JPS63121428U - - Google Patents
Info
- Publication number
- JPS63121428U JPS63121428U JP1246787U JP1246787U JPS63121428U JP S63121428 U JPS63121428 U JP S63121428U JP 1246787 U JP1246787 U JP 1246787U JP 1246787 U JP1246787 U JP 1246787U JP S63121428 U JPS63121428 U JP S63121428U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- discharge electrode
- film manufacturing
- contactor
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1246787U JPS63121428U (2) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1246787U JPS63121428U (2) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121428U true JPS63121428U (2) | 1988-08-05 |
Family
ID=30800621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1246787U Pending JPS63121428U (2) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121428U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6489316A (en) * | 1987-09-29 | 1989-04-03 | Fuji Electric Co Ltd | Device for manufacturing thin film |
-
1987
- 1987-01-30 JP JP1246787U patent/JPS63121428U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6489316A (en) * | 1987-09-29 | 1989-04-03 | Fuji Electric Co Ltd | Device for manufacturing thin film |
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