JPS63131121U - - Google Patents
Info
- Publication number
- JPS63131121U JPS63131121U JP2315987U JP2315987U JPS63131121U JP S63131121 U JPS63131121 U JP S63131121U JP 2315987 U JP2315987 U JP 2315987U JP 2315987 U JP2315987 U JP 2315987U JP S63131121 U JPS63131121 U JP S63131121U
- Authority
- JP
- Japan
- Prior art keywords
- target
- back plate
- ceramics
- metals
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2315987U JPS63131121U (2) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2315987U JPS63131121U (2) | 1987-02-18 | 1987-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131121U true JPS63131121U (2) | 1988-08-26 |
Family
ID=30821202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2315987U Pending JPS63131121U (2) | 1987-02-18 | 1987-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131121U (2) |
-
1987
- 1987-02-18 JP JP2315987U patent/JPS63131121U/ja active Pending
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