the tip of the light-receiving optical fiber are the same distance from the surface of the object to be measured, and the light emitting optical fiber illuminates the surface of the object to be measured. , the reflected light from the surface of the object to be measured is received by the optical fiber for light reception, and the distance between the tip of the fiber and the surface of the object to be measured is measured based on the amount of light received by the optical fiber for light reception. In the non-contact displacement measurement method, a portion of the light emitting optical fiber is branched to form a light receiving auxiliary optical fiber, and the ratio of the amount of light received by the light receiving optical fiber to the light receiving amount of the light receiving auxiliary optical fiber is determined. Originally,
This is a non-contact displacement measuring method characterized by measuring the distance between the tips of the light emitting optical fiber and the light receiving optical fiber and the surface of the object to be measured.
したがって、この発明によると、たとえば被測定物の表
面性状が、ある位置を境に変化して反射率が変化する場
合、投光用、受光用光ファイバの先端と被測定物表面と
の距離を一定とすると、受光用光ファイバの受光量の変
化の割合と受光用補助光ファイバの受光量の変化の割合
とは等しくな抄、受光用光ファイバ゛の受光量と受光用
補助光ファイバの受光量との比が２被測定物の表面性状
の変化による反射率の変化に依存せず、距離のみに依存
して変化することになり、表面性状が一様でない被測定
物との距離の測定が可能となる。Therefore, according to the present invention, for example, when the surface quality of the object to be measured changes after a certain position and the reflectance changes, the distance between the tips of the optical fibers for transmitting and receiving light and the surface of the object to be measured changes. Assuming that it is constant, the rate of change in the amount of light received by the optical fiber for light reception and the rate of change in the amount of light received by the auxiliary optical fiber for light reception are equal. The ratio of the amount to the measured object does not depend on changes in reflectance due to changes in the surface texture of the object to be measured, but only changes depending on the distance, making it possible to measure the distance to an object whose surface texture is not uniform. becomes possible.
つぎに、この発明を、その１実施例を示した第１図ない
し第３図とともに詳細に説明する。Next, the present invention will be explained in detail with reference to FIGS. 1 to 3 showing one embodiment thereof.
第１図において、第４図と同一記号は同一のものもしく
は相当するものを示し、第４図と異なる点は、投光用光
ファイバ（１）の一部を分岐し、受光用補助光ファイバ
（４）を形成し、受光用光ファイバ（２）の受光量と受
光用補助光ファイバ（４）の受光量との比にもとづき２
両光フアイバ（１） 、 （２）の先端と被測定物（３
）の表面との距離りを測定するようにしだ点である。In Fig. 1, the same symbols as in Fig. 4 indicate the same or equivalent parts, and the difference from Fig. 4 is that a part of the light emitting optical fiber (1) is branched, and a part of the light receiving auxiliary optical fiber is branched. (4), and based on the ratio of the amount of light received by the light-receiving optical fiber (2) and the amount of light received by the auxiliary light-receiving optical fiber (4),
The tips of both optical fibers (1) and (2) and the object to be measured (3)
) is the starting point to measure the distance from the surface.
ところで、表面性状が一様で反射率が一定のテスト用被
測定物（３）を用い、距離りと受光用光ファイバ（２）
の受光量φ１および受光用補助光ファイバ（４）の受光
量φ２それぞれとの関係を調べた結果２受光用光フアイ
バ（２１の場合、第２図（ａ）中の１点鎖線に示すよう
に、前記した第６図中の各曲線と同様のパターンとなり
、受光用補助光ファイバ（４）の場合、第２図（ａ）中
の２点鎖線に示すように距離りが増加するに連れて受光
量が次第に減少するパターンとなり、受光用光ファイバ
（２）の受光量φ１と受光用補助光ファイバ（４）の受
光量φ２との比φ１／φ２ば、第２図（ｂ）に示すよう
に距ｇ！Ｄが増加するに連れて次第に大きくなる。By the way, we used a test object (3) with uniform surface properties and a constant reflectance, and measured the distance and light receiving optical fiber (2).
The relationship between the received light amount φ1 of the light receiving auxiliary optical fiber (4) and the received light amount φ2 of the light receiving auxiliary optical fiber (4) was investigated. , the pattern is similar to each curve in FIG. 6 described above, and in the case of the light receiving auxiliary optical fiber (4), as the distance increases as shown by the two-dot chain line in FIG. The amount of light received gradually decreases, and the ratio φ1/φ2 of the amount of light received by the light receiving optical fiber (2) φ1 and the amount of light received φ2 of the auxiliary light receiving optical fiber (4) becomes as shown in FIG. 2(b). It gradually becomes larger as the distance g!D increases.
このとき、被測定物（３）の表面性状が、ある位置を境
に変化して反射率が変化する場合１両党ファイバ（１）
、 （２）の先端と被測定物（３）の表面との距離を
一定とすると、受光用光ファイバ（２）の受光量φ１の
変化の割合と受光用補助光ファイバ（４）の受光量φ２
の変化の割合とが等しくなるため、両ファイバ（２）。At this time, if the surface texture of the object to be measured (3) changes after a certain position and the reflectance changes, the two-party fiber (1)
, If the distance between the tip of (2) and the surface of the object to be measured (3) is constant, the rate of change in the amount of light received by the light-receiving optical fiber (2) φ1 and the amount of light received by the auxiliary light-receiving optical fiber (4) are φ2
Since the rate of change in both fibers (2) is equal.
（４）の受光量の比φ１／φ２は変化せず、当該受光量
の比から求められる距離も何ら変化せず、両ファイバ（
２１、（４）の受光量の比φ１／φ２は被測定物の表面
性状の変化による反射率の変化に依存せず、距離りのみ
に依存して変化することになる。The ratio φ1/φ2 of the amount of received light in (4) does not change, the distance calculated from the ratio of the amount of received light does not change at all, and both fibers (
21, the ratio of the amount of received light φ1/φ2 in (4) does not depend on the change in reflectance due to a change in the surface properties of the object to be measured, but changes depending only on the distance.
従って、テスト用の被測定物を用い、第２図（ｂ）に示
すような距［Ｄに対する受光用光ファイバ（２）および
受光用補助光ファイバ（４）の受光量の比φ１／φ２の
関係を予め求めておけば、第８図に示すように、被測定
物（３）がたとえば異なる材質Ａ、Ｂからなり。Therefore, using a test object to be measured, the distance as shown in FIG. If the relationship is determined in advance, the object to be measured (3) may be made of different materials A and B, for example, as shown in FIG.
表面性状が途中で変化する場合であっても、予め求めた
距離りと受光量の比φ１／φ２との関係曲線。A relationship curve between a predetermined distance and the ratio of received light amount φ1/φ2 even if the surface texture changes during the process.
および両ファイバ（１）、（２ｊを第３図中の矢印方向
に移動させて得られる両ファイバ（２１、（４）の受光
量の比φｌ／φ２にもとづき、両党ファイバ（１） 、
（２）の先端と被測定物（３）の表面との距離りを連
続的に導出。Based on the ratio φl/φ2 of the amount of light received by both fibers (21, (4)) obtained by moving both fibers (1) and (2j in the arrow direction in FIG. 3), both fibers (1),
Continuously derive the distance between the tip of (2) and the surface of the object to be measured (3).
測定することができる。can be measured.
以上のように、この発明の非接触変位測定方法によると
、表面性状が一様でない被測定物であっても、投光用、
受光用光ファイバの先端と被測定物の表面との距離を、
小型で軽量な測定装置により連続的にしかも容易に測定
することができ、従来の欠点を解消することが可能とな
り、応用範囲の拡張を図ることができ、その効果は極め
て大きい。As described above, according to the non-contact displacement measurement method of the present invention, even if the object to be measured has uneven surface properties,
The distance between the tip of the receiving optical fiber and the surface of the object to be measured is
Continuous and easy measurement can be carried out using a small and lightweight measuring device, making it possible to eliminate the drawbacks of the conventional method and expanding the range of applications, which has extremely large effects.
第１図ないし第３図はこの発り」の非接触変位測定方法
の１実施例を示し、第１図は断面図、第２図（ａ）およ
び（ｂ）はそれぞれ距離と受光量および受光量比との関
係図、第３図はｆｌｌｌｌ定時の断面図、第４図は従来
の非接触変位測定方法による測定時の斜視図、第５図（
ａ） 、 （ｂ） 、 （Ｃ）はそれぞれ異なる状態で
の被測定物表面における投射スポット、受光視野を示す
図、第６図は距離と受光量との関係図である。
（１）・・・投光用光ファイバ、（２）・・・受光用光
ファイバ。
（３）・・・被測定物、（４）・・・受光用補助光ファ
イバ。Figures 1 to 3 show an example of the non-contact displacement measurement method of this invention, with Figure 1 being a cross-sectional view, and Figures 2 (a) and (b) showing distance, amount of received light, and amount of received light, respectively. Figure 3 is a cross-sectional view during full normal operation, Figure 4 is a perspective view during measurement using the conventional non-contact displacement measurement method, and Figure 5 is a diagram of the relationship with the quantity ratio.
a), (b), and (C) are diagrams showing a projection spot and a light-receiving field of view on the surface of an object to be measured in different states, respectively, and FIG. 6 is a diagram showing the relationship between distance and amount of light received. (1)... Optical fiber for light emission, (2)... Optical fiber for light reception. (3)...Object to be measured, (4)...Auxiliary optical fiber for light reception.
Claims (1)
端とが被測定物表面から同一距離になるよう、前記両光
ファイバを配設し、前記投光用光ファイバにより前記被
測定物表面に光を照射し、前記被測定物表面からの反射
光を前記受光用光ファイバにより受光し、前記受光用光
ファイバの受光量にもとづき前記両光ファイバの先端と
前記被測定物表面との距離を測定する非接触変位測定方
法において、 前記投光用光ファイバを一部分岐して受光用補助光ファ
イバを形成し、前記受光用光ファイバの受光量と前記受
光用補助光ファイバの受光量との比にもとづき、前記投
光用光ファイバおよび受光用光ファイバの先端と被測定
物表面との距離を測定することを特徴とする非接触変位
測定方法。(1) Both optical fibers are arranged so that the tip of the light-emitting optical fiber and the tip of the light-receiving optical fiber are the same distance from the surface of the object to be measured, and the light-emitting optical fiber is connected to the object to be measured. The surface is irradiated with light, the reflected light from the surface of the object to be measured is received by the light-receiving optical fiber, and the distance between the tips of the two optical fibers and the surface of the object is determined based on the amount of light received by the light-receiving optical fiber. In the non-contact displacement measurement method for measuring distance, a portion of the light emitting optical fiber is branched to form a light receiving auxiliary optical fiber, and the amount of light received by the light receiving optical fiber and the light receiving amount of the light receiving auxiliary optical fiber are separated. A non-contact displacement measuring method characterized in that the distance between the tips of the light emitting optical fiber and the light receiving optical fiber and the surface of the object to be measured is measured based on the ratio of the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25946486A JPS63113301A (en) | 1986-10-30 | 1986-10-30 | Non-contact displacement measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25946486A JPS63113301A (en) | 1986-10-30 | 1986-10-30 | Non-contact displacement measurement method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63113301A true JPS63113301A (en) | 1988-05-18 |
| JPH0577241B2 JPH0577241B2 (en) | 1993-10-26 |
Family
ID=17334433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25946486A Granted JPS63113301A (en) | 1986-10-30 | 1986-10-30 | Non-contact displacement measurement method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63113301A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014529740A (en) * | 2011-08-26 | 2014-11-13 | クアルコム，インコーポレイテッド | Proximity sensor calibration |
| JP2023085536A (en) * | 2017-03-16 | 2023-06-20 | トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | a detector for optically detecting at least one object |
-
1986
- 1986-10-30 JP JP25946486A patent/JPS63113301A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014529740A (en) * | 2011-08-26 | 2014-11-13 | クアルコム，インコーポレイテッド | Proximity sensor calibration |
| JP2023085536A (en) * | 2017-03-16 | 2023-06-20 | トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | a detector for optically detecting at least one object |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0577241B2 (en) | 1993-10-26 |
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