JPS63121362U - - Google Patents
Info
- Publication number
- JPS63121362U JPS63121362U JP1257787U JP1257787U JPS63121362U JP S63121362 U JPS63121362 U JP S63121362U JP 1257787 U JP1257787 U JP 1257787U JP 1257787 U JP1257787 U JP 1257787U JP S63121362 U JPS63121362 U JP S63121362U
- Authority
- JP
- Japan
- Prior art keywords
- pump container
- magnetic pole
- pump
- cathodes
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257787U JPS63121362U (de) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257787U JPS63121362U (de) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121362U true JPS63121362U (de) | 1988-08-05 |
Family
ID=30800837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1257787U Pending JPS63121362U (de) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121362U (de) |
-
1987
- 1987-01-30 JP JP1257787U patent/JPS63121362U/ja active Pending
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