JPS6311728Y2 - - Google Patents

Info

Publication number: JPS6311728Y2
Authority: JP; Japan
Prior art keywords: case; photomask; lid; mask; reticle
Prior art date: 1983-06-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP1983092975U

Other languages

English (en)

Japanese (ja)

Other versions

JPS60923U (ja

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-06-17

Filing date

1983-06-17

Publication date

1988-04-05

1983-06-17 Application filed filed Critical

1983-06-17 Priority to JP1983092975U priority Critical patent/JPS60923U/ja

1985-01-07 Publication of JPS60923U publication Critical patent/JPS60923U/ja

1988-04-05 Application granted granted Critical

1988-04-05 Publication of JPS6311728Y2 publication Critical patent/JPS6311728Y2/ja

Status Granted legal-status Critical Current

Links

238000000059 patterning Methods 0.000 claims 1
239000000758 substrate Substances 0.000 description 6
239000011651 chromium Substances 0.000 description 4
239000004065 semiconductor Substances 0.000 description 4
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
239000011521 glass Substances 0.000 description 2
238000000034 method Methods 0.000 description 2
238000001259 photo etching Methods 0.000 description 2
239000010453 quartz Substances 0.000 description 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
238000004544 sputter deposition Methods 0.000 description 2
238000007738 vacuum evaporation Methods 0.000 description 2
NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
239000000853 adhesive Substances 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
238000011109 contamination Methods 0.000 description 1
230000007547 defect Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
238000005530 etching Methods 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
230000015654 memory Effects 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
238000000206 photolithography Methods 0.000 description 1
229920002120 photoresistant polymer Polymers 0.000 description 1
239000010409 thin film Substances 0.000 description 1

Landscapes

Packaging For Recording Disks (AREA)
Packaging Frangible Articles (AREA)

JP1983092975U 1983-06-17 1983-06-17 マスクケ−ス Granted JPS60923U (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1983092975U JPS60923U (ja)	1983-06-17	1983-06-17	マスクケ−ス

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1983092975U JPS60923U (ja)	1983-06-17	1983-06-17	マスクケ−ス

Publications (2)

Publication Number	Publication Date
JPS60923U JPS60923U (ja)	1985-01-07
JPS6311728Y2 true JPS6311728Y2 (de)	1988-04-05

Family

ID=30223482

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1983092975U Granted JPS60923U (ja)	1983-06-17	1983-06-17	マスクケ−ス

Country Status (1)

Country	Link
JP (1)	JPS60923U (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4276195B2 (ja) *	2005-03-04	2009-06-10	Ｔｄｋ株式会社	基板の保管方法及びコイル部品の製造方法

1983
- 1983-06-17 JP JP1983092975U patent/JPS60923U/ja active Granted

Also Published As

Publication number	Publication date
JPS60923U (ja)	1985-01-07

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