JPS6312937B2 - - Google Patents

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a vacuum evaporation method, and more specifically, in the evaporation of a evaporation material onto the surface of an evaporation target such as a plastic film or a metal plate, the evaporation process is carried out between the evaporation target and the evaporation film. The invention relates to a vacuum evaporation method that can provide extremely strong adhesion to the substrate.

(Prior art and its problems) When depositing various metals such as Al or other deposition materials on the surface of an object to be deposited such as a plastic film or a metal plate, for example, it is necessary to improve the adhesion between the plastic film and the deposited film. In order to improve the performance, an undercoat layer is provided on the plastic film in advance, or the surface of the plastic film is subjected to corona discharge treatment. However, even with these methods, the plastic film and the evaporated film are only in contact with each other at the interface, or even when the atoms of the evaporation material strongly hit the plastic film, at most the atoms are wedged into the plastic film to some extent. It's nothing more than that. Therefore, there is a large limit to the adhesion of the vapor-deposited film to the plastic film, and the adhesion of the vapor-deposited film is always a problem. Furthermore, although a degreasing treatment or the like is performed beforehand for vapor deposition on a metal plate, etc., the adhesion of the vapor-deposited film is similar to that of a plastic film.

(Means for Solving the Problems) This invention provides a method for depositing a deposition material onto the surface of an object to be deposited such as a plastic film or a metal plate using a laser beam. This is a vacuum deposition method characterized by depositing a deposition material while melting it. Hereinafter, the present invention will be explained in detail by picking up a plastic film as an object to be deposited. Of course, other than plastic film, any material to be deposited whose surface can be melted by laser light can be used instead of plastic film.

Only the surface of plastic film is melted using laser light. This is because it is the surface of the plastic film that is related to the adhesion of the deposited film in the thickness direction of the plastic film. Melting only the surface of the plastic film is also necessary to avoid thermal distortion of the entire plastic film. The depth to which the surface of the plastic film is melted varies depending on the type of plastic film and its thickness, but is generally on the order of angstroms (Å) to micrometers (μm).

When the evaporation material is evaporated while the surface of the plastic film is melted by laser light, the evaporated atoms of the evaporation material will adhere to the melted part, so it is possible to fuse the evaporation atoms of the plastic film and the evaporation material. As a result, the plastic film and the atoms of the vapor deposition material become integrated, resulting in extremely strong adhesion.

Melting only the surface of plastic film during vapor deposition was achieved for the first time by using laser light. If the surface of the plastic film being deposited can be melted other than by laser light, there is no need to use laser light at all, but there is no other method available at present. The position, angle, intensity, etc. of the laser beam may be controlled depending on the type of plastic film or vapor deposition material used.

The present invention can be used for continuous or semi-continuous deposition on long plastic films, as well as for non-long plastic film deposition. Furthermore, by controlling laser light, the present invention can be used for vapor deposition on objects other than plastic films, and can of course also be used for vapor deposition on objects other than film-like objects.

(Effects of the Invention) Since the present invention has been explained above, taking a plastic film as an example, the surface of the plastic film is melted during vapor deposition, and as a result, the atoms of the vapor deposition material adhering thereto are separated from the plastic film. The plastic film can be fused to the surface of the plastic film to form a vapor deposited film with extremely strong adhesion.

Claims (1)

[Claims] 1. When depositing a deposition material on the surface of an object to be deposited such as a plastic film or a metal plate, the material is deposited while melting the surface of the object to be deposited such as a plastic film or metal plate with a laser beam. Vacuum deposition method.