JPS63132427U - - Google Patents
Info
- Publication number
- JPS63132427U JPS63132427U JP2413287U JP2413287U JPS63132427U JP S63132427 U JPS63132427 U JP S63132427U JP 2413287 U JP2413287 U JP 2413287U JP 2413287 U JP2413287 U JP 2413287U JP S63132427 U JPS63132427 U JP S63132427U
- Authority
- JP
- Japan
- Prior art keywords
- ring body
- optical substrate
- several locations
- ion etching
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000000992 sputter etching Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2413287U JPS63132427U (2) | 1987-02-23 | 1987-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2413287U JPS63132427U (2) | 1987-02-23 | 1987-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63132427U true JPS63132427U (2) | 1988-08-30 |
Family
ID=30823085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2413287U Pending JPS63132427U (2) | 1987-02-23 | 1987-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63132427U (2) |
-
1987
- 1987-02-23 JP JP2413287U patent/JPS63132427U/ja active Pending
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